JPH08288368A - 基板の整列装置および方法 - Google Patents

基板の整列装置および方法

Info

Publication number
JPH08288368A
JPH08288368A JP11362095A JP11362095A JPH08288368A JP H08288368 A JPH08288368 A JP H08288368A JP 11362095 A JP11362095 A JP 11362095A JP 11362095 A JP11362095 A JP 11362095A JP H08288368 A JPH08288368 A JP H08288368A
Authority
JP
Japan
Prior art keywords
substrate
substrates
aligning
supporting member
storage container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11362095A
Other languages
English (en)
Japanese (ja)
Inventor
Hisashi Koike
久 小池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TERU ENG KK
Tokyo Electron Ltd
Original Assignee
TERU ENG KK
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TERU ENG KK, Tokyo Electron Ltd filed Critical TERU ENG KK
Priority to JP11362095A priority Critical patent/JPH08288368A/ja
Priority to TW085104300A priority patent/TW297911B/zh
Priority to KR1019960011014A priority patent/KR100218238B1/ko
Publication of JPH08288368A publication Critical patent/JPH08288368A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Robotics (AREA)
  • Chemical & Material Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Automatic Assembly (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP11362095A 1995-04-14 1995-04-14 基板の整列装置および方法 Pending JPH08288368A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP11362095A JPH08288368A (ja) 1995-04-14 1995-04-14 基板の整列装置および方法
TW085104300A TW297911B (zh) 1995-04-14 1996-04-11
KR1019960011014A KR100218238B1 (ko) 1995-04-14 1996-04-12 기판정렬장치 및 기판정렬방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11362095A JPH08288368A (ja) 1995-04-14 1995-04-14 基板の整列装置および方法

Publications (1)

Publication Number Publication Date
JPH08288368A true JPH08288368A (ja) 1996-11-01

Family

ID=14616836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11362095A Pending JPH08288368A (ja) 1995-04-14 1995-04-14 基板の整列装置および方法

Country Status (3)

Country Link
JP (1) JPH08288368A (zh)
KR (1) KR100218238B1 (zh)
TW (1) TW297911B (zh)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10335429A (ja) * 1997-06-04 1998-12-18 Tokyo Electron Ltd 基板整列方法およびその装置
KR100564544B1 (ko) * 1999-01-14 2006-03-28 삼성전자주식회사 웨이퍼 적재용 보트
JP4577603B2 (ja) * 2001-09-20 2010-11-10 株式会社安川電機 薄状物体の収納容器
JP2011073688A (ja) * 2009-09-29 2011-04-14 Toppan Printing Co Ltd ガラス基板収納用トレイ
JP2012015530A (ja) * 2011-07-25 2012-01-19 Hitachi Kokusai Electric Inc 基板処理装置および基板検出方法
KR101416978B1 (ko) * 2012-12-28 2014-07-09 주식회사 선익시스템 기판 상하역장치 및 인라인 증착 시스템
JPWO2019030863A1 (ja) * 2017-08-09 2020-09-17 ミライアル株式会社 基板収納容器

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100488928B1 (ko) * 1997-12-11 2005-10-26 비오이 하이디스 테크놀로지 주식회사 액정 셀 및 카세트 정렬 장치
KR100672634B1 (ko) * 2001-12-19 2007-02-09 엘지.필립스 엘시디 주식회사 액정표시소자의 기판 반송 장치 및 방법
JP4642610B2 (ja) * 2005-09-05 2011-03-02 東京エレクトロン株式会社 基板位置合わせ装置および基板収容ユニット
JP4708217B2 (ja) 2006-02-28 2011-06-22 大日本スクリーン製造株式会社 基板処理装置および昇降装置
KR101425542B1 (ko) * 2008-06-13 2014-08-06 한미반도체 주식회사 메모리카드 가공장치

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10335429A (ja) * 1997-06-04 1998-12-18 Tokyo Electron Ltd 基板整列方法およびその装置
KR100564544B1 (ko) * 1999-01-14 2006-03-28 삼성전자주식회사 웨이퍼 적재용 보트
JP4577603B2 (ja) * 2001-09-20 2010-11-10 株式会社安川電機 薄状物体の収納容器
JP2011073688A (ja) * 2009-09-29 2011-04-14 Toppan Printing Co Ltd ガラス基板収納用トレイ
JP2012015530A (ja) * 2011-07-25 2012-01-19 Hitachi Kokusai Electric Inc 基板処理装置および基板検出方法
KR101416978B1 (ko) * 2012-12-28 2014-07-09 주식회사 선익시스템 기판 상하역장치 및 인라인 증착 시스템
JPWO2019030863A1 (ja) * 2017-08-09 2020-09-17 ミライアル株式会社 基板収納容器

Also Published As

Publication number Publication date
KR100218238B1 (ko) 1999-09-01
TW297911B (zh) 1997-02-11
KR960039106A (ko) 1996-11-21

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