JPH06295840A - 多層セラミックキャパシタの製造方法 - Google Patents
多層セラミックキャパシタの製造方法Info
- Publication number
- JPH06295840A JPH06295840A JP5354494A JP35449493A JPH06295840A JP H06295840 A JPH06295840 A JP H06295840A JP 5354494 A JP5354494 A JP 5354494A JP 35449493 A JP35449493 A JP 35449493A JP H06295840 A JPH06295840 A JP H06295840A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- electrode
- mask
- film
- unpatterned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003985 ceramic capacitor Substances 0.000 title abstract description 14
- 238000004519 manufacturing process Methods 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 59
- 239000000843 powder Substances 0.000 claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 24
- 239000006185 dispersion Substances 0.000 claims description 17
- 239000003990 capacitor Substances 0.000 claims description 15
- 238000001035 drying Methods 0.000 claims description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 9
- 239000002904 solvent Substances 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 6
- 238000007766 curtain coating Methods 0.000 claims description 5
- 238000007650 screen-printing Methods 0.000 claims description 5
- 238000010345 tape casting Methods 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 4
- 238000003490 calendering Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 3
- 230000003319 supportive effect Effects 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 claims description 2
- 229920000620 organic polymer Polymers 0.000 claims description 2
- 239000003960 organic solvent Substances 0.000 claims description 2
- 229920005596 polymer binder Polymers 0.000 claims description 2
- 239000002491 polymer binding agent Substances 0.000 claims description 2
- 239000002003 electrode paste Substances 0.000 abstract description 8
- 230000008569 process Effects 0.000 description 29
- 239000010408 film Substances 0.000 description 20
- 229920005989 resin Polymers 0.000 description 17
- 239000011347 resin Substances 0.000 description 17
- 239000000203 mixture Substances 0.000 description 14
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 238000012546 transfer Methods 0.000 description 8
- 238000010304 firing Methods 0.000 description 7
- 238000009499 grossing Methods 0.000 description 7
- 238000007639 printing Methods 0.000 description 7
- 239000002002 slurry Substances 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- 238000005266 casting Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- MWKFXSUHUHTGQN-UHFFFAOYSA-N decan-1-ol Chemical compound CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 description 4
- 229910052500 inorganic mineral Inorganic materials 0.000 description 4
- 239000011707 mineral Substances 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- PZNPLUBHRSSFHT-RRHRGVEJSA-N 1-hexadecanoyl-2-octadecanoyl-sn-glycero-3-phosphocholine Chemical compound CCCCCCCCCCCCCCCCCC(=O)O[C@@H](COP([O-])(=O)OCC[N+](C)(C)C)COC(=O)CCCCCCCCCCCCCCC PZNPLUBHRSSFHT-RRHRGVEJSA-N 0.000 description 3
- 239000001856 Ethyl cellulose Substances 0.000 description 3
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000005054 agglomeration Methods 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 235000019325 ethyl cellulose Nutrition 0.000 description 3
- 229920001249 ethyl cellulose Polymers 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 239000008347 soybean phospholipid Substances 0.000 description 3
- 235000015096 spirit Nutrition 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 239000011267 electrode slurry Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000005329 float glass Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000012552 review Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- JLPULHDHAOZNQI-ZTIMHPMXSA-N 1-hexadecanoyl-2-(9Z,12Z-octadecadienoyl)-sn-glycero-3-phosphocholine Chemical compound CCCCCCCCCCCCCCCC(=O)OC[C@H](COP([O-])(=O)OCC[N+](C)(C)C)OC(=O)CCCCCCC\C=C/C\C=C/CCCCC JLPULHDHAOZNQI-ZTIMHPMXSA-N 0.000 description 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- VOPSYYWDGDGSQS-UHFFFAOYSA-N neodymium(3+);oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Ti+4].[Nd+3].[Nd+3] VOPSYYWDGDGSQS-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000006259 organic additive Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000518 rheometry Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229940083466 soybean lecithin Drugs 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US002991 | 1993-01-11 | ||
