JPH11131236A5 - - Google Patents

Info

Publication number
JPH11131236A5
JPH11131236A5 JP1997294211A JP29421197A JPH11131236A5 JP H11131236 A5 JPH11131236 A5 JP H11131236A5 JP 1997294211 A JP1997294211 A JP 1997294211A JP 29421197 A JP29421197 A JP 29421197A JP H11131236 A5 JPH11131236 A5 JP H11131236A5
Authority
JP
Japan
Prior art keywords
silicon carbide
film
temperature
corrosion
resistant member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997294211A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11131236A (ja
JP3929140B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP29421197A external-priority patent/JP3929140B2/ja
Priority to JP29421197A priority Critical patent/JP3929140B2/ja
Priority to TW087114181A priority patent/TW585930B/zh
Priority to US09/172,607 priority patent/US6117573A/en
Priority to KR1019980044792A priority patent/KR100319544B1/ko
Priority to EP98308770A priority patent/EP0924317B1/en
Priority to DE69805742T priority patent/DE69805742T2/de
Publication of JPH11131236A publication Critical patent/JPH11131236A/ja
Priority to US09/609,539 priority patent/US6447842B1/en
Publication of JPH11131236A5 publication Critical patent/JPH11131236A5/ja
Publication of JP3929140B2 publication Critical patent/JP3929140B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP29421197A 1997-10-27 1997-10-27 耐蝕性部材およびその製造方法 Expired - Fee Related JP3929140B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP29421197A JP3929140B2 (ja) 1997-10-27 1997-10-27 耐蝕性部材およびその製造方法
TW087114181A TW585930B (en) 1997-10-27 1998-08-27 Corrosion-resistant member and a producing process thereof
US09/172,607 US6117573A (en) 1997-10-27 1998-10-15 Corrosion-resistant member and a producing process thereof
KR1019980044792A KR100319544B1 (ko) 1997-10-27 1998-10-26 내식성부재및그제조방법
EP98308770A EP0924317B1 (en) 1997-10-27 1998-10-27 Process for producing corrosion resistant members
DE69805742T DE69805742T2 (de) 1997-10-27 1998-10-27 Verfahren zur Herstellung von korrosionsbeständigen Bauteile
US09/609,539 US6447842B1 (en) 1997-10-27 2000-06-30 Process for producing a corrosion-resistant member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29421197A JP3929140B2 (ja) 1997-10-27 1997-10-27 耐蝕性部材およびその製造方法

Publications (3)

Publication Number Publication Date
JPH11131236A JPH11131236A (ja) 1999-05-18
JPH11131236A5 true JPH11131236A5 (enExample) 2004-12-09
JP3929140B2 JP3929140B2 (ja) 2007-06-13

Family

ID=17804775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29421197A Expired - Fee Related JP3929140B2 (ja) 1997-10-27 1997-10-27 耐蝕性部材およびその製造方法

Country Status (6)

Country Link
US (2) US6117573A (enExample)
EP (1) EP0924317B1 (enExample)
JP (1) JP3929140B2 (enExample)
KR (1) KR100319544B1 (enExample)
DE (1) DE69805742T2 (enExample)
TW (1) TW585930B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100751945B1 (ko) * 1999-09-03 2007-08-24 엘지전자 주식회사 방송 예약 청취 방법 및 장치
JP5160181B2 (ja) * 2006-11-21 2013-03-13 三菱マテリアル株式会社 トリクロロシラン製造装置
KR100863935B1 (ko) * 2008-01-14 2008-11-18 주식회사 코미코 용사 코팅용 분말과 그 제조 방법 및 이를 이용한 코팅막의제조 방법
US9016293B2 (en) * 2009-08-21 2015-04-28 Gas Turbine Efficiency Sweden Ab Staged compressor water wash system
US9228575B2 (en) * 2010-11-16 2016-01-05 Zoeller Pump Company, Llc Sealed and self-contained tankless water heater flushing system
KR102051668B1 (ko) 2016-12-20 2019-12-04 주식회사 티씨케이 SiC 증착층을 포함하는 반도체 제조용 부품 및 그 제조방법
JP6798000B1 (ja) * 2019-12-23 2020-12-09 株式会社フェローテックマテリアルテクノロジーズ ＳｉＣとＳｉによる混合部材の製造方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL216964A1 (enExample) * 1979-07-07 1981-02-13 Biuro P Przemyslu Metal
JPS59189622A (ja) * 1983-04-13 1984-10-27 Toshiba Ceramics Co Ltd 半導体用拡散炉プロセスチユ−ブ
JPS59203799A (ja) * 1983-04-28 1984-11-17 Sharp Corp 炭化珪素単結晶基板の製造方法
DE3530551C1 (de) * 1985-08-27 1986-08-28 Nukem Gmbh Vorrichtung zur Beschichtung von Formkörpern mit Siliziumcarbid
JPH089504B2 (ja) * 1986-08-29 1996-01-31 住友化学工業株式会社 高密度炭化ケイ素焼結体の製造方法
JPH03153876A (ja) * 1989-11-10 1991-07-01 Shin Etsu Chem Co Ltd 炭化珪素質部材
US5283361A (en) * 1991-04-23 1994-02-01 Eli Lilly And Company N-hydroxy-N-[3-[2-(halophenylthio)phenyl]prop-2-enyl]ureas as lipoxygenase inhibitors
SE9202195D0 (sv) * 1992-07-17 1992-07-17 Sandvik Ab Method of coating a ceramic body
US5296258A (en) * 1992-09-30 1994-03-22 Northern Telecom Limited Method of forming silicon carbide
RU2082824C1 (ru) * 1994-03-10 1997-06-27 Московский государственный авиационный институт (технический университет) Способ защиты жаропрочных материалов от воздействия агрессивных сред высокоскоростных газовых потоков (варианты)
JP3583812B2 (ja) * 1994-09-05 2004-11-04 東京電力株式会社 セラミックコーティング部材とその製造方法
DE4441132A1 (de) * 1994-11-21 1996-05-23 Grohe Armaturen Friedrich Dichtungselement, insbesondere für Absperr- und Regelorgane und Verfahren zu seiner Herstellung
US5861346A (en) * 1995-07-27 1999-01-19 Regents Of The University Of California Process for forming silicon carbide films and microcomponents
US6042900A (en) * 1996-03-12 2000-03-28 Alexander Rakhimov CVD method for forming diamond films
JPH1012692A (ja) * 1996-06-25 1998-01-16 Nisshinbo Ind Inc ダミーウエハ
US5904778A (en) * 1996-07-26 1999-05-18 Applied Materials, Inc. Silicon carbide composite article particularly useful for plasma reactors

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