JPH11121501A - 半導体装置内部接続用被覆金属細線及び半導体装置の組立方法 - Google Patents
半導体装置内部接続用被覆金属細線及び半導体装置の組立方法Info
- Publication number
- JPH11121501A JPH11121501A JP9283861A JP28386197A JPH11121501A JP H11121501 A JPH11121501 A JP H11121501A JP 9283861 A JP9283861 A JP 9283861A JP 28386197 A JP28386197 A JP 28386197A JP H11121501 A JPH11121501 A JP H11121501A
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- semiconductor device
- coated
- dye
- insulating coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 74
- 238000000576 coating method Methods 0.000 title claims abstract description 74
- 239000004065 semiconductor Substances 0.000 title claims abstract description 37
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000000049 pigment Substances 0.000 claims abstract description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract 6
- 229910052742 iron Inorganic materials 0.000 claims abstract 3
- 229910052751 metal Inorganic materials 0.000 claims description 56
- 239000002184 metal Substances 0.000 claims description 56
- 239000000975 dye Substances 0.000 claims description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 7
- UCNNJGDEJXIUCC-UHFFFAOYSA-L hydroxy(oxo)iron;iron Chemical compound [Fe].O[Fe]=O.O[Fe]=O UCNNJGDEJXIUCC-UHFFFAOYSA-L 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 claims 2
- 229910017052 cobalt Inorganic materials 0.000 claims 2
- 239000010941 cobalt Substances 0.000 claims 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 claims 2
- BCHZICNRHXRCHY-UHFFFAOYSA-N 2h-oxazine Chemical compound N1OC=CC=C1 BCHZICNRHXRCHY-UHFFFAOYSA-N 0.000 claims 1
- 229910001111 Fine metal Inorganic materials 0.000 claims 1
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical group O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 1
- AUNAPVYQLLNFOI-UHFFFAOYSA-L [Pb++].[Pb++].[Pb++].[O-]S([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Mo]([O-])(=O)=O Chemical compound [Pb++].[Pb++].[Pb++].[O-]S([O-])(=O)=O.[O-][Cr]([O-])(=O)=O.[O-][Mo]([O-])(=O)=O AUNAPVYQLLNFOI-UHFFFAOYSA-L 0.000 claims 1
- 239000000999 acridine dye Substances 0.000 claims 1
- 239000001000 anthraquinone dye Substances 0.000 claims 1
- 239000000987 azo dye Substances 0.000 claims 1
