JPH11200047A5 - - Google Patents
Info
- Publication number
- JPH11200047A5 JPH11200047A5 JP1998017905A JP1790598A JPH11200047A5 JP H11200047 A5 JPH11200047 A5 JP H11200047A5 JP 1998017905 A JP1998017905 A JP 1998017905A JP 1790598 A JP1790598 A JP 1790598A JP H11200047 A5 JPH11200047 A5 JP H11200047A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790598A JPH11200047A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790598A JPH11200047A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11200047A JPH11200047A (ja) | 1999-07-27 |
| JPH11200047A5 true JPH11200047A5 (enExample) | 2005-08-18 |
Family
ID=11956770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1790598A Pending JPH11200047A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11200047A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4669017B2 (ja) * | 2008-02-29 | 2011-04-13 | 富士フイルム株式会社 | 成膜装置、ガスバリアフィルムおよびガスバリアフィルムの製造方法 |
-
1998
- 1998-01-13 JP JP1790598A patent/JPH11200047A/ja active Pending