JPH11200047A - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPH11200047A
JPH11200047A JP1790598A JP1790598A JPH11200047A JP H11200047 A JPH11200047 A JP H11200047A JP 1790598 A JP1790598 A JP 1790598A JP 1790598 A JP1790598 A JP 1790598A JP H11200047 A JPH11200047 A JP H11200047A
Authority
JP
Japan
Prior art keywords
width
film
vacuum
drum
cooling drum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1790598A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11200047A5 (enExample
Inventor
充 ▲高▼井
Mitsuru Takai
Kunihiro Ueda
国博 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP1790598A priority Critical patent/JPH11200047A/ja
Publication of JPH11200047A publication Critical patent/JPH11200047A/ja
Publication of JPH11200047A5 publication Critical patent/JPH11200047A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1790598A 1998-01-13 1998-01-13 真空蒸着装置 Pending JPH11200047A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1790598A JPH11200047A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1790598A JPH11200047A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH11200047A true JPH11200047A (ja) 1999-07-27
JPH11200047A5 JPH11200047A5 (enExample) 2005-08-18

Family

ID=11956770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1790598A Pending JPH11200047A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH11200047A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009209381A (ja) * 2008-02-29 2009-09-17 Fujifilm Corp 成膜装置、ガスバリアフィルムおよびガスバリアフィルムの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009209381A (ja) * 2008-02-29 2009-09-17 Fujifilm Corp 成膜装置、ガスバリアフィルムおよびガスバリアフィルムの製造方法

Similar Documents

Publication Publication Date Title
JP4234338B2 (ja) フィルムの蒸着方法
JPH0863746A (ja) 磁気記録媒体の製造方法及び装置
JPH09111458A (ja) 成膜装置及び成膜方法
JP2010095735A (ja) 成膜装置、成膜方法およびガスバリアフィルム
JPH11200011A (ja) 真空蒸着装置
JP2911102B2 (ja) 銅、アルミニウムまたはその合金からなる薄板の成膜前処理方法
JPH11200045A (ja) 蒸着装置のクリーニング方法
JPH11193460A (ja) 真空容器内の巻き取り装置
JPH0257144B2 (enExample)
JP4613015B2 (ja) 成膜方法及び成膜装置
JPH1136063A (ja) アーク式蒸発源
JP3781154B2 (ja) 真空蒸着装置
JPH0610117A (ja) 薄膜形成方法、薄膜形成装置、レーザー光照射装置及びボンバード装置
JPH11200023A (ja) 真空蒸着装置
JP2000249801A (ja) 光学薄膜被覆フィルムの形成方法
JP2000273620A (ja) 透明導電性薄膜被覆フィルムの形成方法
JPH0693447A (ja) 蒸着フィルムの製造装置
JP2898652B2 (ja) イオンプレーティング用蒸発装置
JP2000171606A (ja) 酸化チタン被覆プラスチックフィルムの製造方法および酸化チタン被覆プラスチックフィルム
JPS6020320A (ja) 真空蒸着による磁気テ−プ製作装置
JP3827116B2 (ja) 真空装置内の基体除電装置
JPS6076025A (ja) 磁気記録媒体の製造法
JPH1053861A (ja) 酸化アルミニウム蒸着フィルムの製造方法
JPH1060626A (ja) 酸化アルミニウム蒸着フィルムの製造方法
JPH11335837A (ja) 磁気媒体製造装置

Legal Events

Date Code Title Description
A521 Written amendment

Effective date: 20041217

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041217

Free format text: JAPANESE INTERMEDIATE CODE: A821

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041217

RD02 Notification of acceptance of power of attorney

Effective date: 20041217

Free format text: JAPANESE INTERMEDIATE CODE: A7422

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050204

RD04 Notification of resignation of power of attorney

Effective date: 20050225

Free format text: JAPANESE INTERMEDIATE CODE: A7424

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070724

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070726

A02 Decision of refusal

Effective date: 20071115

Free format text: JAPANESE INTERMEDIATE CODE: A02