JPH0648851Y2 - ウェーハ立替機 - Google Patents

ウェーハ立替機

Info

Publication number
JPH0648851Y2
JPH0648851Y2 JP1989152355U JP15235589U JPH0648851Y2 JP H0648851 Y2 JPH0648851 Y2 JP H0648851Y2 JP 1989152355 U JP1989152355 U JP 1989152355U JP 15235589 U JP15235589 U JP 15235589U JP H0648851 Y2 JPH0648851 Y2 JP H0648851Y2
Authority
JP
Japan
Prior art keywords
wafer
holder
pusher
carrier
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989152355U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0390445U (enrdf_load_stackoverflow
Inventor
智之 松田
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP1989152355U priority Critical patent/JPH0648851Y2/ja
Publication of JPH0390445U publication Critical patent/JPH0390445U/ja
Application granted granted Critical
Publication of JPH0648851Y2 publication Critical patent/JPH0648851Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989152355U 1989-12-27 1989-12-27 ウェーハ立替機 Expired - Lifetime JPH0648851Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989152355U JPH0648851Y2 (ja) 1989-12-27 1989-12-27 ウェーハ立替機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989152355U JPH0648851Y2 (ja) 1989-12-27 1989-12-27 ウェーハ立替機

Publications (2)

Publication Number Publication Date
JPH0390445U JPH0390445U (enrdf_load_stackoverflow) 1991-09-13
JPH0648851Y2 true JPH0648851Y2 (ja) 1994-12-12

Family

ID=31698623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989152355U Expired - Lifetime JPH0648851Y2 (ja) 1989-12-27 1989-12-27 ウェーハ立替機

Country Status (1)

Country Link
JP (1) JPH0648851Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985341B2 (en) 2001-04-24 2006-01-10 Vlt, Inc. Components having actively controlled circuit elements
US7443229B1 (en) 2001-04-24 2008-10-28 Picor Corporation Active filtering

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61280630A (ja) * 1985-06-06 1986-12-11 Toshiba Corp 半導体ウエハ移送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985341B2 (en) 2001-04-24 2006-01-10 Vlt, Inc. Components having actively controlled circuit elements
US7443229B1 (en) 2001-04-24 2008-10-28 Picor Corporation Active filtering

Also Published As

Publication number Publication date
JPH0390445U (enrdf_load_stackoverflow) 1991-09-13

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