JPS52129381A - Production of photo mask - Google Patents

Production of photo mask

Info

Publication number
JPS52129381A
JPS52129381A JP4542576A JP4542576A JPS52129381A JP S52129381 A JPS52129381 A JP S52129381A JP 4542576 A JP4542576 A JP 4542576A JP 4542576 A JP4542576 A JP 4542576A JP S52129381 A JPS52129381 A JP S52129381A
Authority
JP
Japan
Prior art keywords
photo mask
production
resist
photo
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4542576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5624260B2 (member.php
Inventor
Kenichi Kobayashi
Takenori Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4542576A priority Critical patent/JPS52129381A/ja
Publication of JPS52129381A publication Critical patent/JPS52129381A/ja
Publication of JPS5624260B2 publication Critical patent/JPS5624260B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP4542576A 1976-04-23 1976-04-23 Production of photo mask Granted JPS52129381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4542576A JPS52129381A (en) 1976-04-23 1976-04-23 Production of photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4542576A JPS52129381A (en) 1976-04-23 1976-04-23 Production of photo mask

Publications (2)

Publication Number Publication Date
JPS52129381A true JPS52129381A (en) 1977-10-29
JPS5624260B2 JPS5624260B2 (member.php) 1981-06-04

Family

ID=12718911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4542576A Granted JPS52129381A (en) 1976-04-23 1976-04-23 Production of photo mask

Country Status (1)

Country Link
JP (1) JPS52129381A (member.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169495A (ja) * 1985-09-17 1986-04-10 株式会社日立製作所 磁気通帳

Also Published As

Publication number Publication date
JPS5624260B2 (member.php) 1981-06-04

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