JPH11269436A5 - - Google Patents

Info

Publication number
JPH11269436A5
JPH11269436A5 JP1998092806A JP9280698A JPH11269436A5 JP H11269436 A5 JPH11269436 A5 JP H11269436A5 JP 1998092806 A JP1998092806 A JP 1998092806A JP 9280698 A JP9280698 A JP 9280698A JP H11269436 A5 JPH11269436 A5 JP H11269436A5
Authority
JP
Japan
Prior art keywords
radiation
adhesive
irradiation
removable
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998092806A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11269436A (ja
JP4014283B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP09280698A priority Critical patent/JP4014283B2/ja
Priority claimed from JP09280698A external-priority patent/JP4014283B2/ja
Publication of JPH11269436A publication Critical patent/JPH11269436A/ja
Publication of JPH11269436A5 publication Critical patent/JPH11269436A5/ja
Application granted granted Critical
Publication of JP4014283B2 publication Critical patent/JP4014283B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP09280698A 1998-03-20 1998-03-20 帯電防止性粘着シート Expired - Lifetime JP4014283B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP09280698A JP4014283B2 (ja) 1998-03-20 1998-03-20 帯電防止性粘着シート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09280698A JP4014283B2 (ja) 1998-03-20 1998-03-20 帯電防止性粘着シート

Publications (3)

Publication Number Publication Date
JPH11269436A JPH11269436A (ja) 1999-10-05
JPH11269436A5 true JPH11269436A5 (cg-RX-API-DMAC7.html) 2005-07-21
JP4014283B2 JP4014283B2 (ja) 2007-11-28

Family

ID=14064667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP09280698A Expired - Lifetime JP4014283B2 (ja) 1998-03-20 1998-03-20 帯電防止性粘着シート

Country Status (1)

Country Link
JP (1) JP4014283B2 (cg-RX-API-DMAC7.html)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4495806B2 (ja) * 1999-11-09 2010-07-07 日東電工株式会社 クリーニングシ―ト
TWI276671B (en) * 2000-03-03 2007-03-21 Lintec Corp Adhesive sheet and adhered article
JP4841058B2 (ja) * 2000-04-28 2011-12-21 リンテック株式会社 粘着シートおよび貼着体
US7793668B2 (en) 2000-06-06 2010-09-14 Nitto Denko Corporation Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
KR100786437B1 (ko) 2000-06-06 2007-12-17 닛토덴코 가부시키가이샤 클리닝 시트, 이를 사용하는 반송 부재, 및 이들을 사용한 기판 처리 장치의 클리닝 방법
JP2002299984A (ja) * 2001-03-30 2002-10-11 Kinseki Ltd 弾性表面波装置の製造方法
JP2003003132A (ja) * 2001-06-19 2003-01-08 Lintec Corp 粘着シートおよび貼着体
JP2003013014A (ja) * 2001-06-27 2003-01-15 Lintec Corp 粘着シートおよび貼着体
CN1527868A (zh) * 2001-07-16 2004-09-08 ��Ԩ��ѧ��ҵ��ʽ���� 表面保护膜
US20030180531A1 (en) * 2002-03-22 2003-09-25 Tesa Ag PSA tape and its production
US20050118414A1 (en) 2002-06-19 2005-06-02 Nitto Denko Corporation Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these
US7718255B2 (en) 2003-08-19 2010-05-18 Nitto Denko Corporation Cleaning sheets and method of cleaning with the same
WO2006043794A1 (en) * 2004-10-21 2006-04-27 Lg Chem, Ltd. Acrylic pressure sensitive adhesive with good antistatic property
JP5013496B2 (ja) * 2005-01-20 2012-08-29 日東電工株式会社 偏光板、偏光板の製造方法、光学フィルムおよび画像表示装置
JP2008255345A (ja) * 2007-03-12 2008-10-23 Furukawa Electric Co Ltd:The 半導体固定用粘着テープ
JP2008280520A (ja) * 2007-04-11 2008-11-20 Furukawa Electric Co Ltd:The 半導体固定用粘着テープ
JP2014135469A (ja) * 2012-12-10 2014-07-24 Nitto Denko Corp 接着シート、ダイシングテープ一体型接着シート、半導体装置の製造方法、及び、半導体装置
JP6376741B2 (ja) * 2013-10-11 2018-08-22 アキレス株式会社 熱剥離性粘着フィルム
JP2019189853A (ja) * 2018-04-23 2019-10-31 積水化学工業株式会社 粘着テープ、粘着テープロール及び粘着テープの製造方法
CN117413347A (zh) * 2021-07-06 2024-01-16 琳得科株式会社 半导体加工用保护片及半导体装置的制造方法
CN117413350A (zh) * 2021-07-06 2024-01-16 琳得科株式会社 半导体加工用保护片及半导体装置的制造方法
KR20240031950A (ko) * 2021-07-06 2024-03-08 린텍 가부시키가이샤 반도체 가공용 보호 시트 및 반도체 장치의 제조 방법
WO2023281861A1 (ja) * 2021-07-06 2023-01-12 リンテック株式会社 半導体加工用保護シートおよび半導体装置の製造方法
JP2023108419A (ja) * 2022-01-25 2023-08-04 リンテック株式会社 半導体加工用シート、半導体装置の製造方法、および、半導体加工用シートの使用

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398356U (cg-RX-API-DMAC7.html) * 1986-12-15 1988-06-25
US5637368A (en) * 1992-06-04 1997-06-10 Minnesota Mining And Manufacturing Company Adhesive tape having antistatic properties
JP3499957B2 (ja) * 1995-03-10 2004-02-23 リンテック株式会社 帯電防止粘着シート
JPH09207259A (ja) * 1996-12-16 1997-08-12 Achilles Corp 導電性透明保護フィルム

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