- 229910052793 cadmium Inorganic materials 0.000 claims 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims 1
- CJOBVZJTOIVNNF-UHFFFAOYSA-N cadmium sulfide Chemical compound [Cd]=S CJOBVZJTOIVNNF-UHFFFAOYSA-N 0.000 claims 1
- 239000006229 carbon black Substances 0.000 claims 1
- CZZYITDELCSZES-UHFFFAOYSA-N diphenylmethane Chemical compound C=1C=CC=CC=1CC1=CC=CC=C1 CZZYITDELCSZES-UHFFFAOYSA-N 0.000 claims 1
- 229910002804 graphite Inorganic materials 0.000 claims 1
- 239000010439 graphite Substances 0.000 claims 1
- 239000001007 phthalocyanine dye Substances 0.000 claims 1
- 239000001016 thiazine dye Substances 0.000 claims 1
- 235000010215 titanium dioxide Nutrition 0.000 claims 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 claims 1
- 239000001018 xanthene dye Substances 0.000 claims 1
- 235000014692 zinc oxide Nutrition 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 abstract description 9
- 239000011347 resin Substances 0.000 abstract description 9
- 239000004677 Nylon Substances 0.000 abstract description 6
- 229920001778 nylon Polymers 0.000 abstract description 6
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 239000003973 paint Substances 0.000 abstract 1
- 239000003822 epoxy resin Substances 0.000 description 6
- 229920000647 polyepoxide Polymers 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 229920001225 polyester resin Polymers 0.000 description 3
- 239000004645 polyester resin Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 229920005749 polyurethane resin Polymers 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920013716 polyethylene resin Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Classifications
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B7/00—Insulated conductors or cables characterised by their form
- H01B7/38—Insulated conductors or cables characterised by their form with arrangements for facilitating removal of insulation
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Abstract
(57)【要約】
【課題】 半導体装置内部接続用被覆金属細線の絶縁性
被覆膜の放電加工による除去は、金属細線に与える損傷
と被覆膜の除去の完全性とのトレードオフで安定性が不
十分である。 【解決手段】 絶縁性被覆膜3に顔料或いは染料を含有
させることにより、絶縁性被覆膜3を除去したい部分を
含むように照射部5を設定して適切な波長のレーザ光4
を照射することにより、金属細線2に無用の損傷を与え
ることなく所望の部分の絶縁性被覆膜3を除去すること
ができる。
被覆膜の放電加工による除去は、金属細線に与える損傷
と被覆膜の除去の完全性とのトレードオフで安定性が不
十分である。 【解決手段】 絶縁性被覆膜3に顔料或いは染料を含有
させることにより、絶縁性被覆膜3を除去したい部分を
