JP4537830B2 - ガス検出装置の製造方法およびガス検出装置 - Google Patents
ガス検出装置の製造方法およびガス検出装置 Download PDFInfo
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- JP4537830B2 JP4537830B2 JP2004325275A JP2004325275A JP4537830B2 JP 4537830 B2 JP4537830 B2 JP 4537830B2 JP 2004325275 A JP2004325275 A JP 2004325275A JP 2004325275 A JP2004325275 A JP 2004325275A JP 4537830 B2 JP4537830 B2 JP 4537830B2
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- gas sensitive
- gas
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- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 title description 7
- 238000001514 detection method Methods 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 229910001111 Fine metal Inorganic materials 0.000 claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims description 7
- 150000004706 metal oxides Chemical class 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 39
- 238000003466 welding Methods 0.000 description 29
- 239000010931 gold Substances 0.000 description 16
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 15
- 229910052737 gold Inorganic materials 0.000 description 15
- 239000000758 substrate Substances 0.000 description 15
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 14
- 239000000463 material Substances 0.000 description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- 229910006404 SnO 2 Inorganic materials 0.000 description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910001297 Zn alloy Inorganic materials 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
また請求項2の発明は、請求項1記載の製造方法を用いて製造されたガス検出素子であって、金属酸化物半導体よりなる感ガス部を備えるガス感応部と、外部接続端子と、前記ガス感応部と前記外部接続端子との間を電気的に接続する金属細線とを備え、前記外部接続端子に接続される側の前記金属細線の端部に、前記金属細線の線径よりも直径の大きい略球状の接合部が設けられ、当該接合部と前記外部接続端子との接触部位が電気抵抗熱で溶融されることによって前記金属細線が前記外部接続端子に接合されることを特徴とする。
11 アルミナ基板
12A,12B,13A’,13B’ 電極
14 ヒータ
16 リードワイヤ
16a 球状部
Claims (2)
- 金属酸化物半導体よりなる感ガス部を備えるガス感応部と、外部接続端子との間を金属細線を介して電気的に接続するにあたり、前記外部接続端子に接続される側の前記金属細線の端部に、前記金属細線の線径よりも直径の大きい略球状の接合部を設けて、当該接合部を前記外部接続端子上に載置し、接合部を前記外部接続端子に接触させた後、前記接合部と前記外部接続端子とにそれぞれ上下両側から電極の先端面を接触させた状態で、両電極間に通電して、電気抵抗熱で前記接合部と前記外部接続端子との接触部位を溶融させることにより前記金属細線を前記外部接続端子に接合することを特徴とするガス検出素子の製造方法。
- 請求項1記載の製造方法を用いて製造されたガス検出素子であって、
金属酸化物半導体よりなる感ガス部を備えるガス感応部と、外部接続端子と、前記ガス感応部と前記外部接続端子との間を電気的に接続する金属細線とを備え、前記外部接続端子に接続される側の前記金属細線の端部に、前記金属細線の線径よりも直径の大きい略球状の接合部が設けられ、当該接合部と前記外部接続端子との接触部位が電気抵抗熱で溶融されることによって前記金属細線が前記外部接続端子に接合されることを特徴とするガス検出素子。
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JP2004325275A JP4537830B2 (ja) | 2004-11-09 | 2004-11-09 | ガス検出装置の製造方法およびガス検出装置 |
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JP2004325275A JP4537830B2 (ja) | 2004-11-09 | 2004-11-09 | ガス検出装置の製造方法およびガス検出装置 |
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JP2006133180A JP2006133180A (ja) | 2006-05-25 |
JP4537830B2 true JP4537830B2 (ja) | 2010-09-08 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3489670A4 (en) * | 2016-07-19 | 2020-03-04 | NGK Spark Plug Co., Ltd. | GAS SENSOR |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5704568B2 (ja) * | 2011-09-21 | 2015-04-22 | 国立大学法人鹿屋体育大学 | スイング動作を伴う運動における張力測定イメージング装置 |
US11531013B2 (en) | 2017-08-09 | 2022-12-20 | Semitec Corporation | Gas sensor, gas detection device, gas detection method, and device provided with gas sensor or gas detection device |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5657944A (en) * | 1979-10-16 | 1981-05-20 | Tanaka Kikinzoku Kogyo Kk | Manufacture of platinum electrode |
JPH06242043A (ja) * | 1993-02-18 | 1994-09-02 | Nohmi Bosai Ltd | 環境センサ |
JPH1019840A (ja) * | 1996-06-28 | 1998-01-23 | Hitachi Chem Co Ltd | Coガスセンサの製造法 |
JPH11218511A (ja) * | 1993-11-18 | 1999-08-10 | Fis Kk | ガスセンサ |
JP2001116713A (ja) * | 1999-10-21 | 2001-04-27 | Figaro Eng Inc | ガスセンサ及びその製造方法 |
JP2001118719A (ja) * | 1999-10-15 | 2001-04-27 | Matsushita Electric Works Ltd | 機器の取付装置 |
JP2002189011A (ja) * | 2000-12-21 | 2002-07-05 | Figaro Eng Inc | ガスセンサ及びその製造方法 |
-
2004
- 2004-11-09 JP JP2004325275A patent/JP4537830B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5657944A (en) * | 1979-10-16 | 1981-05-20 | Tanaka Kikinzoku Kogyo Kk | Manufacture of platinum electrode |
JPH06242043A (ja) * | 1993-02-18 | 1994-09-02 | Nohmi Bosai Ltd | 環境センサ |
JPH11218511A (ja) * | 1993-11-18 | 1999-08-10 | Fis Kk | ガスセンサ |
JPH1019840A (ja) * | 1996-06-28 | 1998-01-23 | Hitachi Chem Co Ltd | Coガスセンサの製造法 |
JP2001118719A (ja) * | 1999-10-15 | 2001-04-27 | Matsushita Electric Works Ltd | 機器の取付装置 |
JP2001116713A (ja) * | 1999-10-21 | 2001-04-27 | Figaro Eng Inc | ガスセンサ及びその製造方法 |
JP2002189011A (ja) * | 2000-12-21 | 2002-07-05 | Figaro Eng Inc | ガスセンサ及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3489670A4 (en) * | 2016-07-19 | 2020-03-04 | NGK Spark Plug Co., Ltd. | GAS SENSOR |
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JP2006133180A (ja) | 2006-05-25 |
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