JPS61156232U - - Google Patents
Info
- Publication number
- JPS61156232U JPS61156232U JP3943485U JP3943485U JPS61156232U JP S61156232 U JPS61156232 U JP S61156232U JP 3943485 U JP3943485 U JP 3943485U JP 3943485 U JP3943485 U JP 3943485U JP S61156232 U JPS61156232 U JP S61156232U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- utility
- processing
- quartz plate
- sandblasted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3943485U JPS61156232U (OSRAM) | 1985-03-19 | 1985-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3943485U JPS61156232U (OSRAM) | 1985-03-19 | 1985-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61156232U true JPS61156232U (OSRAM) | 1986-09-27 |
Family
ID=30547373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3943485U Pending JPS61156232U (OSRAM) | 1985-03-19 | 1985-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61156232U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08102447A (ja) * | 1994-09-30 | 1996-04-16 | Shin Etsu Handotai Co Ltd | 半導体熱処理用の石英ガラス治具とその製造方法 |
-
1985
- 1985-03-19 JP JP3943485U patent/JPS61156232U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08102447A (ja) * | 1994-09-30 | 1996-04-16 | Shin Etsu Handotai Co Ltd | 半導体熱処理用の石英ガラス治具とその製造方法 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH02135141U (OSRAM) | ||
| JPS61156232U (OSRAM) | ||
| JPH02141860U (OSRAM) | ||
| JPS6032361U (ja) | 真空蒸着装置に於けるるつぼ交換装置 | |
| JPH0247029U (OSRAM) | ||
| JPH02122431U (OSRAM) | ||
| JPS58155364U (ja) | 化学蒸着法による中空体製造用治具 | |
| JPH0350324U (OSRAM) | ||
| JPS63153537U (OSRAM) | ||
| JPS62182540U (OSRAM) | ||
| JPS6450438U (OSRAM) | ||
| JPH02132940U (OSRAM) | ||
| JPS6298227U (OSRAM) | ||
| JPS6331369U (OSRAM) | ||
| JPS6266771U (OSRAM) | ||
| JPS61186154U (OSRAM) | ||
| JPS6265827U (OSRAM) | ||
| JPS61183967U (OSRAM) | ||
| JPS6292646U (OSRAM) | ||
| JPS61169358U (OSRAM) | ||
| JPS55115347A (en) | Semiconductor device | |
| JPS61158946U (OSRAM) | ||
| JPS583033U (ja) | ウエハ−洗浄装置 | |
| JPS6272382U (OSRAM) | ||
| JPS62163784U (OSRAM) |