含むように照射部5を設定して適切な波長のレーザ光4
を照射することにより、金属細線2に無用の損傷を与え
ることなく所望の部分の絶縁性被覆膜3を除去すること
ができる。
Description
【0001】
【発明の属する技術分野】本発明は半導体装置内部接続
用被覆金属細線に関し、特にその被覆絶縁材料に関す
る。
用被覆金属細線に関し、特にその被覆絶縁材料に関す
る。
【0002】
【従来の技術】従来の半導体装置内部接続用被覆金属細
線は、金属細線の周囲が、絶縁性材料の被覆絶縁膜で被
覆されており、その外観は、本発明の半導体装置内部接
続用被覆金属細線の外観と同様である(図1参照)。
線は、金属細線の周囲が、絶縁性材料の被覆絶縁膜で被
覆されており、その外観は、本発明の半導体装置内部接
続用被覆金属細線の外観と同様である(図1参照)。
【0003】このような被覆ワイヤに関しては、たとえ
ば特開平7−268278号公報に、被覆ワイヤの被覆
絶縁膜の材料として、エポキシ樹脂とフェノール樹脂硬
化剤からなるエポキシ樹脂組成物を硬化して得られる耐
熱エポキシ樹脂、あるいは透明または半透明の被覆膜を
形成する熱可塑性樹脂または5ミクロン以下の分散粒子
径を形成する可とう化剤を含み、ガラス転移温度が12
5℃以上を有する耐熱エポキシ樹脂を被覆材として用い
ることが記載されている。
ば特開平7−268278号公報に、被覆ワイヤの被覆
絶縁膜の材料として、エポキシ樹脂とフェノール樹脂硬
化剤からなるエポキシ樹脂組成物を硬化して得られる耐
熱エポキシ樹脂、あるいは透明または半透明の被覆膜を
形成する熱可塑性樹脂または5ミクロン以下の分散粒子
径を形成する可とう化剤を含み、ガラス転移温度が12
5℃以上を有する耐熱エポキシ樹脂を被覆材として用い
ることが記載されている。
【0004】また、上述の公報には、被覆ワイヤの被覆
絶縁膜の材料に関する公知技術として、更にポリウレタ
ン樹脂、ナイロン樹脂、ポリイミド樹脂、フッ素系樹
脂、ポリエチレン樹脂、ポリ塩化ビニル樹脂、絶縁ワニ
スであるエナメル、ホルマール、ポリエステル樹脂、耐
熱ポリウレタン樹脂が記載されている。
絶縁膜の材料に関する公知技術として、更にポリウレタ
ン樹脂、ナイロン樹脂、ポリイミド樹脂、フッ素系樹
脂、ポリエチレン樹脂、ポリ塩化ビニル樹脂、絶縁ワニ
スであるエナメル、ホルマール、ポリエステル樹脂、耐
熱ポリウレタン樹脂が記載されている。
【0005】
【発明が解決しようとする課題】公知例に記載されてい
るこれらの被覆絶縁膜の材料のうち、ポリエステル樹脂
は膜の剛性が高すぎて脆くなるため、ボンディング性が
悪く、ボンディング不良を生じるおそれがある。またポ
リエステル樹脂も含めて、ポリイミド樹脂、ナイロン樹
脂、フッ素系樹脂は、樹脂の耐熱性が高いものの、逆
に、金属ボールの形成時における加熱温度で分解せずに
炭化してしまうので、半導体チップの電極端子へのワイ
ヤボンディング時に被覆ワイヤに付着した炭化物がキャ
ピラリに引っ掛かってワイヤの供給を妨害したり、金属
ボールに付着した炭化物の為に、金属ボールと電極端子
間の接合性を阻害する。一方リード側への被覆ワイヤボ
ンディングを高信頼で行なうためには、接合部分の被覆
を放電等によって熱的に除去することが必要であるが、
前記の被覆材料では炭化物が接合部の金属線表面に残留
するため、引き続いて行なわれる接合において、信頼性
の高い接合を行なうことが出来ない。また、耐熱エポキ
シ樹脂を被覆膜として用いたものでは、上述の耐熱性、
炭化物発生等のの問題を改善し、ボンディングによる接
合の信頼性の向上が図られている。
るこれらの被覆絶縁膜の材料のうち、ポリエステル樹脂
は膜の剛性が高すぎて脆くなるため、ボンディング性が
悪く、ボンディング不良を生じるおそれがある。またポ
リエステル樹脂も含めて、ポリイミド樹脂、ナイロン樹
脂、フッ素系樹脂は、樹脂の耐熱性が高いものの、逆
に、金属ボールの形成時における加熱温度で分解せずに
炭化してしまうので、半導体チップの電極端子へのワイ
ヤボンディング時に被覆ワイヤに付着した炭化物がキャ
ピラリに引っ掛かってワイヤの供給を妨害したり、金属
ボールに付着した炭化物の為に、金属ボールと電極端子
間の接合性を阻害する。一方リード側への被覆ワイヤボ
ンディングを高信頼で行なうためには、接合部分の被覆
を放電等によって熱的に除去することが必要であるが、
前記の被覆材料では炭化物が接合部の金属線表面に残留
するため、引き続いて行なわれる接合において、信頼性
の高い接合を行なうことが出来ない。また、耐熱エポキ
シ樹脂を被覆膜として用いたものでは、上述の耐熱性、
炭化物発生等のの問題を改善し、ボンディングによる接
合の信頼性の向上が図られている。
【0006】しかし、この改善された耐熱エポキシ樹脂
を被覆膜として用いたものでも、ボンディング時の被覆
膜除去は放電加工によって行われており、特に金属細線
を溶融させることなく被覆膜を除去する際の安定性は充
分とはいえない。
を被覆膜として用いたものでも、ボンディング時の被覆
膜除去は放電加工によって行われており、特に金属細線
を溶融させることなく被覆膜を除去する際の安定性は充
分とはいえない。
