JPH0810187Y2 - ダイボンディング装置 - Google Patents

ダイボンディング装置

Info

Publication number
JPH0810187Y2
JPH0810187Y2 JP9207489U JP9207489U JPH0810187Y2 JP H0810187 Y2 JPH0810187 Y2 JP H0810187Y2 JP 9207489 U JP9207489 U JP 9207489U JP 9207489 U JP9207489 U JP 9207489U JP H0810187 Y2 JPH0810187 Y2 JP H0810187Y2
Authority
JP
Japan
Prior art keywords
semiconductor element
die
stem
die bonding
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9207489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332421U (enrdf_load_stackoverflow
Inventor
正一 平
英治 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP9207489U priority Critical patent/JPH0810187Y2/ja
Publication of JPH0332421U publication Critical patent/JPH0332421U/ja
Application granted granted Critical
Publication of JPH0810187Y2 publication Critical patent/JPH0810187Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Die Bonding (AREA)
JP9207489U 1989-08-04 1989-08-04 ダイボンディング装置 Expired - Lifetime JPH0810187Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9207489U JPH0810187Y2 (ja) 1989-08-04 1989-08-04 ダイボンディング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9207489U JPH0810187Y2 (ja) 1989-08-04 1989-08-04 ダイボンディング装置

Publications (2)

Publication Number Publication Date
JPH0332421U JPH0332421U (enrdf_load_stackoverflow) 1991-03-29
JPH0810187Y2 true JPH0810187Y2 (ja) 1996-03-27

Family

ID=31641520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9207489U Expired - Lifetime JPH0810187Y2 (ja) 1989-08-04 1989-08-04 ダイボンディング装置

Country Status (1)

Country Link
JP (1) JPH0810187Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0332421U (enrdf_load_stackoverflow) 1991-03-29

Similar Documents

Publication Publication Date Title
EP0657917A1 (en) Wire bonding apparatus
KR101132141B1 (ko) 다이 픽업위치 보정방법
JPH0810187Y2 (ja) ダイボンディング装置
JPH09115943A (ja) ワイヤボンディング方法及びその装置
JPH05347326A (ja) ワイヤボンディング装置におけるキャピラリのセッティング方法
JPS6120345A (ja) ボンディング方法およびボンディング装置
JP4312677B2 (ja) ボンディング装置
JP3128163B2 (ja) ワイヤボンディング方法
JPH0563098B2 (enrdf_load_stackoverflow)
JPH05102235A (ja) ワイヤボンデイング方法
JP2507013Y2 (ja) ワイヤ―ボンディング装置
JPH09330945A (ja) 半導体装置の製造方法
JPH08316259A (ja) 半導体製品のワイヤボンディング方法および装置
JP2805912B2 (ja) 半導体素子認識補正方法
JP2535648B2 (ja) ワイヤボンディング装置
JP3320614B2 (ja) ボンディング方法およびボンディング装置
JP2002151527A (ja) ダイボンド精度自動補正システム
JPH02205039A (ja) 半導体ペレットマウント方法
JPH01241138A (ja) 半導体装置のワイヤボンディング方法
JP3152755B2 (ja) ワイヤボンディング装置
JP2792285B2 (ja) 半導体装置の製造方法
JPH0433349A (ja) ボンディング方法及び装置
JPS63236340A (ja) ワイヤボンデイング装置
JPH05129800A (ja) 部品実装装置
JPH04372142A (ja) ワイヤボンディング装置

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term