JPH11501738A - 反射光学付きレーザー走査装置 - Google Patents
反射光学付きレーザー走査装置Info
- Publication number
- JPH11501738A JPH11501738A JP8527069A JP52706996A JPH11501738A JP H11501738 A JPH11501738 A JP H11501738A JP 8527069 A JP8527069 A JP 8527069A JP 52706996 A JP52706996 A JP 52706996A JP H11501738 A JPH11501738 A JP H11501738A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- laser beam
- mirrors
- optical path
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/124—Details of the optical system between the light source and the polygonal mirror
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Lenses (AREA)
- Optical Elements Other Than Lenses (AREA)
- Lasers (AREA)
- Laser Surgery Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/398,738 US5561544A (en) | 1995-03-06 | 1995-03-06 | Laser scanning system with reflecting optics |
US08/398,738 | 1995-03-06 | ||
PCT/US1996/003208 WO1996027814A1 (fr) | 1995-03-06 | 1996-03-06 | Systeme a balayage laser dote d'optique reflechissante |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11501738A true JPH11501738A (ja) | 1999-02-09 |
Family
ID=23576607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8527069A Pending JPH11501738A (ja) | 1995-03-06 | 1996-03-06 | 反射光学付きレーザー走査装置 |
Country Status (8)
Country | Link |
---|---|
US (2) | US5561544A (fr) |
EP (1) | EP0813696B8 (fr) |
JP (1) | JPH11501738A (fr) |
AT (1) | ATE344469T1 (fr) |
DE (1) | DE69636668T2 (fr) |
ES (1) | ES2276399T3 (fr) |
PT (1) | PT813696E (fr) |
WO (1) | WO1996027814A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012165575A1 (fr) * | 2011-06-02 | 2012-12-06 | 日本電気株式会社 | Dispositif d'affichage d'image |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19654210C2 (de) * | 1996-12-24 | 1999-12-09 | Leica Microsystems | Optische Anordnung zum Scannen eines Strahls in zwei im wesentlichen senkrecht zueinander liegenden Achsen |
US6078420A (en) * | 1998-06-24 | 2000-06-20 | Optical Engineering, Inc. | Hole-coupled laser scanning system |
DE10033549A1 (de) * | 2000-07-11 | 2002-01-24 | Leica Microsystems | Optische Anordnung zum Ablenken eines Lichtstrahls insbesondere in zwei im wesentlichen senkrecht zueinander liegenden Richtungen |
KR100619365B1 (ko) * | 2003-11-03 | 2006-09-12 | 삼성전기주식회사 | 회절 다중빔을 이용한 스캐닝 장치 |
JP4299185B2 (ja) * | 2004-04-27 | 2009-07-22 | 株式会社ディスコ | レーザー加工装置 |
EP1695787A1 (fr) * | 2005-02-25 | 2006-08-30 | Trumpf Laser- und Systemtechnik GmbH | Procédé d'usinage laser utilisant plusieurs stations de travail |
JP2008203434A (ja) * | 2007-02-19 | 2008-09-04 | Fujitsu Ltd | 走査機構、被加工材の加工方法および加工装置 |
US8294062B2 (en) * | 2007-08-20 | 2012-10-23 | Universal Laser Systems, Inc. | Laser beam positioning systems for material processing and methods for using such systems |
GB0809003D0 (en) * | 2008-05-17 | 2008-06-25 | Rumsby Philip T | Method and apparatus for laser process improvement |
DE102013226614A1 (de) * | 2013-12-19 | 2015-06-25 | Osram Gmbh | Beleuchtungseinrichtung |
JP6399913B2 (ja) | 2014-12-04 | 2018-10-03 | 株式会社ディスコ | ウエーハの生成方法 |
JP6358941B2 (ja) | 2014-12-04 | 2018-07-18 | 株式会社ディスコ | ウエーハの生成方法 |
JP6391471B2 (ja) | 2015-01-06 | 2018-09-19 | 株式会社ディスコ | ウエーハの生成方法 |
JP6395633B2 (ja) | 2015-02-09 | 2018-09-26 | 株式会社ディスコ | ウエーハの生成方法 |
JP6395632B2 (ja) | 2015-02-09 | 2018-09-26 | 株式会社ディスコ | ウエーハの生成方法 |
JP6425606B2 (ja) | 2015-04-06 | 2018-11-21 | 株式会社ディスコ | ウエーハの生成方法 |
JP6429715B2 (ja) | 2015-04-06 | 2018-11-28 | 株式会社ディスコ | ウエーハの生成方法 |
JP6494382B2 (ja) | 2015-04-06 | 2019-04-03 | 株式会社ディスコ | ウエーハの生成方法 |
KR102537341B1 (ko) * | 2015-05-08 | 2023-05-25 | 이케르구네, 아.이.에. | 에너지 빔을 이용하는 철계 재료의 열 처리를 위한 방법 및 장치 |
JP6472333B2 (ja) | 2015-06-02 | 2019-02-20 | 株式会社ディスコ | ウエーハの生成方法 |
JP6482423B2 (ja) * | 2015-07-16 | 2019-03-13 | 株式会社ディスコ | ウエーハの生成方法 |
JP6482425B2 (ja) | 2015-07-21 | 2019-03-13 | 株式会社ディスコ | ウエーハの薄化方法 |
JP6472347B2 (ja) | 2015-07-21 | 2019-02-20 | 株式会社ディスコ | ウエーハの薄化方法 |
JP6690983B2 (ja) | 2016-04-11 | 2020-04-28 | 株式会社ディスコ | ウエーハ生成方法及び実第2のオリエンテーションフラット検出方法 |
KR102603393B1 (ko) * | 2016-12-06 | 2023-11-17 | 삼성디스플레이 주식회사 | 레이저 가공 장치 |
JP6858587B2 (ja) | 2017-02-16 | 2021-04-14 | 株式会社ディスコ | ウエーハ生成方法 |
