JPH10144614A5 - - Google Patents

Info

Publication number
JPH10144614A5
JPH10144614A5 JP1997288820A JP28882097A JPH10144614A5 JP H10144614 A5 JPH10144614 A5 JP H10144614A5 JP 1997288820 A JP1997288820 A JP 1997288820A JP 28882097 A JP28882097 A JP 28882097A JP H10144614 A5 JPH10144614 A5 JP H10144614A5
Authority
JP
Japan
Prior art keywords
showerhead
wall
reaction chamber
faceplate
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997288820A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10144614A (ja
JP4371442B2 (ja
Filing date
Publication date
Priority claimed from US08/735,386 external-priority patent/US5882411A/en
Application filed filed Critical
Publication of JPH10144614A publication Critical patent/JPH10144614A/ja
Publication of JPH10144614A5 publication Critical patent/JPH10144614A5/ja
Application granted granted Critical
Publication of JP4371442B2 publication Critical patent/JP4371442B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP28882097A 1996-10-21 1997-10-21 反応チャンバにガスを供給する為の面板、および、反応チャンバ Expired - Lifetime JP4371442B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/735386 1996-10-21
US08/735,386 US5882411A (en) 1996-10-21 1996-10-21 Faceplate thermal choke in a CVD plasma reactor

Publications (3)

Publication Number Publication Date
JPH10144614A JPH10144614A (ja) 1998-05-29
JPH10144614A5 true JPH10144614A5 (enExample) 2005-06-30
JP4371442B2 JP4371442B2 (ja) 2009-11-25

Family

ID=24955564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28882097A Expired - Lifetime JP4371442B2 (ja) 1996-10-21 1997-10-21 反応チャンバにガスを供給する為の面板、および、反応チャンバ

Country Status (3)

Country Link
US (1) US5882411A (enExample)
JP (1) JP4371442B2 (enExample)
KR (1) KR100492135B1 (enExample)

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Family Cites Families (1)

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