JPS52141574A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS52141574A JPS52141574A JP5865376A JP5865376A JPS52141574A JP S52141574 A JPS52141574 A JP S52141574A JP 5865376 A JP5865376 A JP 5865376A JP 5865376 A JP5865376 A JP 5865376A JP S52141574 A JPS52141574 A JP S52141574A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- etching
- emitter region
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5865376A JPS52141574A (en) | 1976-05-20 | 1976-05-20 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5865376A JPS52141574A (en) | 1976-05-20 | 1976-05-20 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52141574A true JPS52141574A (en) | 1977-11-25 |
JPS5526627B2 JPS5526627B2 (enrdf_load_stackoverflow) | 1980-07-15 |
Family
ID=13090535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5865376A Granted JPS52141574A (en) | 1976-05-20 | 1976-05-20 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52141574A (enrdf_load_stackoverflow) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034485A (enrdf_load_stackoverflow) * | 1973-07-31 | 1975-04-02 |
-
1976
- 1976-05-20 JP JP5865376A patent/JPS52141574A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034485A (enrdf_load_stackoverflow) * | 1973-07-31 | 1975-04-02 |
Also Published As
Publication number | Publication date |
---|---|
JPS5526627B2 (enrdf_load_stackoverflow) | 1980-07-15 |
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