JPS52141574A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52141574A
JPS52141574A JP5865376A JP5865376A JPS52141574A JP S52141574 A JPS52141574 A JP S52141574A JP 5865376 A JP5865376 A JP 5865376A JP 5865376 A JP5865376 A JP 5865376A JP S52141574 A JPS52141574 A JP S52141574A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
etching
emitter region
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5865376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5526627B2 (enrdf_load_stackoverflow
Inventor
Tsutomu Fujita
Toyoki Takemoto
Tadanaka Yoneda
Haruyasu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5865376A priority Critical patent/JPS52141574A/ja
Publication of JPS52141574A publication Critical patent/JPS52141574A/ja
Publication of JPS5526627B2 publication Critical patent/JPS5526627B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP5865376A 1976-05-20 1976-05-20 Manufacture of semiconductor device Granted JPS52141574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5865376A JPS52141574A (en) 1976-05-20 1976-05-20 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5865376A JPS52141574A (en) 1976-05-20 1976-05-20 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52141574A true JPS52141574A (en) 1977-11-25
JPS5526627B2 JPS5526627B2 (enrdf_load_stackoverflow) 1980-07-15

Family

ID=13090535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5865376A Granted JPS52141574A (en) 1976-05-20 1976-05-20 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52141574A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034485A (enrdf_load_stackoverflow) * 1973-07-31 1975-04-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034485A (enrdf_load_stackoverflow) * 1973-07-31 1975-04-02

Also Published As

Publication number Publication date
JPS5526627B2 (enrdf_load_stackoverflow) 1980-07-15

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