JPH1197535A5 - - Google Patents

Info

Publication number
JPH1197535A5
JPH1197535A5 JP1997259648A JP25964897A JPH1197535A5 JP H1197535 A5 JPH1197535 A5 JP H1197535A5 JP 1997259648 A JP1997259648 A JP 1997259648A JP 25964897 A JP25964897 A JP 25964897A JP H1197535 A5 JPH1197535 A5 JP H1197535A5
Authority
JP
Japan
Prior art keywords
layer
metal
semiconductor device
substitution
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997259648A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1197535A (ja
JP4211014B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP25964897A priority Critical patent/JP4211014B2/ja
Priority claimed from JP25964897A external-priority patent/JP4211014B2/ja
Publication of JPH1197535A publication Critical patent/JPH1197535A/ja
Publication of JPH1197535A5 publication Critical patent/JPH1197535A5/ja
Application granted granted Critical
Publication of JP4211014B2 publication Critical patent/JP4211014B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP25964897A 1997-09-25 1997-09-25 半導体装置の製造方法 Expired - Fee Related JP4211014B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25964897A JP4211014B2 (ja) 1997-09-25 1997-09-25 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25964897A JP4211014B2 (ja) 1997-09-25 1997-09-25 半導体装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005096944A Division JP4250146B2 (ja) 2005-03-30 2005-03-30 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JPH1197535A JPH1197535A (ja) 1999-04-09
JPH1197535A5 true JPH1197535A5 (enExample) 2005-09-15
JP4211014B2 JP4211014B2 (ja) 2009-01-21

Family

ID=17336976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25964897A Expired - Fee Related JP4211014B2 (ja) 1997-09-25 1997-09-25 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP4211014B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003234410A (ja) 2002-02-08 2003-08-22 Fujitsu Ltd キャパシタ及びその製造方法並びに半導体装置
JP2003249553A (ja) 2002-02-26 2003-09-05 Fujitsu Ltd アンチヒューズ及びその書き込み方法
KR100738065B1 (ko) * 2002-07-10 2007-07-10 삼성전자주식회사 한 개의 트랜지스터와 데이터 저장 수단으로 한 개의저항체를구비하는 메모리 소자 및 그 구동 방법
US7550799B2 (en) 2002-11-18 2009-06-23 Fujitsu Microelectronics Limited Semiconductor device and fabrication method of a semiconductor device
JP4209206B2 (ja) 2003-01-14 2009-01-14 富士通マイクロエレクトロニクス株式会社 半導体装置の製造方法
JP2007013196A (ja) * 2006-08-23 2007-01-18 Renesas Technology Corp 半導体装置
US20150303200A1 (en) * 2012-11-28 2015-10-22 Ps4 Luxco S.A.R.L. Semiconductor device and method for manufacturing same
US9543310B2 (en) 2014-09-10 2017-01-10 Kabushiki Kaisha Toshiba Semiconductor storage device having communicated air gaps between adjacent memory cells
WO2021145082A1 (ja) * 2020-01-14 2021-07-22 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子および電子機器

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