JPH069152U - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPH069152U JPH069152U JP046162U JP4616292U JPH069152U JP H069152 U JPH069152 U JP H069152U JP 046162 U JP046162 U JP 046162U JP 4616292 U JP4616292 U JP 4616292U JP H069152 U JPH069152 U JP H069152U
- Authority
- JP
- Japan
- Prior art keywords
- lead frame
- semiconductor element
- semiconductor device
- bonding
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05556—Shape in side view
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48257—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a die pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/4917—Crossed wires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
(57)【要約】
【目的】 半導体装置において、ボンディングワイヤど
うしの接触に起因するデバイス不良を防止させる。 【構成】 リードフレーム1上に搭載される半導体素子
3と、前記リードフレーム1の端部に形成される外部と
の接続用端子4と、前記半導体素子3の電極と前記接続
用端子4とを電気的に接続するボンディングワイヤ5と
を有し、少なくとも、前記半導体素子3及びボンディン
グワイヤ5が樹脂封止されて成る半導体装置において、
前記リードフレーム1上に絶縁物6を介して搭載される
ボンディングパッド7を形成することを特徴とする。
うしの接触に起因するデバイス不良を防止させる。 【構成】 リードフレーム1上に搭載される半導体素子
3と、前記リードフレーム1の端部に形成される外部と
の接続用端子4と、前記半導体素子3の電極と前記接続
用端子4とを電気的に接続するボンディングワイヤ5と
を有し、少なくとも、前記半導体素子3及びボンディン
グワイヤ5が樹脂封止されて成る半導体装置において、
前記リードフレーム1上に絶縁物6を介して搭載される
ボンディングパッド7を形成することを特徴とする。
Description
【0001】
本考案は、リードフレーム上に配置された半導体素子が樹脂封止されてなる半 導体装置に関する。
【0002】
従来例による半導体装置について図3、図4及び図5に従って説明する。図3 は従来例であるリードフレームを利用した半導体装置の構造図であり、図4は図 3に示す従来例におけるリードフレームの断面図(a)及び平面図(b)であり 、図5は図3の構造のものを絶縁樹脂により封止した半導体装置の断面図(a) 及び平面図(b)出ある。
【0003】 図3に示すように、銅材等のリードフレーム1上に絶縁ペースト2を介して搭 載される半導体素子3と前記リードフレーム1の端部に外部との接続用端子4を 形成し、前記半導体素子3と前記接続端子4とがボンディングワイヤ5により電 気的に接続され、図5に示すように、絶縁樹脂8により封止する。
【0004】
従来の半導体装置において、前記半導体装置の端子配置及び半導体素子の電極 配置等により、半導体素子と接続用端子とをボンディングワイヤにより接続する 際に、ボンディングワイヤどうしが交差しなければならない場合に、絶縁樹脂封 止を行なう時に樹脂の流れる圧力によりボンディングワイヤが流れ、ボンディン グワイヤどうしが接触し、デバイス不良となる可能性がある。
【0005】 本考案は、上記問題点を解決することを目的とするものである。
【0006】
リードフレーム上に搭載される半導体素子と、前記リードフレームの端部に形 成される外部との接続用端子と、前記半導体素子の電極と前記接続用端子とを電 気的に接続するボンディングワイヤとを有し、少なくとも、前記半導体素子及び ボンディングワイヤが樹脂封止されて成る半導体装置において、前記リードフレ ーム上に絶縁物を介して搭載されるボンディングパッドを設けたことを特徴とす る。
【0007】
リードフレーム上に絶縁物を介して搭載されるボンディングパッドを設けたこ とにより、交差するボンディングワイヤの一方を半導体素子の電極から上記ボン ディングパッドを経てリードフレームの接続用端子に接続することができ、ボン ディングワイヤどうしの交差をなくすことができる。このため、絶縁樹脂封止を 行なう際に樹脂の流れる圧力によりボンディングワイヤが流れ、ボンディングワ イヤどうしが接触することによるデバイス不良を防ぐことができる。
【0008】
本考案の一実施例を図1及び図2に従って説明する。図1は本実施例によるリ ードフレームを利用した半導体装置の構造を説明する図であり、図2は図1の実 施例に示すリードフレームの断面図(a)及び平面図(b)である。
【0009】 図1に示すように、リードフレーム1上に絶縁ペースト2を介して搭載される 半導体素子3と、前記リードフレーム1の端部に外部との接続用端子4を形成し 、前記半導体素子3と接続用端子4とをボンディングワイヤ5により電気的に接 続する。この際に、交差するボンディングワイヤ5の一方を前記リードフレーム 1上に絶縁物6を介して搭載されるボンディングパッド7を経て接続用端子4と 接続することにより、ボンディングワイヤ5どうしの交差をなくすことができる 。また、絶縁樹脂封止(図示せず)を行う際に、樹脂の流れる圧力によりボンデ ィングワイヤ5が流れ、ボンディングワイヤ5どうしが接触することを防ぐこと ができる。
