JPH0711469Y2 - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPH0711469Y2
JPH0711469Y2 JP1559788U JP1559788U JPH0711469Y2 JP H0711469 Y2 JPH0711469 Y2 JP H0711469Y2 JP 1559788 U JP1559788 U JP 1559788U JP 1559788 U JP1559788 U JP 1559788U JP H0711469 Y2 JPH0711469 Y2 JP H0711469Y2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
semiconductor
supporting device
supporting
organic resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1559788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01120339U (OSRAM
Inventor
正典 小林
信夫 庭山
清一郎 山口
腕 鈴木
浩康 日高
邦彦 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1559788U priority Critical patent/JPH0711469Y2/ja
Publication of JPH01120339U publication Critical patent/JPH01120339U/ja
Application granted granted Critical
Publication of JPH0711469Y2 publication Critical patent/JPH0711469Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1559788U 1988-02-08 1988-02-08 半導体製造装置 Expired - Lifetime JPH0711469Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1559788U JPH0711469Y2 (ja) 1988-02-08 1988-02-08 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1559788U JPH0711469Y2 (ja) 1988-02-08 1988-02-08 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH01120339U JPH01120339U (OSRAM) 1989-08-15
JPH0711469Y2 true JPH0711469Y2 (ja) 1995-03-15

Family

ID=31227781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1559788U Expired - Lifetime JPH0711469Y2 (ja) 1988-02-08 1988-02-08 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH0711469Y2 (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650981Y2 (ja) * 1989-12-13 1994-12-21 信越ポリマー株式会社 ディスク洗浄用バスケット
JP5569190B2 (ja) * 2010-06-30 2014-08-13 株式会社Ｓｕｍｃｏ ウェーハチャージ補助台

Also Published As

Publication number Publication date
JPH01120339U (OSRAM) 1989-08-15

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