JPH0745562Y2 - スパッタリング装置 - Google Patents
スパッタリング装置Info
- Publication number
- JPH0745562Y2 JPH0745562Y2 JP1988059931U JP5993188U JPH0745562Y2 JP H0745562 Y2 JPH0745562 Y2 JP H0745562Y2 JP 1988059931 U JP1988059931 U JP 1988059931U JP 5993188 U JP5993188 U JP 5993188U JP H0745562 Y2 JPH0745562 Y2 JP H0745562Y2
- Authority
- JP
- Japan
- Prior art keywords
- gallium
- lower electrode
- electrode
- melting point
- low melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988059931U JPH0745562Y2 (ja) | 1988-05-06 | 1988-05-06 | スパッタリング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988059931U JPH0745562Y2 (ja) | 1988-05-06 | 1988-05-06 | スパッタリング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01164757U JPH01164757U (ko) | 1989-11-17 |
JPH0745562Y2 true JPH0745562Y2 (ja) | 1995-10-18 |
Family
ID=31285665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988059931U Expired - Lifetime JPH0745562Y2 (ja) | 1988-05-06 | 1988-05-06 | スパッタリング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0745562Y2 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4979442B2 (ja) * | 2007-04-10 | 2012-07-18 | 昭和電工株式会社 | Gaスパッタターゲットの製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5323881A (en) * | 1976-08-18 | 1978-03-04 | Ulvac Corp | High speed sputtering apparatus |
JPS54143780A (en) * | 1978-05-01 | 1979-11-09 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of semiconductor sputtering target |
JPS61257472A (ja) * | 1985-05-07 | 1986-11-14 | Mitsubishi Electric Corp | スパツタリング装置 |
JPS6357763A (ja) * | 1986-08-27 | 1988-03-12 | Mitsui Eng & Shipbuild Co Ltd | タ−ゲツト及びその製造方法 |
-
1988
- 1988-05-06 JP JP1988059931U patent/JPH0745562Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01164757U (ko) | 1989-11-17 |
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