| US08/002,991 US5334411A (en) | 1993-01-11 | 1993-01-11 | Multilayer ceramic capacitor manufacturing process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06295840A true JPH06295840A (ja) | 1994-10-21 |
Family
ID=21703551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5354494A Pending JPH06295840A (ja) | 1993-01-11 | 1993-12-30 | 多層セラミックキャパシタの製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5334411A (enExample) |
| EP (1) | EP0606644B1 (enExample) |
| JP (1) | JPH06295840A (enExample) |
| KR (1) | KR940018885A (enExample) |
| CN (1) | CN1091855A (enExample) |
| DE (1) | DE69300518D1 (enExample) |
| TW (1) | TW255042B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007053210A (ja) * | 2005-08-17 | 2007-03-01 | Tdk Corp | セラミック電子部品の製造方法 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3330836B2 (ja) | 1997-01-22 | 2002-09-30 | 太陽誘電株式会社 | 積層電子部品の製造方法 |
| US6512666B1 (en) | 2001-08-21 | 2003-01-28 | Delware Capital Formation, Inc. | High current filter feed-through capacitor |
| WO2003023822A2 (en) * | 2001-09-07 | 2003-03-20 | Dearborn Electronics Inc | Film capacitor for high temperature applications |
| CN101506929B (zh) * | 2006-08-24 | 2012-01-18 | 第一毛织株式会社 | 平版印刷用电极组合物、制备电极的方法及等离子体显示屏 |
| CN101901841B (zh) * | 2009-05-31 | 2013-03-13 | 中芯国际集成电路制造(上海)有限公司 | 一种电容器及其制造方法 |
| KR101976065B1 (ko) | 2011-05-11 | 2019-05-09 | 삼성디스플레이 주식회사 | 유기발광표시장치 및 이의 제조방법 |
| CN105551827B (zh) * | 2016-02-29 | 2018-03-16 | 西南大学 | 结合丝网印刷的层层组装柔性全固态超级电容器的制备方法 |
| DE102016105456A1 (de) | 2016-03-23 | 2017-09-28 | Epcos Ag | Verfahren zur Herstellung einer gasdichten Metall-Keramikverbindung und Verwendung der gasdichten Metall-Keramikverbindung |
| US11491508B2 (en) | 2019-05-16 | 2022-11-08 | Dragonfly Energy Corp. | Systems and methods for dry powder coating layers of an electrochemical cell |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1196201A (en) * | 1967-09-19 | 1970-06-24 | Tokyo Shibaura Electric Co | A method of Printing Electrical Circuits onto Substrates |
| US3582729A (en) * | 1969-10-01 | 1971-06-01 | Gen Electric | Thick film capacitors and method of forming |
| US3889357A (en) * | 1973-07-05 | 1975-06-17 | Sprague Electric Co | Screen printed solid electrolytic capacitor |
| US5101319A (en) * | 1990-04-03 | 1992-03-31 | Vistatech Corporation | Pre-engineered electrode/dielectric composite film and related manufacturing process for multilayer ceramic chip capacitors |
| JP3289835B2 (ja) * | 1991-03-29 | 2002-06-10 | 株式会社村田製作所 | 積層セラミックコンデンサの製造方法 |
-
1993
- 1993-01-11 US US08/002,991 patent/US5334411A/en not_active Expired - Fee Related
- 1993-12-14 TW TW082110605A patent/TW255042B/zh active
- 1993-12-27 DE DE69300518T patent/DE69300518D1/de not_active Expired - Lifetime
- 1993-12-27 EP EP93120949A patent/EP0606644B1/en not_active Expired - Lifetime
- 1993-12-30 JP JP5354494A patent/JPH06295840A/ja active Pending
-
1994
- 1994-01-10 KR KR1019940000282A patent/KR940018885A/ko not_active Ceased
- 1994-01-11 CN CN94100829A patent/CN1091855A/zh active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007053210A (ja) * | 2005-08-17 | 2007-03-01 | Tdk Corp | セラミック電子部品の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1091855A (zh) | 1994-09-07 |
| EP0606644A1 (en) | 1994-07-20 |
| TW255042B (enExample) | 1995-08-21 |
| US5334411A (en) | 1994-08-02 |
| EP0606644B1 (en) | 1995-09-20 |
| DE69300518D1 (de) | 1995-10-26 |
| KR940018885A (ko) | 1994-08-19 |
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