JPH10307398A5 - - Google Patents

Info

Publication number
JPH10307398A5
JPH10307398A5 JP1997119773A JP11977397A JPH10307398A5 JP H10307398 A5 JPH10307398 A5 JP H10307398A5 JP 1997119773 A JP1997119773 A JP 1997119773A JP 11977397 A JP11977397 A JP 11977397A JP H10307398 A5 JPH10307398 A5 JP H10307398A5
Authority
JP
Japan
Prior art keywords
group
represent
same
substituent
different
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997119773A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10307398A (ja
JP3731776B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP11977397A external-priority patent/JP3731776B2/ja
Priority to JP11977397A priority Critical patent/JP3731776B2/ja
Priority to EP98108461A priority patent/EP0877293B1/en
Priority to DE69821049T priority patent/DE69821049T2/de
Priority to KR1019980016647A priority patent/KR100516702B1/ko
Priority to US09/075,246 priority patent/US6479209B1/en
Publication of JPH10307398A publication Critical patent/JPH10307398A/ja
Publication of JPH10307398A5 publication Critical patent/JPH10307398A5/ja
Publication of JP3731776B2 publication Critical patent/JP3731776B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP11977397A 1997-05-09 1997-05-09 ポジ型感光性組成物 Expired - Lifetime JP3731776B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP11977397A JP3731776B2 (ja) 1997-05-09 1997-05-09 ポジ型感光性組成物
EP98108461A EP0877293B1 (en) 1997-05-09 1998-05-08 Positive photosensitive composition
DE69821049T DE69821049T2 (de) 1997-05-09 1998-05-08 Positiv arbeitende lichtempfindliche Zusammensetzung
KR1019980016647A KR100516702B1 (ko) 1997-05-09 1998-05-09 포지티브감광성조성물
US09/075,246 US6479209B1 (en) 1997-05-09 1998-05-11 Positive photosensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11977397A JP3731776B2 (ja) 1997-05-09 1997-05-09 ポジ型感光性組成物

Publications (3)

Publication Number Publication Date
JPH10307398A JPH10307398A (ja) 1998-11-17
JPH10307398A5 true JPH10307398A5 (enrdf_load_stackoverflow) 2004-10-14
JP3731776B2 JP3731776B2 (ja) 2006-01-05

Family

ID=14769863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11977397A Expired - Lifetime JP3731776B2 (ja) 1997-05-09 1997-05-09 ポジ型感光性組成物

Country Status (1)

Country Link
JP (1) JP3731776B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3963602B2 (ja) * 1999-01-27 2007-08-22 富士フイルム株式会社 遠紫外線露光用ポジ型フォトレジスト組成物
US6692888B1 (en) * 1999-10-07 2004-02-17 Shipley Company, L.L.C. Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same
US8029969B2 (en) 2007-05-14 2011-10-04 Taiwan Semiconductor Manufacturing Company, Ltd. Material and method for photolithography

Similar Documents

Publication Publication Date Title
JP2004004834A5 (enrdf_load_stackoverflow)
JP2004117688A5 (enrdf_load_stackoverflow)
JP2000267287A5 (enrdf_load_stackoverflow)
JP2001330947A5 (enrdf_load_stackoverflow)
JP2004029136A5 (enrdf_load_stackoverflow)
JPH11109628A5 (enrdf_load_stackoverflow)
JP2000098613A5 (enrdf_load_stackoverflow)
JP2000214588A5 (enrdf_load_stackoverflow)
JP2003114522A5 (enrdf_load_stackoverflow)
JPH10239847A5 (enrdf_load_stackoverflow)
JPH10312060A5 (enrdf_load_stackoverflow)
JPH11344808A5 (enrdf_load_stackoverflow)
JPH10307397A5 (enrdf_load_stackoverflow)
JPH11258801A5 (enrdf_load_stackoverflow)
JP2001249458A5 (enrdf_load_stackoverflow)
JPH10232495A5 (enrdf_load_stackoverflow)
JP2002323768A5 (enrdf_load_stackoverflow)
JP2000019737A5 (enrdf_load_stackoverflow)
JP2000352822A5 (enrdf_load_stackoverflow)
JPH10307398A5 (enrdf_load_stackoverflow)
JP2000347410A5 (enrdf_load_stackoverflow)
JPH10239846A5 (enrdf_load_stackoverflow)
JP2002169287A5 (enrdf_load_stackoverflow)
JP2003316007A5 (enrdf_load_stackoverflow)
JP2004078105A5 (enrdf_load_stackoverflow)