JP2010514160A5 - - Google Patents

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Publication number
JP2010514160A5
JP2010514160A5 JP2009541418A JP2009541418A JP2010514160A5 JP 2010514160 A5 JP2010514160 A5 JP 2010514160A5 JP 2009541418 A JP2009541418 A JP 2009541418A JP 2009541418 A JP2009541418 A JP 2009541418A JP 2010514160 A5 JP2010514160 A5 JP 2010514160A5
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Japan
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electrode assembly
gas flow
showerhead electrode
assembly according
backing member
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JP2009541418A
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Japanese (ja)
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JP2010514160A (ja
JP5156025B2 (ja
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Priority claimed from US11/640,193 external-priority patent/US8702866B2/en
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JP2009541418A 2006-12-18 2007-12-17 電極寿命の延長のためのガス流れの修正を伴うシャワーヘッド電極組立体 Active JP5156025B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/640,193 US8702866B2 (en) 2006-12-18 2006-12-18 Showerhead electrode assembly with gas flow modification for extended electrode life
US11/640,193 2006-12-18
PCT/US2007/025730 WO2008076408A1 (en) 2006-12-18 2007-12-17 Showerhead electrode assembly with gas flow modification for extended electrode life

Publications (3)

Publication Number Publication Date
JP2010514160A JP2010514160A (ja) 2010-04-30
JP2010514160A5 true JP2010514160A5 (enExample) 2011-02-03
JP5156025B2 JP5156025B2 (ja) 2013-03-06

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JP2009541418A Active JP5156025B2 (ja) 2006-12-18 2007-12-17 電極寿命の延長のためのガス流れの修正を伴うシャワーヘッド電極組立体

Country Status (7)

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US (2) US8702866B2 (enExample)
JP (1) JP5156025B2 (enExample)
KR (1) KR101413806B1 (enExample)
CN (1) CN101563762B (enExample)
SG (1) SG177220A1 (enExample)
TW (1) TWI469694B (enExample)
WO (1) WO2008076408A1 (enExample)

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