【0007】本発明の目的は、被覆されている金属細線
を溶融させることなく被覆膜を除去する際も、確実に安
定して除去することができる被覆膜を用いた半導体装置
内部接続用被覆金属細線とこの被覆金属細線を用いた半
導体装置の組立方法を提供するものである。
を溶融させることなく被覆膜を除去する際も、確実に安
定して除去することができる被覆膜を用いた半導体装置
内部接続用被覆金属細線とこの被覆金属細線を用いた半
導体装置の組立方法を提供するものである。
【0008】
【課題を解決するための手段】本発明の半導体装置内部
接続用被覆金属細線は、その絶縁性被覆膜に1〜35重
量%の顔料又は、染料を含有している。
接続用被覆金属細線は、その絶縁性被覆膜に1〜35重
量%の顔料又は、染料を含有している。
【0009】又、本発明の他の半導体装置内部接続用被
覆金属細線は、その絶縁性被覆膜に1〜30重量%の炭
素微粉末を含有している。
覆金属細線は、その絶縁性被覆膜に1〜30重量%の炭
素微粉末を含有している。
【0010】更に、本発明の半導体装置の組立方法は、
前述の被覆金属細線を半導体チップ又はパッケージに接
続する前に、被覆金属細線の絶縁性被覆膜がレーザ光照
射により除去される被覆膜レーザ除去工程を含んでい
る。
前述の被覆金属細線を半導体チップ又はパッケージに接
続する前に、被覆金属細線の絶縁性被覆膜がレーザ光照
射により除去される被覆膜レーザ除去工程を含んでい
る。
【0011】本発明の半導体装置内部接続用被覆金属細
線は、金線,Al線或いは銅線等の金属細線を被覆する
絶縁性被覆膜に前述の通り顔料、染料、或いは炭素微粉
末が所定の比率以上含ませてあるので、適切な波長を選
ぶことで光の吸収効率が大きく向上しており、絶縁性被
覆膜に含ませた顔料,染料或いは炭素微粉末に応じて、
適切な波長と出力のレーザ光を選び、被覆膜を除去した
い位置に照射することで照射部の絶縁性被覆膜が効率よ
く除去される。
線は、金線,Al線或いは銅線等の金属細線を被覆する
絶縁性被覆膜に前述の通り顔料、染料、或いは炭素微粉
末が所定の比率以上含ませてあるので、適切な波長を選
ぶことで光の吸収効率が大きく向上しており、絶縁性被
覆膜に含ませた顔料,染料或いは炭素微粉末に応じて、
適切な波長と出力のレーザ光を選び、被覆膜を除去した
い位置に照射することで照射部の絶縁性被覆膜が効率よ
く除去される。
【0012】
【発明の実施の形態】次に、本発明の実施の形態を図面
を参照して詳細に説明する。図1は、本発明の第1の実
施形態の半導体装置内部接続用被覆金属細線の模式的な
外観斜視図である。
を参照して詳細に説明する。図1は、本発明の第1の実
施形態の半導体装置内部接続用被覆金属細線の模式的な
外観斜視図である。
【0013】本実施形態の被覆金属細線1は、金線から
なる金属細線2が、鉄黒顔料を略15重量%含有するナ
イロン樹脂でなっている絶縁性被覆膜3で被覆されてい
る。
なる金属細線2が、鉄黒顔料を略15重量%含有するナ
イロン樹脂でなっている絶縁性被覆膜3で被覆されてい
る。
【0014】図2は、この被覆金属細線1にレーザ光4
を照射することにより、絶縁性被覆膜3が除去された状
態を示す模式的な外観斜視図である。被覆金属細線1に
レーザ光4を照射することで照射部5の絶縁性被覆膜3
が除去され、金属細線2が露出している。前述の通り、
本実施形態の被覆金属細線1は、絶縁性被覆膜3が鉄黒
顔料を略15重量%含有するナイロン樹脂でなっている
のでレーザ光4の吸収効率が良く、金属細線2に損傷を
与えることなく照射部5の絶縁性被覆膜3のみが完全に
除去される。
を照射することにより、絶縁性被覆膜3が除去された状
態を示す模式的な外観斜視図である。被覆金属細線1に
レーザ光4を照射することで照射部5の絶縁性被覆膜3
が除去され、金属細線2が露出している。前述の通り、
本実施形態の被覆金属細線1は、絶縁性被覆膜3が鉄黒
顔料を略15重量%含有するナイロン樹脂でなっている
のでレーザ光4の吸収効率が良く、金属細線2に損傷を
与えることなく照射部5の絶縁性被覆膜3のみが完全に
除去される。
【0015】次に、本発明の第2の実施形態の、被覆金
属細線1を用いた半導体装置の組立方法について、図面
を参照して説明する。
属細線1を用いた半導体装置の組立方法について、図面
を参照して説明する。
【0016】図3は、この被覆金属細線1を用いて半導
体装置の内部接続が行われた状態を模式的に示す断面図
である。リードフレーム(又は、パッケージ)のアイラ
ンド14上に銀ペースト等の接着剤13で接着・搭載さ
れたチップ11のパッド12に被覆金属細線1の一端が
ボンディング接続された後、リード15側がボンディン
グ接続される。
体装置の内部接続が行われた状態を模式的に示す断面図
である。リードフレーム(又は、パッケージ)のアイラ
ンド14上に銀ペースト等の接着剤13で接着・搭載さ
れたチップ11のパッド12に被覆金属細線1の一端が
ボンディング接続された後、リード15側がボンディン
グ接続される。
【0017】具体的には、パッド12側は、被覆金属細
線1の端部を放電加工により絶縁性被覆膜3を除去する
と共に金線1を溶融させてボール6を形成し、熱圧着ボ
