JPH10256559A5 - - Google Patents

Info

Publication number
JPH10256559A5
JPH10256559A5 JP1997078979A JP7897997A JPH10256559A5 JP H10256559 A5 JPH10256559 A5 JP H10256559A5 JP 1997078979 A JP1997078979 A JP 1997078979A JP 7897997 A JP7897997 A JP 7897997A JP H10256559 A5 JPH10256559 A5 JP H10256559A5
Authority
JP
Japan
Prior art keywords
silicon film
heat treatment
crystal growth
nickel element
amorphous silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1997078979A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10256559A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP7897997A priority Critical patent/JPH10256559A/ja
Priority claimed from JP7897997A external-priority patent/JPH10256559A/ja
Priority to US08/997,910 priority patent/US6140166A/en
Publication of JPH10256559A publication Critical patent/JPH10256559A/ja
Priority to US09/686,652 priority patent/US6627486B1/en
Publication of JPH10256559A5 publication Critical patent/JPH10256559A5/ja
Withdrawn legal-status Critical Current

Links

JP7897997A 1996-12-27 1997-03-13 半導体の作製方法および半導体装置の作製方法 Withdrawn JPH10256559A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP7897997A JPH10256559A (ja) 1997-03-13 1997-03-13 半導体の作製方法および半導体装置の作製方法
US08/997,910 US6140166A (en) 1996-12-27 1997-12-24 Method for manufacturing semiconductor and method for manufacturing semiconductor device
US09/686,652 US6627486B1 (en) 1996-12-27 2000-10-10 Method for manufacturing semiconductor and method for manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7897997A JPH10256559A (ja) 1997-03-13 1997-03-13 半導体の作製方法および半導体装置の作製方法

Publications (2)

Publication Number Publication Date
JPH10256559A JPH10256559A (ja) 1998-09-25
JPH10256559A5 true JPH10256559A5 (enExample) 2005-02-10

Family

ID=13677022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7897997A Withdrawn JPH10256559A (ja) 1996-12-27 1997-03-13 半導体の作製方法および半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JPH10256559A (enExample)

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