JPH01121921U - - Google Patents
Info
- Publication number
- JPH01121921U JPH01121921U JP1664688U JP1664688U JPH01121921U JP H01121921 U JPH01121921 U JP H01121921U JP 1664688 U JP1664688 U JP 1664688U JP 1664688 U JP1664688 U JP 1664688U JP H01121921 U JPH01121921 U JP H01121921U
- Authority
- JP
- Japan
- Prior art keywords
- support substrate
- susceptor
- insulating thin
- thin plate
- upper insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 241000239290 Araneae Species 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1664688U JPH01121921U (OSRAM) | 1988-02-10 | 1988-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1664688U JPH01121921U (OSRAM) | 1988-02-10 | 1988-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01121921U true JPH01121921U (OSRAM) | 1989-08-18 |
Family
ID=31229758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1664688U Pending JPH01121921U (OSRAM) | 1988-02-10 | 1988-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01121921U (OSRAM) |
-
1988
- 1988-02-10 JP JP1664688U patent/JPH01121921U/ja active Pending