JPH1140403A - 温度センサ素子 - Google Patents

温度センサ素子

Info

Publication number
JPH1140403A
JPH1140403A JP9195791A JP19579197A JPH1140403A JP H1140403 A JPH1140403 A JP H1140403A JP 9195791 A JP9195791 A JP 9195791A JP 19579197 A JP19579197 A JP 19579197A JP H1140403 A JPH1140403 A JP H1140403A
Authority
JP
Japan
Prior art keywords
sensor element
metal film
temperature sensor
terminal electrode
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9195791A
Other languages
English (en)
Japanese (ja)
Inventor
Shinichi Osada
慎一 長田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP9195791A priority Critical patent/JPH1140403A/ja
Priority to DE1998130821 priority patent/DE19830821C2/de
Publication of JPH1140403A publication Critical patent/JPH1140403A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C1/00—Details
    • H01C1/14—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Thermistors And Varistors (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP9195791A 1997-07-22 1997-07-22 温度センサ素子 Pending JPH1140403A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9195791A JPH1140403A (ja) 1997-07-22 1997-07-22 温度センサ素子
DE1998130821 DE19830821C2 (de) 1997-07-22 1998-07-09 Temperatursensorelement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9195791A JPH1140403A (ja) 1997-07-22 1997-07-22 温度センサ素子

Publications (1)

Publication Number Publication Date
JPH1140403A true JPH1140403A (ja) 1999-02-12

Family

ID=16347042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9195791A Pending JPH1140403A (ja) 1997-07-22 1997-07-22 温度センサ素子

Country Status (2)

Country Link
JP (1) JPH1140403A (de)
DE (1) DE19830821C2 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100393945B1 (ko) * 2001-02-24 2003-08-06 이노스텍 (주) 금속 박막 저항체 소자의 제조 방법 및 이를 이용한 금속 박막 온도 센서의 제조 방법
DE102016012138A1 (de) 2015-10-16 2017-04-20 Ngk Spark Plug Co., Ltd. Temperatursensor
DE102017001640A1 (de) 2016-02-19 2017-09-21 Ngk Spark Plug Co., Ltd. Temperatursensor
CN110285891A (zh) * 2019-07-29 2019-09-27 丹东鸭绿江敏感元件有限公司 热电阻感温元件及其制造方法和设备
CN111609951A (zh) * 2020-06-09 2020-09-01 华中科技大学 一种厚膜热流计的共形制备方法以及产品

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10020932C5 (de) * 2000-04-28 2004-12-30 Zitzmann, Heinrich, Dr. Temperaturmessfühler und Verfahren zur Herstellung desselben
US7046116B2 (en) 2002-11-12 2006-05-16 Heraeus Sensor Technology Gmbh Temperature probe and its use
DE10322166B4 (de) * 2002-11-12 2005-04-28 Heraeus Sensor Technology Gmbh Temperaturfühler und seine Verwendung
DE102007046900C5 (de) 2007-09-28 2018-07-26 Heraeus Sensor Technology Gmbh Hochtemperatursensor und ein Verfahren zu dessen Herstellung
DE202020101197U1 (de) * 2020-03-04 2020-03-12 Heraeus Nexensos Gmbh Temperatursensorverbund

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887239A (ja) * 1981-11-19 1983-05-25 Tanaka Kikinzoku Kogyo Kk センサ用材料
JPH03262102A (ja) * 1990-03-13 1991-11-21 Matsushita Electric Ind Co Ltd 白金温度センサ
JPH04502966A (ja) * 1989-07-25 1992-05-28 ロート―テヒニーク・ゲー・エム・ベー・ハー・ウント・コー・フォルシュング・フィア・アウトモービル―ウント・ウムベルトテヒニーク 温度センサとその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2615473B2 (de) * 1976-04-09 1978-04-20 W.C. Heraeus Gmbh, 6450 Hanau Meßwiderstand für ein Widerstandsthermometer
WO1992015101A1 (de) * 1991-02-15 1992-09-03 Siemens Aktiengesellschaft Hochtemperatur-platinmetall-temperatursensor
JPH08219901A (ja) * 1995-02-15 1996-08-30 Murata Mfg Co Ltd 測温抵抗体素子の抵抗温度係数の調整方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887239A (ja) * 1981-11-19 1983-05-25 Tanaka Kikinzoku Kogyo Kk センサ用材料
JPH04502966A (ja) * 1989-07-25 1992-05-28 ロート―テヒニーク・ゲー・エム・ベー・ハー・ウント・コー・フォルシュング・フィア・アウトモービル―ウント・ウムベルトテヒニーク 温度センサとその製造方法
JPH03262102A (ja) * 1990-03-13 1991-11-21 Matsushita Electric Ind Co Ltd 白金温度センサ

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100393945B1 (ko) * 2001-02-24 2003-08-06 이노스텍 (주) 금속 박막 저항체 소자의 제조 방법 및 이를 이용한 금속 박막 온도 센서의 제조 방법
DE102016012138A1 (de) 2015-10-16 2017-04-20 Ngk Spark Plug Co., Ltd. Temperatursensor
US10302505B2 (en) 2015-10-16 2019-05-28 Ngk Spark Plug Co., Ltd. Temperature sensor
DE102017001640A1 (de) 2016-02-19 2017-09-21 Ngk Spark Plug Co., Ltd. Temperatursensor
US10302503B2 (en) 2016-02-19 2019-05-28 Ngk Spark Plug Co., Ltd. Temperature sensor
CN110285891A (zh) * 2019-07-29 2019-09-27 丹东鸭绿江敏感元件有限公司 热电阻感温元件及其制造方法和设备
CN111609951A (zh) * 2020-06-09 2020-09-01 华中科技大学 一种厚膜热流计的共形制备方法以及产品
CN111609951B (zh) * 2020-06-09 2021-04-30 华中科技大学 一种厚膜热流计的共形制备方法以及产品

Also Published As

Publication number Publication date
DE19830821A1 (de) 1999-02-18
DE19830821C2 (de) 2001-06-07

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