JPH0730693Y2 - シリコン単結晶引上げ用石英ルツボ - Google Patents
シリコン単結晶引上げ用石英ルツボInfo
- Publication number
- JPH0730693Y2 JPH0730693Y2 JP1989125066U JP12506689U JPH0730693Y2 JP H0730693 Y2 JPH0730693 Y2 JP H0730693Y2 JP 1989125066 U JP1989125066 U JP 1989125066U JP 12506689 U JP12506689 U JP 12506689U JP H0730693 Y2 JPH0730693 Y2 JP H0730693Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- inclined surface
- single crystal
- silicon single
- quartz crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010453 quartz Substances 0.000 title claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 12
- 229910052710 silicon Inorganic materials 0.000 title claims description 12
- 239000010703 silicon Substances 0.000 title claims description 12
- 239000013078 crystal Substances 0.000 title claims description 11
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 238000001556 precipitation Methods 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000155 melt Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989125066U JPH0730693Y2 (ja) | 1989-10-27 | 1989-10-27 | シリコン単結晶引上げ用石英ルツボ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989125066U JPH0730693Y2 (ja) | 1989-10-27 | 1989-10-27 | シリコン単結晶引上げ用石英ルツボ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0363581U JPH0363581U (enrdf_load_stackoverflow) | 1991-06-20 |
| JPH0730693Y2 true JPH0730693Y2 (ja) | 1995-07-12 |
Family
ID=31672952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989125066U Expired - Fee Related JPH0730693Y2 (ja) | 1989-10-27 | 1989-10-27 | シリコン単結晶引上げ用石英ルツボ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0730693Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008002668A (ja) * | 2006-06-26 | 2008-01-10 | Kurabo Ind Ltd | 真空断熱材 |
| JP6770721B2 (ja) * | 2015-12-21 | 2020-10-21 | 株式会社Sumco | シリカガラスルツボ、シリカガラスルツボの製造方法およびシリコン単結晶の引き上げ装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5345318A (en) * | 1976-10-06 | 1978-04-24 | Toshiba Ceramics Co | Process and apparatus for preparing glass vessel and the like of high silica content |
| JPH0616926Y2 (ja) * | 1986-02-05 | 1994-05-02 | 信越石英株式会社 | 単結晶引き上げ用石英ガラスルツボ |
| JPS63319288A (ja) * | 1987-06-23 | 1988-12-27 | Shin Etsu Handotai Co Ltd | 鍔付石英るつぼ |
-
1989
- 1989-10-27 JP JP1989125066U patent/JPH0730693Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0363581U (enrdf_load_stackoverflow) | 1991-06-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |