JPH0719136Y2 - シリンダ型気相成長装置 - Google Patents

シリンダ型気相成長装置

Info

Publication number
JPH0719136Y2
JPH0719136Y2 JP1985038159U JP3815985U JPH0719136Y2 JP H0719136 Y2 JPH0719136 Y2 JP H0719136Y2 JP 1985038159 U JP1985038159 U JP 1985038159U JP 3815985 U JP3815985 U JP 3815985U JP H0719136 Y2 JPH0719136 Y2 JP H0719136Y2
Authority
JP
Japan
Prior art keywords
reaction chamber
vapor phase
phase growth
rotary drive
cylinder type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985038159U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61156229U (enExample
Inventor
泰山 後藤
功 関谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP1985038159U priority Critical patent/JPH0719136Y2/ja
Publication of JPS61156229U publication Critical patent/JPS61156229U/ja
Application granted granted Critical
Publication of JPH0719136Y2 publication Critical patent/JPH0719136Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985038159U 1985-03-15 1985-03-15 シリンダ型気相成長装置 Expired - Lifetime JPH0719136Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985038159U JPH0719136Y2 (ja) 1985-03-15 1985-03-15 シリンダ型気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985038159U JPH0719136Y2 (ja) 1985-03-15 1985-03-15 シリンダ型気相成長装置

Publications (2)

Publication Number Publication Date
JPS61156229U JPS61156229U (enExample) 1986-09-27
JPH0719136Y2 true JPH0719136Y2 (ja) 1995-05-01

Family

ID=30544905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985038159U Expired - Lifetime JPH0719136Y2 (ja) 1985-03-15 1985-03-15 シリンダ型気相成長装置

Country Status (1)

Country Link
JP (1) JPH0719136Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0528755Y2 (enExample) * 1986-06-24 1993-07-23
JP2785614B2 (ja) * 1992-09-28 1998-08-13 信越半導体株式会社 シリンダー型エピタキシャル層成長装置

Also Published As

Publication number Publication date
JPS61156229U (enExample) 1986-09-27

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