JPH10312060A5 - - Google Patents

Info

Publication number
JPH10312060A5
JPH10312060A5 JP1997120919A JP12091997A JPH10312060A5 JP H10312060 A5 JPH10312060 A5 JP H10312060A5 JP 1997120919 A JP1997120919 A JP 1997120919A JP 12091997 A JP12091997 A JP 12091997A JP H10312060 A5 JPH10312060 A5 JP H10312060A5
Authority
JP
Japan
Prior art keywords
group
represent
component
resist composition
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997120919A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10312060A (ja
JP3731777B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP12091997A external-priority patent/JP3731777B2/ja
Priority to JP12091997A priority Critical patent/JP3731777B2/ja
Priority to DE69803117T priority patent/DE69803117T2/de
Priority to EP98108549A priority patent/EP0878738B1/en
Priority to KR1019980016901A priority patent/KR100535223B1/ko
Priority to US09/075,818 priority patent/US6245485B1/en
Publication of JPH10312060A publication Critical patent/JPH10312060A/ja
Publication of JPH10312060A5 publication Critical patent/JPH10312060A5/ja
Publication of JP3731777B2 publication Critical patent/JP3731777B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP12091997A 1997-05-12 1997-05-12 ポジ型レジスト組成物 Expired - Lifetime JP3731777B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP12091997A JP3731777B2 (ja) 1997-05-12 1997-05-12 ポジ型レジスト組成物
DE69803117T DE69803117T2 (de) 1997-05-12 1998-05-11 Positiv arbeitende Resistzusammensetzung
EP98108549A EP0878738B1 (en) 1997-05-12 1998-05-11 Positive resist composition
US09/075,818 US6245485B1 (en) 1997-05-12 1998-05-12 Positive resist composition
KR1019980016901A KR100535223B1 (ko) 1997-05-12 1998-05-12 포지티브레지스트조성물

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12091997A JP3731777B2 (ja) 1997-05-12 1997-05-12 ポジ型レジスト組成物

Publications (3)

Publication Number Publication Date
JPH10312060A JPH10312060A (ja) 1998-11-24
JPH10312060A5 true JPH10312060A5 (enrdf_load_stackoverflow) 2004-10-14
JP3731777B2 JP3731777B2 (ja) 2006-01-05

Family

ID=14798245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12091997A Expired - Lifetime JP3731777B2 (ja) 1997-05-12 1997-05-12 ポジ型レジスト組成物

Country Status (1)

Country Link
JP (1) JP3731777B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4527212B2 (ja) * 1998-05-25 2010-08-18 ダイセル化学工業株式会社 酸感応性化合物及びフォトレジスト用樹脂組成物
EP1000924A4 (en) * 1998-05-25 2005-01-05 Daicel Chem ACID SENSITIVE COMPOUND AND RESIN COMPOSITION FOR PHOTORESIN
JP3810957B2 (ja) * 1998-08-06 2006-08-16 株式会社東芝 レジスト用樹脂、レジスト組成物およびそれを用いたパターン形成方法
US6303266B1 (en) 1998-09-24 2001-10-16 Kabushiki Kaisha Toshiba Resin useful for resist, resist composition and pattern forming process using the same
KR20010054675A (ko) * 1999-12-07 2001-07-02 윤종용 감광성 중합체 및 이를 포함하는 화학 증폭형포토레지스트 조성물
KR100416916B1 (ko) * 2001-05-11 2004-02-05 학교법인 한양학원 실리콘 함유 고분자 화합물 및 이를 이용한 레지스트 조성물
JP2002338627A (ja) * 2001-05-22 2002-11-27 Daicel Chem Ind Ltd フォトレジスト用高分子化合物及び感光性樹脂組成物
WO2009093419A1 (ja) * 2008-01-21 2009-07-30 Daicel Chemical Industries, Ltd. 化学増幅型フォトレジスト用樹脂及びその製造方法
EP2626342B1 (en) * 2010-10-08 2016-08-03 Nippon Carbide Industries Co., Inc. Novel vinyl-ether compound and manufacturing method therefor

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