JPH073640Y2 - 加熱ランプ付搬送室 - Google Patents

加熱ランプ付搬送室

Info

Publication number
JPH073640Y2
JPH073640Y2 JP1989147348U JP14734889U JPH073640Y2 JP H073640 Y2 JPH073640 Y2 JP H073640Y2 JP 1989147348 U JP1989147348 U JP 1989147348U JP 14734889 U JP14734889 U JP 14734889U JP H073640 Y2 JPH073640 Y2 JP H073640Y2
Authority
JP
Japan
Prior art keywords
substrate
heating lamp
transfer chamber
chamber
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989147348U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0385634U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
裕一 石川
英一郎 四宮
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP1989147348U priority Critical patent/JPH073640Y2/ja
Publication of JPH0385634U publication Critical patent/JPH0385634U/ja
Application granted granted Critical
Publication of JPH073640Y2 publication Critical patent/JPH073640Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1989147348U 1989-12-20 1989-12-20 加熱ランプ付搬送室 Expired - Lifetime JPH073640Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989147348U JPH073640Y2 (ja) 1989-12-20 1989-12-20 加熱ランプ付搬送室

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989147348U JPH073640Y2 (ja) 1989-12-20 1989-12-20 加熱ランプ付搬送室

Publications (2)

Publication Number Publication Date
JPH0385634U JPH0385634U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-29
JPH073640Y2 true JPH073640Y2 (ja) 1995-01-30

Family

ID=31693868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989147348U Expired - Lifetime JPH073640Y2 (ja) 1989-12-20 1989-12-20 加熱ランプ付搬送室

Country Status (1)

Country Link
JP (1) JPH073640Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109309037A (zh) * 2018-08-30 2019-02-05 陈凯辉 一种同时支持多个半导体材料加工设备的自动传送系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074633A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd ロ−ドロツク装置の試料加熱方法
US4584045A (en) * 1984-02-21 1986-04-22 Plasma-Therm, Inc. Apparatus for conveying a semiconductor wafer
JPS611017A (ja) * 1984-06-13 1986-01-07 Kokusai Electric Co Ltd 半導体基板の熱処理装置
JPS62106637A (ja) * 1985-11-05 1987-05-18 Hitachi Ltd 半導体製造装置

Also Published As

Publication number Publication date
JPH0385634U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term