JPH0488044U - - Google Patents

Info

Publication number
JPH0488044U
JPH0488044U JP40312190U JP40312190U JPH0488044U JP H0488044 U JPH0488044 U JP H0488044U JP 40312190 U JP40312190 U JP 40312190U JP 40312190 U JP40312190 U JP 40312190U JP H0488044 U JPH0488044 U JP H0488044U
Authority
JP
Japan
Prior art keywords
steel rod
outer cylinder
rod damper
cylinder
circumferential surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40312190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0737315Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP40312190U priority Critical patent/JPH0737315Y2/ja
Publication of JPH0488044U publication Critical patent/JPH0488044U/ja
Application granted granted Critical
Publication of JPH0737315Y2 publication Critical patent/JPH0737315Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP40312190U 1990-12-11 1990-12-11 熱処理装置の基板搬送装置 Expired - Lifetime JPH0737315Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40312190U JPH0737315Y2 (ja) 1990-12-11 1990-12-11 熱処理装置の基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40312190U JPH0737315Y2 (ja) 1990-12-11 1990-12-11 熱処理装置の基板搬送装置

Publications (2)

Publication Number Publication Date
JPH0488044U true JPH0488044U (enrdf_load_html_response) 1992-07-30
JPH0737315Y2 JPH0737315Y2 (ja) 1995-08-23

Family

ID=31880950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40312190U Expired - Lifetime JPH0737315Y2 (ja) 1990-12-11 1990-12-11 熱処理装置の基板搬送装置

Country Status (1)

Country Link
JP (1) JPH0737315Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102834790B1 (ko) * 2023-08-30 2025-07-17 주식회사 야스 증착 시스템의 기판 핸들링 시스템

Also Published As

Publication number Publication date
JPH0737315Y2 (ja) 1995-08-23

Similar Documents

Publication Publication Date Title
JPH0488044U (enrdf_load_html_response)
JPH0288044U (enrdf_load_html_response)
JPH0223029U (enrdf_load_html_response)
JPH02101143U (enrdf_load_html_response)
JPS6362558U (enrdf_load_html_response)
JPS6364571U (enrdf_load_html_response)
JPS6276071U (enrdf_load_html_response)
JPH0234845U (enrdf_load_html_response)
JPS61101177U (enrdf_load_html_response)
JPH0324542U (enrdf_load_html_response)
JPH025627U (enrdf_load_html_response)
JPS6425542U (enrdf_load_html_response)
JPS6390040U (enrdf_load_html_response)
JPS6286214U (enrdf_load_html_response)
JPS63171549U (enrdf_load_html_response)
JPH049871U (enrdf_load_html_response)
JPS61139325U (enrdf_load_html_response)
JPS647605U (enrdf_load_html_response)
JPS6211539U (enrdf_load_html_response)
JPH0332229U (enrdf_load_html_response)
JPS62124145U (enrdf_load_html_response)
JPS63182335U (enrdf_load_html_response)
JPH0314338U (enrdf_load_html_response)
JPS62160961U (enrdf_load_html_response)
JPS6282286U (enrdf_load_html_response)