ンディングにより接続される。一方、リード15側は、
被覆金属細線1のリード側ボンディング接続部7に該当
する部分の絶縁性被覆膜3が完全に除去されるよう照射
部5を設定してレーザ光4を照射し、絶縁性被覆膜3を
除去した後、リード15に被覆金属細線1のリード側ボ
ンディング接続部7を熱圧着ボンディングすることで接
続される。
線1の端部を放電加工により絶縁性被覆膜3を除去する
と共に金線1を溶融させてボール6を形成し、熱圧着ボ
ンディングにより接続される。一方、リード15側は、
被覆金属細線1のリード側ボンディング接続部7に該当
する部分の絶縁性被覆膜3が完全に除去されるよう照射
部5を設定してレーザ光4を照射し、絶縁性被覆膜3を
除去した後、リード15に被覆金属細線1のリード側ボ
ンディング接続部7を熱圧着ボンディングすることで接
続される。
【0018】図4は、被覆金属細線41の金属細線42
がAlの場合について、半導体装置の内部接続が行われ
た状態を模式的に示す断面図である。この場合、パッド
12側については、被覆金属細線41の放電加工による
ボール形成は出来ないので、超音波接続部44に該当す
る部分の絶縁性被覆膜43が完全に除去されるよう照射
部5を設定してレーザ光4を照射し、絶縁性被覆膜43
を除去した後、パッド12に被覆金属細線41の超音波
接続部44を超音波ボンディングすることで接続され
る。リード46側の接続は、図3の場合と同様であるの
で説明を省略する。
がAlの場合について、半導体装置の内部接続が行われ
た状態を模式的に示す断面図である。この場合、パッド
12側については、被覆金属細線41の放電加工による
ボール形成は出来ないので、超音波接続部44に該当す
る部分の絶縁性被覆膜43が完全に除去されるよう照射
部5を設定してレーザ光4を照射し、絶縁性被覆膜43
を除去した後、パッド12に被覆金属細線41の超音波
接続部44を超音波ボンディングすることで接続され
る。リード46側の接続は、図3の場合と同様であるの
で説明を省略する。
【0019】上述の通り、本実施形態の半導体装置の組
立方法によれば、被覆金属細線の絶縁性被覆膜が、レー
ザ光を照射することで金属細線に無用の損傷を与えるこ
となく除去されるので、より安定したボンディング接続
が可能となっている。
立方法によれば、被覆金属細線の絶縁性被覆膜が、レー
ザ光を照射することで金属細線に無用の損傷を与えるこ
となく除去されるので、より安定したボンディング接続
が可能となっている。
【0020】特に、第1の実施形態で示されたような絶
縁性被覆膜に顔料(又は染料)を適当な割合で含有させ
てある場合は、絶縁性被覆膜がレーザ光を吸収する吸収
効率が向上しているため一層効果的である。
縁性被覆膜に顔料(又は染料)を適当な割合で含有させ
てある場合は、絶縁性被覆膜がレーザ光を吸収する吸収
効率が向上しているため一層効果的である。
【0021】更に、使用するレーザを紫外レーザとすれ
ば、レーザ光が絶縁性被覆膜のより表面に近いところで
吸収されるようになり、更に効果的である。
ば、レーザ光が絶縁性被覆膜のより表面に近いところで
吸収されるようになり、更に効果的である。
【0022】尚、絶縁性被覆膜に含有させる炭素微粉
末、顔料或いは染料の種類、含有比率は、被覆膜の基材
となる物質や被覆条件(被覆膜厚等)に応じて適宜選択
すればよい。又、絶縁性被覆膜を除去するためのレーザ
光の波長、出力は、被覆膜の基材となる物質、被覆条
件、含有している炭素微粉末、顔料或いは染料の種類及
び含有比率を考慮して適切な条件を選択すればよい。
末、顔料或いは染料の種類、含有比率は、被覆膜の基材
となる物質や被覆条件(被覆膜厚等)に応じて適宜選択
すればよい。又、絶縁性被覆膜を除去するためのレーザ
光の波長、出力は、被覆膜の基材となる物質、被覆条
件、含有している炭素微粉末、顔料或いは染料の種類及
び含有比率を考慮して適切な条件を選択すればよい。
【0023】
【発明の効果】本発明の半導体装置内部接続用被覆金属
細線は、その絶縁性被覆膜に顔料或いは染料を含有させ
ることにより、レーザ光が絶縁性被覆膜に効率よく吸収
され、金属細線に無用の損傷を与えることなく、レーザ
光照射部の絶縁性被覆膜のみ除去することができ、安定
したボンディング接続を実現できるという効果が得られ
る。
細線は、その絶縁性被覆膜に顔料或いは染料を含有させ
ることにより、レーザ光が絶縁性被覆膜に効率よく吸収
され、金属細線に無用の損傷を与えることなく、レーザ
光照射部の絶縁性被覆膜のみ除去することができ、安定
したボンディング接続を実現できるという効果が得られ
る。
【図1】本発明の半導体装置内部接続用被覆金属細線の
模式的な外観斜視図である。
模式的な外観斜視図である。
【図2】図1の被覆金属細線の絶縁性被覆膜が除去され
た状態を示す模式的な外観斜視図である。
た状態を示す模式的な外観斜視図である。
【図3】金属細線が金線からなる被覆金属細線を用いて
半導体装置の内部接続が行われた状態を模式的に示す断
面図である。
半導体装置の内部接続が行われた状態を模式的に示す断
面図である。
【図4】金属細線がAl線からなる被覆金属細線を用い
て半導体装置の内部接続が行われた状態を模式的に示す
