KR100218238B1 - 기판정렬장치 및 기판정렬방법 - Google Patents

기판정렬장치 및 기판정렬방법 Download PDF

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Publication number
KR100218238B1
KR100218238B1 KR1019960011014A KR19960011014A KR100218238B1 KR 100218238 B1 KR100218238 B1 KR 100218238B1 KR 1019960011014 A KR1019960011014 A KR 1019960011014A KR 19960011014 A KR19960011014 A KR 19960011014A KR 100218238 B1 KR100218238 B1 KR 100218238B1
Authority
KR
South Korea
Prior art keywords
substrate
cassette
moving
alignment
support member
Prior art date
Application number
KR1019960011014A
Other languages
English (en)
Korean (ko)
Other versions
KR960039106A (ko
Inventor
히사시 고이케
Original Assignee
히가시 데쓰로
동경엘렉트론주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 히가시 데쓰로, 동경엘렉트론주식회사 filed Critical 히가시 데쓰로
Publication of KR960039106A publication Critical patent/KR960039106A/ko
Application granted granted Critical
Publication of KR100218238B1 publication Critical patent/KR100218238B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Robotics (AREA)
  • Chemical & Material Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Automatic Assembly (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1019960011014A 1995-04-14 1996-04-12 기판정렬장치 및 기판정렬방법 KR100218238B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11362095A JPH08288368A (ja) 1995-04-14 1995-04-14 基板の整列装置および方法
JP95-113620 1995-04-14

Publications (2)

Publication Number Publication Date
KR960039106A KR960039106A (ko) 1996-11-21
KR100218238B1 true KR100218238B1 (ko) 1999-09-01

Family

ID=14616836

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960011014A KR100218238B1 (ko) 1995-04-14 1996-04-12 기판정렬장치 및 기판정렬방법

Country Status (3)

Country Link
JP (1) JPH08288368A (zh)
KR (1) KR100218238B1 (zh)
TW (1) TW297911B (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100672634B1 (ko) * 2001-12-19 2007-02-09 엘지.필립스 엘시디 주식회사 액정표시소자의 기판 반송 장치 및 방법
KR100807035B1 (ko) 2006-02-28 2008-02-25 다이니폰 스크린 세이조우 가부시키가이샤 기판 처리 장치 및 승강 장치
KR101425542B1 (ko) * 2008-06-13 2014-08-06 한미반도체 주식회사 메모리카드 가공장치

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3578593B2 (ja) * 1997-06-04 2004-10-20 東京エレクトロン株式会社 基板整列装置
KR100488928B1 (ko) * 1997-12-11 2005-10-26 비오이 하이디스 테크놀로지 주식회사 액정 셀 및 카세트 정렬 장치
KR100564544B1 (ko) * 1999-01-14 2006-03-28 삼성전자주식회사 웨이퍼 적재용 보트
JP4577603B2 (ja) * 2001-09-20 2010-11-10 株式会社安川電機 薄状物体の収納容器
JP4642610B2 (ja) * 2005-09-05 2011-03-02 東京エレクトロン株式会社 基板位置合わせ装置および基板収容ユニット
JP5532796B2 (ja) * 2009-09-29 2014-06-25 凸版印刷株式会社 ガラス基板収納用トレイ
JP2012015530A (ja) * 2011-07-25 2012-01-19 Hitachi Kokusai Electric Inc 基板処理装置および基板検出方法
KR101416978B1 (ko) * 2012-12-28 2014-07-09 주식회사 선익시스템 기판 상하역장치 및 인라인 증착 시스템
KR102325657B1 (ko) * 2017-08-09 2021-11-12 미라이얼 가부시키가이샤 기판 수납 용기

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100672634B1 (ko) * 2001-12-19 2007-02-09 엘지.필립스 엘시디 주식회사 액정표시소자의 기판 반송 장치 및 방법
US7790052B2 (en) 2001-12-19 2010-09-07 Lg Display Co., Ltd. Substrate receiving method
KR100807035B1 (ko) 2006-02-28 2008-02-25 다이니폰 스크린 세이조우 가부시키가이샤 기판 처리 장치 및 승강 장치
KR101425542B1 (ko) * 2008-06-13 2014-08-06 한미반도체 주식회사 메모리카드 가공장치

Also Published As

Publication number Publication date
JPH08288368A (ja) 1996-11-01
TW297911B (zh) 1997-02-11
KR960039106A (ko) 1996-11-21

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