JP2021504150A (ja) * | 2017-11-22 | 2021-02-15 | アルテック アンゲヴァンテ レーザーリヒト テヒノロギー ゲゼルシャフト ミット ベシュレンクテル ハフツング | レーザーマーキングシステム |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4160939A (en) * | 1977-09-13 | 1979-07-10 | Xerox Corporation | Motor speed control system |
US4232960A (en) * | 1979-02-21 | 1980-11-11 | Xerox Corporation | Scanning system |
US4388651A (en) * | 1981-05-28 | 1983-06-14 | Lincoln Laser Co. | Method and apparatus for generating a scanned optical output signal |
US4461947A (en) | 1982-08-24 | 1984-07-24 | Allied Corporation | Rotating laser beam with coincident gas jet |
US4469931A (en) | 1982-09-13 | 1984-09-04 | Macken John A | Laser assisted saw device |
US4755999A (en) | 1985-03-25 | 1988-07-05 | Macken John A | Laser apparatus utilizing a magnetically enhanced electrical discharge |
FR2580870B1 (fr) * | 1985-04-23 | 1987-09-25 | Arnaud Jean | Appareil de regulation de caracteristiques d'un faisceau lumineux, notamment d'un laser de puissance |
DE3709351A1 (de) * | 1987-03-21 | 1988-09-29 | Heraeus Gmbh W C | Strahlfuehrungsoptik fuer laserstrahlung |
US4941731A (en) | 1987-07-01 | 1990-07-17 | John Macken | Corner cube utilizing generally spherical surfaces |
US5206763A (en) | 1989-05-09 | 1993-04-27 | Macken John A | Corrective optics for rectangular laser beams |
US4921338A (en) | 1989-05-09 | 1990-05-01 | Macken John A | Corrective optics for rectangular laser beams |
US5089683A (en) * | 1990-09-18 | 1992-02-18 | Union Carbide Coatings Service Technology Corporation | Device for producing a constant length laser beam and method for producing it |
JP2736182B2 (ja) | 1991-02-28 | 1998-04-02 | ファナック株式会社 | レーザ装置及びレーザ溶接方法 |
US5142119A (en) | 1991-03-14 | 1992-08-25 | Saturn Corporation | Laser welding of galvanized steel |
US5155323A (en) | 1991-05-16 | 1992-10-13 | John Macken | Dual focus laser welding |
US5173796A (en) * | 1991-05-20 | 1992-12-22 | Palm Steven G | Three dimensional scanning system |
US5184012A (en) * | 1991-12-26 | 1993-02-02 | Olympus Optical Co., Ltd. | Optical scanning apparatus with axis deviation correction |
US5237149A (en) | 1992-03-26 | 1993-08-17 | John Macken | Laser machining utilizing a spacial filter |
US5274492A (en) * | 1992-07-02 | 1993-12-28 | Mahmoud Razzaghi | Light spot size and shape control for laser projector |
JPH0679484A (ja) | 1992-07-14 | 1994-03-22 | Mitsubishi Electric Corp | レーザ溶接方法 |
US5528613A (en) | 1993-04-12 | 1996-06-18 | Macken; John A. | Laser apparatus utilizing a magnetically enhanced electrical discharge with transverse AC stabilization |
DE9407288U1 (de) * | 1994-05-02 | 1994-08-04 | Trumpf Gmbh & Co | Laserschneidmaschine mit Fokuslageneinstellung |
-
1995
- 1995-03-06 US US08/398,738 patent/US5561544A/en not_active Ceased
-
1996
- 1996-03-06 ES ES96908730T patent/ES2276399T3/es not_active Expired - Lifetime
- 1996-03-06 PT PT96908730T patent/PT813696E/pt unknown
- 1996-03-06 EP EP96908730A patent/EP0813696B8/fr not_active Expired - Lifetime
- 1996-03-06 AT AT96908730T patent/ATE344469T1/de active
- 1996-03-06 DE DE69636668T patent/DE69636668T2/de not_active Expired - Lifetime
- 1996-03-06 WO PCT/US1996/003208 patent/WO1996027814A1/fr active IP Right Grant
- 1996-03-06 JP JP8527069A patent/JPH11501738A/ja active Pending
-
1998
- 1998-08-19 US US09/136,710 patent/USRE38165E1/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012165575A1 (fr) * | 2011-06-02 | 2012-12-06 | 日本電気株式会社 | Dispositif d'affichage d'image |
US9182595B2 (en) | 2011-06-02 | 2015-11-10 | Nec Corporation | Image display devices |
Also Published As
Publication number | Publication date |
---|---|
ATE344469T1 (de) | 2006-11-15 |
EP0813696A1 (fr) | 1997-12-29 |
ES2276399T3 (es) | 2007-06-16 |
EP0813696B8 (fr) | 2007-01-17 |
PT813696E (pt) | 2007-02-28 |
WO1996027814A1 (fr) | 1996-09-12 |
DE69636668D1 (de) | 2006-12-14 |
USRE38165E1 (en) | 2003-07-01 |
US5561544A (en) | 1996-10-01 |
DE69636668T2 (de) | 2007-09-06 |
EP0813696B1 (fr) | 2006-11-02 |
EP0813696A4 (fr) | 1998-10-14 |
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