JPH10307397A5 - - Google Patents

Info

Publication number
JPH10307397A5
JPH10307397A5 JP1997119772A JP11977297A JPH10307397A5 JP H10307397 A5 JPH10307397 A5 JP H10307397A5 JP 1997119772 A JP1997119772 A JP 1997119772A JP 11977297 A JP11977297 A JP 11977297A JP H10307397 A5 JPH10307397 A5 JP H10307397A5
Authority
JP
Japan
Prior art keywords
group
represent
same
different
photosensitive composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997119772A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10307397A (ja
JP3755690B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP11977297A external-priority patent/JP3755690B2/ja
Priority to JP11977297A priority Critical patent/JP3755690B2/ja
Priority to EP98108461A priority patent/EP0877293B1/en
Priority to DE69821049T priority patent/DE69821049T2/de
Priority to KR1019980016647A priority patent/KR100516702B1/ko
Priority to US09/075,246 priority patent/US6479209B1/en
Publication of JPH10307397A publication Critical patent/JPH10307397A/ja
Publication of JPH10307397A5 publication Critical patent/JPH10307397A5/ja
Publication of JP3755690B2 publication Critical patent/JP3755690B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP11977297A 1997-05-09 1997-05-09 ポジ型感光性組成物 Expired - Fee Related JP3755690B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP11977297A JP3755690B2 (ja) 1997-05-09 1997-05-09 ポジ型感光性組成物
EP98108461A EP0877293B1 (en) 1997-05-09 1998-05-08 Positive photosensitive composition
DE69821049T DE69821049T2 (de) 1997-05-09 1998-05-08 Positiv arbeitende lichtempfindliche Zusammensetzung
KR1019980016647A KR100516702B1 (ko) 1997-05-09 1998-05-09 포지티브감광성조성물
US09/075,246 US6479209B1 (en) 1997-05-09 1998-05-11 Positive photosensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11977297A JP3755690B2 (ja) 1997-05-09 1997-05-09 ポジ型感光性組成物

Publications (3)

Publication Number Publication Date
JPH10307397A JPH10307397A (ja) 1998-11-17
JPH10307397A5 true JPH10307397A5 (enrdf_load_stackoverflow) 2004-10-14
JP3755690B2 JP3755690B2 (ja) 2006-03-15

Family

ID=14769835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11977297A Expired - Fee Related JP3755690B2 (ja) 1997-05-09 1997-05-09 ポジ型感光性組成物

Country Status (1)

Country Link
JP (1) JP3755690B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100416916B1 (ko) * 2001-05-11 2004-02-05 학교법인 한양학원 실리콘 함유 고분자 화합물 및 이를 이용한 레지스트 조성물
JP4300843B2 (ja) * 2003-03-28 2009-07-22 東レ株式会社 レジスト用樹脂の製造方法
JP5377042B2 (ja) * 2009-04-10 2013-12-25 三菱レイヨン株式会社 レジスト用共重合体の製造方法。
JP5986825B2 (ja) * 2012-06-29 2016-09-06 株式会社ダイセル 高分子化合物、フォトレジスト用樹脂組成物、及び半導体の製造方法
JP5986826B2 (ja) * 2012-06-29 2016-09-06 株式会社ダイセル 高分子化合物、フォトレジスト用樹脂組成物、及び半導体の製造方法
CN104379617A (zh) * 2012-06-29 2015-02-25 株式会社大赛璐 高分子化合物、光致抗蚀剂用树脂组合物、及半导体的制造方法

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