GB2174215B - Master film processing robot - Google Patents

Master film processing robot

Info

Publication number
GB2174215B
GB2174215B GB08510262A GB8510262A GB2174215B GB 2174215 B GB2174215 B GB 2174215B GB 08510262 A GB08510262 A GB 08510262A GB 8510262 A GB8510262 A GB 8510262A GB 2174215 B GB2174215 B GB 2174215B
Authority
GB
United Kingdom
Prior art keywords
film processing
processing robot
master film
master
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08510262A
Other versions
GB2174215A (en
GB8510262D0 (en
Inventor
Teruo Orikasa
Shigeo Sumi
Hiroshi Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Corp filed Critical Somar Corp
Priority to GB08510262A priority Critical patent/GB2174215B/en
Priority to DE19853514988 priority patent/DE3514988A1/en
Publication of GB8510262D0 publication Critical patent/GB8510262D0/en
Publication of GB2174215A publication Critical patent/GB2174215A/en
Application granted granted Critical
Publication of GB2174215B publication Critical patent/GB2174215B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
GB08510262A 1985-04-23 1985-04-23 Master film processing robot Expired GB2174215B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB08510262A GB2174215B (en) 1985-04-23 1985-04-23 Master film processing robot
DE19853514988 DE3514988A1 (en) 1985-04-23 1985-04-25 PROCESSING SYSTEM FOR A FILM ORIGINAL

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08510262A GB2174215B (en) 1985-04-23 1985-04-23 Master film processing robot

Publications (3)

Publication Number Publication Date
GB8510262D0 GB8510262D0 (en) 1985-05-30
GB2174215A GB2174215A (en) 1986-10-29
GB2174215B true GB2174215B (en) 1988-09-14

Family

ID=10578039

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08510262A Expired GB2174215B (en) 1985-04-23 1985-04-23 Master film processing robot

Country Status (2)

Country Link
DE (1) DE3514988A1 (en)
GB (1) GB2174215B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2210996A (en) * 1987-10-09 1989-06-21 Plessey Co Plc Contents verification apparatus
DE3937556C2 (en) * 1989-11-10 1995-01-05 Krause Biagosch Gmbh Stackable template for the production of printing plates
US6467895B1 (en) 2000-02-16 2002-10-22 Hewlett-Packard Company Vacuum feeder for imaging device
US7661672B2 (en) 2006-04-28 2010-02-16 Michael Tenbrock Film handling system
CN107265129A (en) * 2017-06-02 2017-10-20 成都福莫斯智能系统集成服务有限公司 Using the system of image recognition auxiliary robot stacking

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2039208C3 (en) * 1970-08-06 1980-04-24 Agfa-Gevaert Ag, 5090 Leverkusen Method and device for automatic film positioning in microfilm and re-enlarging devices
CS160721B1 (en) * 1973-05-29 1975-05-04
US4027246A (en) * 1976-03-26 1977-05-31 International Business Machines Corporation Automated integrated circuit manufacturing system
US4124290A (en) * 1977-05-04 1978-11-07 Bell & Howell Company System for interfacing an automatic processing machine with a stack of documents which it is processing
JPS5577434A (en) * 1978-11-27 1980-06-11 Nissan Motor Co Ltd Car assembly control system
GB2049994B (en) * 1979-05-21 1983-08-03 Rca Corp Method for assembly in a crt
DE3027410A1 (en) * 1980-07-19 1982-02-18 Schering Ag, 1000 Berlin Und 4619 Bergkamen METHOD FOR ENTERING INFORMATION IN GALVANIZING SYSTEMS, AND RELATED GOODS AND DEVICE
US4442188A (en) * 1981-01-02 1984-04-10 Amdahl Corporation System for specifying critical dimensions, sequence numbers and revision levels on integrated circuit photomasks
US4389117A (en) * 1981-05-21 1983-06-21 Consolidated Micrographics, Inc. Microfiche separator and transport apparatus
DE3220009A1 (en) * 1982-05-27 1983-12-01 Johann 8904 Friedberg Tiefel Perforated register suction plate
DE3233318A1 (en) * 1982-09-08 1984-03-08 Agfa-Gevaert Ag, 5090 Leverkusen Method for producing a continuous copy set by means of an optical copying device and device for carrying out the method

Also Published As

Publication number Publication date
GB2174215A (en) 1986-10-29
DE3514988A1 (en) 1986-10-30
GB8510262D0 (en) 1985-05-30
DE3514988C2 (en) 1988-06-09

Similar Documents

Publication Publication Date Title
GB2176168B (en) Robot apparatus
DE3365240D1 (en) Robot system
GB2188278B (en) Contoured film
AU585068B2 (en) Apparatus for handling objects
GB8607278D0 (en) Thin film forming
GB8321225D0 (en) Robot system
EP0219826A3 (en) Vacuum processing system
EP0202686A3 (en) Geometric processing system
EP0205809A3 (en) Vector processing
DE3664281D1 (en) Master manipulator
GB8504024D0 (en) Robot system
DE3271350D1 (en) Robot system
AU591742B2 (en) Processing holograms
GB8531187D0 (en) Handling workpiece
AU590810B2 (en) Processing holograms
GB2174215B (en) Master film processing robot
GB8617904D0 (en) Thin film
GB8627420D0 (en) Robot
GB8505979D0 (en) Film editing
GB2207114B (en) Article handling system
GB8623799D0 (en) Semiconductor film
GB8607078D0 (en) Transporting disc films
GB2184747B (en) Thin films
GB8523544D0 (en) Film
GB8502444D0 (en) Photographic process

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930423