JPH01120339U - - Google Patents
Info
- Publication number
- JPH01120339U JPH01120339U JP1559788U JP1559788U JPH01120339U JP H01120339 U JPH01120339 U JP H01120339U JP 1559788 U JP1559788 U JP 1559788U JP 1559788 U JP1559788 U JP 1559788U JP H01120339 U JPH01120339 U JP H01120339U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- semiconductor
- support device
- supported
- organic resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims 3
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1559788U JPH0711469Y2 (ja) | 1988-02-08 | 1988-02-08 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1559788U JPH0711469Y2 (ja) | 1988-02-08 | 1988-02-08 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01120339U true JPH01120339U (OSRAM) | 1989-08-15 |
| JPH0711469Y2 JPH0711469Y2 (ja) | 1995-03-15 |
Family
ID=31227781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1559788U Expired - Lifetime JPH0711469Y2 (ja) | 1988-02-08 | 1988-02-08 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0711469Y2 (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0381628U (OSRAM) * | 1989-12-13 | 1991-08-21 | ||
| JP2012015327A (ja) * | 2010-06-30 | 2012-01-19 | Sumco Corp | ウェーハチャージ補助台 |
-
1988
- 1988-02-08 JP JP1559788U patent/JPH0711469Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0381628U (OSRAM) * | 1989-12-13 | 1991-08-21 | ||
| JP2012015327A (ja) * | 2010-06-30 | 2012-01-19 | Sumco Corp | ウェーハチャージ補助台 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0711469Y2 (ja) | 1995-03-15 |