JPH10168582A - 円筒状部材の内周面への被膜形成方法 - Google Patents
円筒状部材の内周面への被膜形成方法Info
- Publication number
- JPH10168582A JPH10168582A JP27487897A JP27487897A JPH10168582A JP H10168582 A JPH10168582 A JP H10168582A JP 27487897 A JP27487897 A JP 27487897A JP 27487897 A JP27487897 A JP 27487897A JP H10168582 A JPH10168582 A JP H10168582A
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical member
- intermediate layer
- peripheral surface
- inner peripheral
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27487897A JPH10168582A (ja) | 1996-10-08 | 1997-10-07 | 円筒状部材の内周面への被膜形成方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8-266878 | 1996-10-08 | ||
| JP26687896 | 1996-10-08 | ||
| JP27487897A JPH10168582A (ja) | 1996-10-08 | 1997-10-07 | 円筒状部材の内周面への被膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10168582A true JPH10168582A (ja) | 1998-06-23 |
| JPH10168582A5 JPH10168582A5 (enExample) | 2005-06-23 |
Family
ID=26547630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27487897A Pending JPH10168582A (ja) | 1996-10-08 | 1997-10-07 | 円筒状部材の内周面への被膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10168582A (enExample) |
-
1997
- 1997-10-07 JP JP27487897A patent/JPH10168582A/ja active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041005 |
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| A621 | Written request for application examination |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
Effective date: 20060502 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20060905 |