【0010】 尚、交差するボンディングワイヤの組が2以上の場合は、前記ボンディングパ ッドを必要に応じて増加させ、ボンディングワイヤどうしの交差をなくすと良い 。
【0011】
以上のように本考案によれば、半導体装置において、リードフレーム上に絶縁 物を介して搭載されるボンディングパッドを設けたことにより、ボンディングワ イヤどうしの交差をなくすことができる。そして、このことにより、絶縁樹脂封 止を行なう際にボンディングワイヤどうしが接触することによるデバイス不良を 防ぐことができる。
【図1】本考案の一実施例を示す半導体装置の構造を説
明する図である。
明する図である。
【図2】図1に示す実施例におけるリードフレームの断
面図(a)及び平面図(b)である。
面図(a)及び平面図(b)である。
【図3】従来例の半導体装置の構造を説明する図であ
る。
る。
【図4】図3に示す従来例におけるリードフレームの断
面図(a)及び平面図(b)である。
面図(a)及び平面図(b)である。
【図5】図3に示す構造に絶縁樹脂封止した断面図
(a)及び平面図(b)である。
(a)及び平面図(b)である。
1 リードフレーム 2 絶縁ペースト 3 半導体素子 4 接続用端子 5 ボンディングワイヤ 6 絶縁物 7 ボンディングパッド 8 絶縁樹脂
Claims (1)
- 【請求項1】 リードフレーム上に搭載される半導体素
子と、前記リードフレームの端部に形成される外部との
接続用端子と、前記半導体素子の電極と前記接続用端子
とを電気的に接続するボンディングワイヤとを有し、少
なくとも、前記半導体素子及びボンディングワイヤが樹
脂封止されて成る半導体装置において、前記リードフレ
ーム上に絶縁物を介して搭載されるボンディングパッド
を設けたことを特徴とする半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP046162U JPH069152U (ja) | 1992-07-02 | 1992-07-02 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP046162U JPH069152U (ja) | 1992-07-02 | 1992-07-02 | 半導体装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH069152U true JPH069152U (ja) | 1994-02-04 |
Family
ID=12739324
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP046162U Pending JPH069152U (ja) | 1992-07-02 | 1992-07-02 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH069152U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007088453A (ja) * | 2005-09-23 | 2007-04-05 | Freescale Semiconductor Inc | スタックダイパッケージを製造する方法 |
-
1992
- 1992-07-02 JP JP046162U patent/JPH069152U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007088453A (ja) * | 2005-09-23 | 2007-04-05 | Freescale Semiconductor Inc | スタックダイパッケージを製造する方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH069152U (ja) | 半導体装置 | |
JPS628534A (ja) | 半導体実装構造 | |
JP2810626B2 (ja) | 半導体装置 | |
JP2561415Y2 (ja) | 半導体装置 | |
JPH0546280Y2 (ja) | ||
JPS6138193Y2 (ja) | ||
JPH01257361A (ja) | 樹脂封止型半導体装置 | |
JPH03248455A (ja) | リードフレーム | |
JPS59198744A (ja) | 樹脂封止型半導体装置 | |
JPS63283053A (ja) | 半導体装置のリ−ドフレ−ム | |
JPH0747872Y2 (ja) | 半導体装置 | |
JPH03129840A (ja) | 樹脂封止型半導体装置 | |
JPS60250659A (ja) | 複合形半導体装置 | |
JPH062713U (ja) | 樹脂封止型半導体装置 | |
JPH0645503A (ja) | 樹脂封止型半導体装置用リードフレーム | |
JPH0714657U (ja) | 半導体装置 | |
JPS61240644A (ja) | 半導体装置 | |
JPH02251161A (ja) | 半導体装置 | |
JPS61252654A (ja) | 樹脂封止型半導体装置 | |
JP2562773Y2 (ja) | 半導体集積回路素子 | |
JPH0362564A (ja) | 半導体装置 | |
JPH03198356A (ja) | 樹脂封止型半導体装置 | |
JPH04127659U (ja) | リードフレーム及びこれを利用した半導体装置 | |
JPS6039254U (ja) | 半導体集積回路装置 | |
JPS62183535A (ja) | 半導体装置 |