JPS52127166A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS52127166A
JPS52127166A JP4364476A JP4364476A JPS52127166A JP S52127166 A JPS52127166 A JP S52127166A JP 4364476 A JP4364476 A JP 4364476A JP 4364476 A JP4364476 A JP 4364476A JP S52127166 A JPS52127166 A JP S52127166A
Authority
JP
Japan
Prior art keywords
substrate
semiconductor
manufacture
isl
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4364476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS616539B2 (enrdf_load_html_response
Inventor
Takashi Yahano
Masao Kanazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4364476A priority Critical patent/JPS52127166A/ja
Publication of JPS52127166A publication Critical patent/JPS52127166A/ja
Publication of JPS616539B2 publication Critical patent/JPS616539B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP4364476A 1976-04-19 1976-04-19 Manufacture of semiconductor Granted JPS52127166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4364476A JPS52127166A (en) 1976-04-19 1976-04-19 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4364476A JPS52127166A (en) 1976-04-19 1976-04-19 Manufacture of semiconductor

Publications (2)

Publication Number Publication Date
JPS52127166A true JPS52127166A (en) 1977-10-25
JPS616539B2 JPS616539B2 (enrdf_load_html_response) 1986-02-27

Family

ID=12669567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4364476A Granted JPS52127166A (en) 1976-04-19 1976-04-19 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS52127166A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191035A (ja) * 1985-02-20 1986-08-25 Rohm Co Ltd 半導体装置の製造方法
JPH01291430A (ja) * 1988-05-18 1989-11-24 Fujitsu Ltd 半導体装置の製造方法
JP2008177468A (ja) * 2007-01-22 2008-07-31 Tokyo Electron Ltd 基板の処理方法、塗布処理装置及び基板処理システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979780A (enrdf_load_html_response) * 1972-12-08 1974-08-01
JPS5010572A (enrdf_load_html_response) * 1973-05-25 1975-02-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979780A (enrdf_load_html_response) * 1972-12-08 1974-08-01
JPS5010572A (enrdf_load_html_response) * 1973-05-25 1975-02-03

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191035A (ja) * 1985-02-20 1986-08-25 Rohm Co Ltd 半導体装置の製造方法
JPH01291430A (ja) * 1988-05-18 1989-11-24 Fujitsu Ltd 半導体装置の製造方法
JP2008177468A (ja) * 2007-01-22 2008-07-31 Tokyo Electron Ltd 基板の処理方法、塗布処理装置及び基板処理システム
US8703400B2 (en) 2007-01-22 2014-04-22 Tokyo Electron Limited Substrate treatment method, coating treatment apparatus, and substrate treatment system

Also Published As

Publication number Publication date
JPS616539B2 (enrdf_load_html_response) 1986-02-27

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