JPH0737315Y2 - 熱処理装置の基板搬送装置 - Google Patents
熱処理装置の基板搬送装置Info
- Publication number
- JPH0737315Y2 JPH0737315Y2 JP40312190U JP40312190U JPH0737315Y2 JP H0737315 Y2 JPH0737315 Y2 JP H0737315Y2 JP 40312190 U JP40312190 U JP 40312190U JP 40312190 U JP40312190 U JP 40312190U JP H0737315 Y2 JPH0737315 Y2 JP H0737315Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- claw
- transfer
- heat treatment
- movable frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 137
- 238000010438 heat treatment Methods 0.000 title claims description 61
- 210000000078 claw Anatomy 0.000 claims description 93
- 238000011109 contamination Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 241000587161 Gomphocarpus Species 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40312190U JPH0737315Y2 (ja) | 1990-12-11 | 1990-12-11 | 熱処理装置の基板搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40312190U JPH0737315Y2 (ja) | 1990-12-11 | 1990-12-11 | 熱処理装置の基板搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0488044U JPH0488044U (enrdf_load_html_response) | 1992-07-30 |
| JPH0737315Y2 true JPH0737315Y2 (ja) | 1995-08-23 |
Family
ID=31880950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40312190U Expired - Lifetime JPH0737315Y2 (ja) | 1990-12-11 | 1990-12-11 | 熱処理装置の基板搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737315Y2 (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025048612A1 (ko) * | 2023-08-30 | 2025-03-06 | 주식회사 야스 | 증착 시스템의 기판 핸들링 시스템 |
-
1990
- 1990-12-11 JP JP40312190U patent/JPH0737315Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025048612A1 (ko) * | 2023-08-30 | 2025-03-06 | 주식회사 야스 | 증착 시스템의 기판 핸들링 시스템 |
| KR20250032303A (ko) * | 2023-08-30 | 2025-03-07 | 주식회사 야스 | 증착 시스템의 기판 핸들링 시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0488044U (enrdf_load_html_response) | 1992-07-30 |
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