断面図である。
て半導体装置の内部接続が行われた状態を模式的に示す
断面図である。
1,41 被覆金属細線 2,42 金属細線 3,43 絶縁性被覆膜 4 レーザ光 5 照射部 6 ボール 7 リード側ボンディング接続部 11 チップ 12 パッド 13 接着剤 14 アイランド 15,46 リード 44 超音波接続部
Claims (9)
- 【請求項1】 絶縁性被覆膜で周囲を被覆された半導体
装置内部接続用被覆金属細線において、前記絶縁性被覆
膜が1〜35重量%の顔料を含有していることを特徴と
する半導体装置内部接続用被覆金属細線。 - 【請求項2】 絶縁性被覆膜で周囲を被覆された半導体
装置内部接続用被覆金属細線において、前記絶縁性被覆
膜が1〜35重量%以上の染料を含有していることを特
徴とする半導体装置内部接続用被覆金属細線。 - 【請求項3】 絶縁性被覆膜で周囲を被覆された半導体
装置内部接続用被覆金属細線において、前記絶縁性被覆
膜が1〜30重量%の炭素微粉末を含有していることを
特徴とする半導体装置内部接続用被覆金属細線。 - 【請求項4】 絶縁性被覆膜で周囲を被覆された半導体
装置内部接続用被覆金属細線において、前記絶縁性被覆
膜が所定の波長のレーザ光を効率よく吸収する材料を含
有していることを特徴とする半導体装置内部接続用被覆
金属細線。 - 【請求項5】 前記顔料が、チタン白,亜鉛華,鉛白,
リトポン,黄鉛,カドミウムイエロー,コバルトイエロ
ー,モリブデン赤,カドミウムレッド,べんがら,鉛
丹,コバルトグリーン,クロムグリーン,カーボンブラ
ック又は鉄黒である請求項1記載の半導体装置内部接続
用被覆金属細線。 - 【請求項6】 前記染料が、アゾ染料,アントラキノン
染料,インジゴイド染料,ジフェニルメタン染料,トリ
フェニルメタン染料,キサンテン染料,アクリジン染
料,アジン染料,オキサジン染料,チアジン染料,ポリ
メチン染料,キノリン染料又はフタロシアニン染料であ
る請求項2記載の半導体装置内部接続用被覆金属細線。 - 【請求項7】 前記炭素微粉末は、粒径が1μm以下で
ある請求項3記載の半導体装置内部接続用被覆金属細
線。 - 【請求項8】 請求項1,2,3又は4記載の被覆金属
細線を用いた半導体装置の組立方法において、前記被覆
金属細線を半導体チップ又はパッケージに接続する前に
前記被覆絶縁性被覆膜をレーザ光照射により除去する被
覆膜レーザ除去工程が含まれることを特徴とする半導体
装置の組立方法。 - 【請求項9】 請求項1,2,3又は4記載の被覆金属
細線を用いた半導体装置の組立方法において、前記被覆
膜レーザ除去工程で照射に使用されるレーザが紫外レー
ザである請求項8記載の半導体装置の組立方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9283861A JP2990128B2 (ja) | 1997-10-16 | 1997-10-16 | 半導体装置内部接続用被覆金属細線 |
KR1019980043221A KR100327948B1 (ko) | 1997-10-16 | 1998-10-15 | 피복되고미세한금속와이어및이를이용한반도체장치의조립방법 |
US09/173,742 US6239376B1 (en) | 1997-10-16 | 1998-10-16 | Coated fine metallic wire and method for fabricating semiconductor device using same |
CN98120434A CN1215214A (zh) | 1997-10-16 | 1998-10-16 | 涂层细金属线和使用它的半导体器件的制造方法 |
US09/664,717 US6640436B1 (en) | 1997-10-16 | 2000-09-19 | Method of fabricating a coated metallic wire, method of removing insulation from the coated metallic wire and method of fabricating a semiconductor device with the wire |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9283861A JP2990128B2 (ja) | 1997-10-16 | 1997-10-16 | 半導体装置内部接続用被覆金属細線 |
Publications (2)
Publication Number | Publication Date |
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JPH11121501A true JPH11121501A (ja) | 1999-04-30 |
JP2990128B2 JP2990128B2 (ja) | 1999-12-13 |
Family
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JP9283861A Expired - Fee Related JP2990128B2 (ja) | 1997-10-16 | 1997-10-16 | 半導体装置内部接続用被覆金属細線 |
