JPH0243718B2 - - Google Patents
Info
- Publication number
- JPH0243718B2 JPH0243718B2 JP57171212A JP17121282A JPH0243718B2 JP H0243718 B2 JPH0243718 B2 JP H0243718B2 JP 57171212 A JP57171212 A JP 57171212A JP 17121282 A JP17121282 A JP 17121282A JP H0243718 B2 JPH0243718 B2 JP H0243718B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- melt
- crystal
- partition wall
- thermal convection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17121282A JPS5964590A (ja) | 1982-09-30 | 1982-09-30 | 結晶成長用坩堝 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17121282A JPS5964590A (ja) | 1982-09-30 | 1982-09-30 | 結晶成長用坩堝 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5964590A JPS5964590A (ja) | 1984-04-12 |
JPH0243718B2 true JPH0243718B2 (enrdf_load_stackoverflow) | 1990-10-01 |
Family
ID=15919110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17121282A Granted JPS5964590A (ja) | 1982-09-30 | 1982-09-30 | 結晶成長用坩堝 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5964590A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0925192A (ja) * | 1995-07-07 | 1997-01-28 | Nec Corp | 単結晶育成用るつぼおよび単結晶育成法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5891097A (ja) * | 1981-11-24 | 1983-05-30 | Hitachi Ltd | 単結晶製造装置 |
-
1982
- 1982-09-30 JP JP17121282A patent/JPS5964590A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5964590A (ja) | 1984-04-12 |
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