JPS52129381A - Production of photo mask - Google Patents
Production of photo maskInfo
- Publication number
- JPS52129381A JPS52129381A JP4542576A JP4542576A JPS52129381A JP S52129381 A JPS52129381 A JP S52129381A JP 4542576 A JP4542576 A JP 4542576A JP 4542576 A JP4542576 A JP 4542576A JP S52129381 A JPS52129381 A JP S52129381A
- Authority
- JP
- Japan
- Prior art keywords
- photo mask
- production
- resist
- photo
- patterning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
PURPOSE: To obtain a photo mask of high resolving power with a simple method by coating photo resist on a glass substrate, patterning the resist and exposing the resist to an plasma atmosphere of a halogenated carbon compound to cure.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4542576A JPS52129381A (en) | 1976-04-23 | 1976-04-23 | Production of photo mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4542576A JPS52129381A (en) | 1976-04-23 | 1976-04-23 | Production of photo mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52129381A true JPS52129381A (en) | 1977-10-29 |
JPS5624260B2 JPS5624260B2 (en) | 1981-06-04 |
Family
ID=12718911
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4542576A Granted JPS52129381A (en) | 1976-04-23 | 1976-04-23 | Production of photo mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52129381A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6169495A (en) * | 1985-09-17 | 1986-04-10 | 株式会社日立製作所 | Magnetic bankbook |
-
1976
- 1976-04-23 JP JP4542576A patent/JPS52129381A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5624260B2 (en) | 1981-06-04 |
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