JPH11200047A5 - - Google Patents

Info

Publication number
JPH11200047A5
JPH11200047A5 JP1998017905A JP1790598A JPH11200047A5 JP H11200047 A5 JPH11200047 A5 JP H11200047A5 JP 1998017905 A JP1998017905 A JP 1998017905A JP 1790598 A JP1790598 A JP 1790598A JP H11200047 A5 JPH11200047 A5 JP H11200047A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998017905A
Other languages
Japanese (ja)
Other versions
JPH11200047A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP1790598A priority Critical patent/JPH11200047A/ja
Priority claimed from JP1790598A external-priority patent/JPH11200047A/ja
Publication of JPH11200047A publication Critical patent/JPH11200047A/ja
Publication of JPH11200047A5 publication Critical patent/JPH11200047A5/ja
Pending legal-status Critical Current

Links

JP1790598A 1998-01-13 1998-01-13 真空蒸着装置 Pending JPH11200047A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1790598A JPH11200047A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1790598A JPH11200047A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH11200047A JPH11200047A (ja) 1999-07-27
JPH11200047A5 true JPH11200047A5 (enExample) 2005-08-18

Family

ID=11956770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1790598A Pending JPH11200047A (ja) 1998-01-13 1998-01-13 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH11200047A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4669017B2 (ja) * 2008-02-29 2011-04-13 富士フイルム株式会社 成膜装置、ガスバリアフィルムおよびガスバリアフィルムの製造方法

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