JPH09293685A - 縦型ウエハボート - Google Patents

縦型ウエハボート

Info

Publication number
JPH09293685A
JPH09293685A JP5998397A JP5998397A JPH09293685A JP H09293685 A JPH09293685 A JP H09293685A JP 5998397 A JP5998397 A JP 5998397A JP 5998397 A JP5998397 A JP 5998397A JP H09293685 A JPH09293685 A JP H09293685A
Authority
JP
Japan
Prior art keywords
wafer boat
vertical
silicon carbide
wafer
end plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5998397A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09293685A5 (enExample
Inventor
Taro Uchiyama
太郎 内山
Takashi Tsukamoto
隆志 塚本
Jiro Nishihama
二郎 西浜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP5998397A priority Critical patent/JPH09293685A/ja
Publication of JPH09293685A publication Critical patent/JPH09293685A/ja
Publication of JPH09293685A5 publication Critical patent/JPH09293685A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP5998397A 1996-02-28 1997-02-27 縦型ウエハボート Pending JPH09293685A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5998397A JPH09293685A (ja) 1996-02-28 1997-02-27 縦型ウエハボート

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6735796 1996-02-28
JP8-67357 1996-02-28
JP5998397A JPH09293685A (ja) 1996-02-28 1997-02-27 縦型ウエハボート

Publications (2)

Publication Number Publication Date
JPH09293685A true JPH09293685A (ja) 1997-11-11
JPH09293685A5 JPH09293685A5 (enExample) 2005-01-06

Family

ID=26401046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5998397A Pending JPH09293685A (ja) 1996-02-28 1997-02-27 縦型ウエハボート

Country Status (1)

Country Link
JP (1) JPH09293685A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11163095A (ja) * 1997-11-28 1999-06-18 Tokyo Electron Ltd 基板処理システム、インターフェイス装置、および基板搬送方法
KR20030087285A (ko) * 2002-05-08 2003-11-14 동부전자 주식회사 반도체 공정 장비의 링형 보트 탑 커버
US6811040B2 (en) * 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus
JP2007329476A (ja) * 2006-06-02 2007-12-20 Rohm & Haas Electronic Materials Llc フィレット半径結合部を有する装置
JP2008260677A (ja) * 2007-03-09 2008-10-30 Rohm & Haas Electronic Materials Llc 化学気相堆積炭化ケイ素物品
JP2014509788A (ja) * 2011-03-24 2014-04-21 サン―ア フロンテック カンパニー，リミテッド ソラーウェーハカセット
JP2015070046A (ja) * 2013-09-27 2015-04-13 株式会社日立国際電気 基板保持具

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492549B1 (enExample) * 1968-12-14 1974-01-21
JPS6398123A (ja) * 1986-10-15 1988-04-28 Tokai Kounetsu Kogyo Kk 半導体製造用ウエハ−ボ−トの製法
JPH02196074A (ja) * 1989-01-25 1990-08-02 Dowa Mining Co Ltd セラミックスと金属の接合体の製造法
JPH04300262A (ja) * 1991-03-28 1992-10-23 Shin Etsu Chem Co Ltd 炭化珪素質治具
JPH05270933A (ja) * 1992-03-25 1993-10-19 Ngk Insulators Ltd セラミックス接合体及びその製造方法
JPH072575A (ja) * 1993-06-16 1995-01-06 Toshiba Ceramics Co Ltd セラミックス接合用コンパウンド及びセラミック接合体
JPH07122513A (ja) * 1993-10-21 1995-05-12 Tokyo Electron Ltd 縦型熱処理装置
JPH08102446A (ja) * 1994-09-30 1996-04-16 Toshiba Ceramics Co Ltd ウエハボート

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492549B1 (enExample) * 1968-12-14 1974-01-21
JPS6398123A (ja) * 1986-10-15 1988-04-28 Tokai Kounetsu Kogyo Kk 半導体製造用ウエハ−ボ−トの製法
JPH02196074A (ja) * 1989-01-25 1990-08-02 Dowa Mining Co Ltd セラミックスと金属の接合体の製造法
JPH04300262A (ja) * 1991-03-28 1992-10-23 Shin Etsu Chem Co Ltd 炭化珪素質治具
JPH05270933A (ja) * 1992-03-25 1993-10-19 Ngk Insulators Ltd セラミックス接合体及びその製造方法
JPH072575A (ja) * 1993-06-16 1995-01-06 Toshiba Ceramics Co Ltd セラミックス接合用コンパウンド及びセラミック接合体
JPH07122513A (ja) * 1993-10-21 1995-05-12 Tokyo Electron Ltd 縦型熱処理装置
JPH08102446A (ja) * 1994-09-30 1996-04-16 Toshiba Ceramics Co Ltd ウエハボート

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11163095A (ja) * 1997-11-28 1999-06-18 Tokyo Electron Ltd 基板処理システム、インターフェイス装置、および基板搬送方法
US6811040B2 (en) * 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus
KR20030087285A (ko) * 2002-05-08 2003-11-14 동부전자 주식회사 반도체 공정 장비의 링형 보트 탑 커버
JP2007329476A (ja) * 2006-06-02 2007-12-20 Rohm & Haas Electronic Materials Llc フィレット半径結合部を有する装置
TWI402929B (zh) * 2006-06-02 2013-07-21 羅門哈斯電子材料有限公司 具有圓角半徑接合器之裝置
JP2008260677A (ja) * 2007-03-09 2008-10-30 Rohm & Haas Electronic Materials Llc 化学気相堆積炭化ケイ素物品
JP2014509788A (ja) * 2011-03-24 2014-04-21 サン―ア フロンテック カンパニー，リミテッド ソラーウェーハカセット
JP2015070046A (ja) * 2013-09-27 2015-04-13 株式会社日立国際電気 基板保持具

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