JPS52117564A - Device for treating computerrcontrolled semiconductor wafer - Google Patents

Device for treating computerrcontrolled semiconductor wafer

Info

Publication number
JPS52117564A
JPS52117564A JP1630977A JP1630977A JPS52117564A JP S52117564 A JPS52117564 A JP S52117564A JP 1630977 A JP1630977 A JP 1630977A JP 1630977 A JP1630977 A JP 1630977A JP S52117564 A JPS52117564 A JP S52117564A
Authority
JP
Japan
Prior art keywords
computerrcontrolled
treating
semiconductor wafer
wafer
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1630977A
Other languages
English (en)
Other versions
JPS5540184B2 (ja
Inventor
Ansonii Kakoma Jiyooji
Fuiritsupu Kasutoratsuch Pooru
Otsutoo Doratsuchieru Uiriamu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS52117564A publication Critical patent/JPS52117564A/ja
Publication of JPS5540184B2 publication Critical patent/JPS5540184B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31268—Central workpiece storage, convey workpiece, work pallet, holder to workcell
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/36—Nc in input of data, input key till input tape
    • G05B2219/36523—Select with code on workpiece, fixture, clamp, object
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45026—Circuit board, pcb
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49302—Part, workpiece, code, tool identification
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
    • Y10T29/49828—Progressively advancing of work assembly station or assembled portion of work
    • Y10T29/49829—Advancing work to successive stations [i.e., assembly line]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/51—Plural diverse manufacturing apparatus including means for metal shaping or assembling
    • Y10T29/5124—Plural diverse manufacturing apparatus including means for metal shaping or assembling with means to feed work intermittently from one tool station to another
JP1630977A 1976-03-26 1977-02-18 Device for treating computerrcontrolled semiconductor wafer Granted JPS52117564A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/670,596 US4027246A (en) 1976-03-26 1976-03-26 Automated integrated circuit manufacturing system

Publications (2)

Publication Number Publication Date
JPS52117564A true JPS52117564A (en) 1977-10-03
JPS5540184B2 JPS5540184B2 (ja) 1980-10-16

Family

ID=24691043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1630977A Granted JPS52117564A (en) 1976-03-26 1977-02-18 Device for treating computerrcontrolled semiconductor wafer

Country Status (10)

Country Link
US (1) US4027246A (ja)
JP (1) JPS52117564A (ja)
AU (1) AU505102B2 (ja)
CA (1) CA1058329A (ja)
DE (1) DE2708954A1 (ja)
FR (1) FR2345767A1 (ja)
GB (1) GB1568854A (ja)
IT (1) IT1079559B (ja)
NL (1) NL7702937A (ja)
SE (1) SE439072B (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821318A (ja) * 1981-07-28 1983-02-08 Toshiba Corp ウエハ搬送方式
JP2000198513A (ja) * 1998-11-04 2000-07-18 Samsung Electronics Co Ltd 作業対象物の選択処理システム及びその制御方法

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JPS5821318A (ja) * 1981-07-28 1983-02-08 Toshiba Corp ウエハ搬送方式
JP2000198513A (ja) * 1998-11-04 2000-07-18 Samsung Electronics Co Ltd 作業対象物の選択処理システム及びその制御方法

Also Published As

Publication number Publication date
JPS5540184B2 (ja) 1980-10-16
GB1568854A (en) 1980-06-04
IT1079559B (it) 1985-05-13
AU2334777A (en) 1978-09-21
SE439072B (sv) 1985-05-28
DE2708954C2 (ja) 1992-03-26
FR2345767B1 (ja) 1979-06-01
DE2708954A1 (de) 1977-10-06
AU505102B2 (en) 1979-11-08
SE7702444L (sv) 1977-09-27
FR2345767A1 (fr) 1977-10-21
CA1058329A (en) 1979-07-10
US4027246A (en) 1977-05-31
NL7702937A (nl) 1977-09-28

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