JPH0754997Y2 - フォトレジスト塗布装置 - Google Patents

フォトレジスト塗布装置

Info

Publication number
JPH0754997Y2
JPH0754997Y2 JP1989117009U JP11700989U JPH0754997Y2 JP H0754997 Y2 JPH0754997 Y2 JP H0754997Y2 JP 1989117009 U JP1989117009 U JP 1989117009U JP 11700989 U JP11700989 U JP 11700989U JP H0754997 Y2 JPH0754997 Y2 JP H0754997Y2
Authority
JP
Japan
Prior art keywords
substrate
photoresist
spin table
spin
photoresist coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989117009U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356128U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
英樹 鎌田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Casio Computer Co Ltd
Original Assignee
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Casio Computer Co Ltd filed Critical Casio Computer Co Ltd
Priority to JP1989117009U priority Critical patent/JPH0754997Y2/ja
Publication of JPH0356128U publication Critical patent/JPH0356128U/ja
Application granted granted Critical
Publication of JPH0754997Y2 publication Critical patent/JPH0754997Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1989117009U 1989-10-04 1989-10-04 フォトレジスト塗布装置 Expired - Lifetime JPH0754997Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989117009U JPH0754997Y2 (ja) 1989-10-04 1989-10-04 フォトレジスト塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989117009U JPH0754997Y2 (ja) 1989-10-04 1989-10-04 フォトレジスト塗布装置

Publications (2)

Publication Number Publication Date
JPH0356128U JPH0356128U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-30
JPH0754997Y2 true JPH0754997Y2 (ja) 1995-12-18

Family

ID=31665260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989117009U Expired - Lifetime JPH0754997Y2 (ja) 1989-10-04 1989-10-04 フォトレジスト塗布装置

Country Status (1)

Country Link
JP (1) JPH0754997Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52144971A (en) * 1976-05-28 1977-12-02 Hitachi Ltd Spin coating device
JPS54173669U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-05-26 1979-12-07
JPS59104650A (ja) * 1982-12-07 1984-06-16 Toshiba Corp レジスト膜形成装置
JPS59189235U (ja) * 1983-05-31 1984-12-15 日本電気ホームエレクトロニクス株式会社 塗膜装置

Also Published As

Publication number Publication date
JPH0356128U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-30

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