Country Status (4)
Country | Link |
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US (2) | US6239376B1 (ja) |
JP (1) | JP2990128B2 (ja) |
KR (1) | KR100327948B1 (ja) |
CN (1) | CN1215214A (ja) |
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EP1229554A1 (en) * | 2000-06-29 | 2002-08-07 | Matsushita Electric Industrial Co., Ltd. | Covered conductor, soldering method using the covered conductor, and electric acoustic converter |
JP2008166222A (ja) * | 2007-01-04 | 2008-07-17 | Asmo Co Ltd | 導線、及び絶縁皮膜の除去方法 |
JP2016524337A (ja) * | 2013-07-03 | 2016-08-12 | ローゼンベルガー ホーフフレクベンツテクニーク ゲーエムベーハー ウント ツェーオー カーゲー | 選択的に修正された電気的特性を持つリード線を有する電子機器 |
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-
1998
- 1998-10-15 KR KR1019980043221A patent/KR100327948B1/ko not_active IP Right Cessation
- 1998-10-16 US US09/173,742 patent/US6239376B1/en not_active Expired - Fee Related
- 1998-10-16 CN CN98120434A patent/CN1215214A/zh active Pending
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2000
- 2000-09-19 US US09/664,717 patent/US6640436B1/en not_active Expired - Fee Related
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EP1229554A1 (en) * | 2000-06-29 | 2002-08-07 | Matsushita Electric Industrial Co., Ltd. | Covered conductor, soldering method using the covered conductor, and electric acoustic converter |
US6914185B2 (en) | 2000-06-29 | 2005-07-05 | Matsushita Electric Industrial Co., Ltd. | Enameled wire, method of soldering the wire and electro-acoustic transducer |
EP1229554A4 (en) * | 2000-06-29 | 2006-10-11 | Matsushita Electric Ind Co Ltd | ENROBE CONDUCTOR, WELDING METHOD USING THE COATED CONDUCTOR, AND ELECTROACOUSTIC CONVERTER |
JP2008166222A (ja) * | 2007-01-04 | 2008-07-17 | Asmo Co Ltd | 導線、及び絶縁皮膜の除去方法 |
JP2016524337A (ja) * | 2013-07-03 | 2016-08-12 | ローゼンベルガー ホーフフレクベンツテクニーク ゲーエムベーハー ウント ツェーオー カーゲー | 選択的に修正された電気的特性を持つリード線を有する電子機器 |
Also Published As
Publication number | Publication date |
---|---|
KR100327948B1 (ko) | 2002-06-26 |
KR19990037134A (ko) | 1999-05-25 |
JP2990128B2 (ja) | 1999-12-13 |
CN1215214A (zh) | 1999-04-28 |
US6640436B1 (en) | 2003-11-04 |
US6239376B1 (en) | 2001-05-29 |
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