JPH06252401A - Ｍｏｓトランジスタ - Google Patents

Ｍｏｓトランジスタ

Info

Publication number
JPH06252401A
JPH06252401A JP6018781A JP1878194A JPH06252401A JP H06252401 A JPH06252401 A JP H06252401A JP 6018781 A JP6018781 A JP 6018781A JP 1878194 A JP1878194 A JP 1878194A JP H06252401 A JPH06252401 A JP H06252401A
Authority
JP
Japan
Prior art keywords
gate electrode
region
semiconductor
drain
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6018781A
Other languages
English (en)
Japanese (ja)
Inventor
Nadia Lifshitz
リフシッツ ナディア
Serge Luryi
ルリイ サージ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Telephone and Telegraph Co Inc filed Critical American Telephone and Telegraph Co Inc
Publication of JPH06252401A publication Critical patent/JPH06252401A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737—Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • H10D30/6739—Conductor-insulator-semiconductor electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/671—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor having lateral variation in doping or structure

Landscapes

  • Thin Film Transistor (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
JP6018781A 1993-02-16 1994-02-16 Ｍｏｓトランジスタ Pending JPH06252401A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US1848493A 1993-02-16 1993-02-16
US018484 1993-02-16

Publications (1)

Publication Number Publication Date
JPH06252401A true JPH06252401A (ja) 1994-09-09

Family

ID=21788163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6018781A Pending JPH06252401A (ja) 1993-02-16 1994-02-16 Ｍｏｓトランジスタ

Country Status (5)

Country Link
US (1) US5550397A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0612111A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH06252401A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR100305665B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW273039B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3078720B2 (ja) * 1994-11-02 2000-08-21 三菱電機株式会社 半導体装置およびその製造方法
US6380598B1 (en) 1994-12-20 2002-04-30 Stmicroelectronics, Inc. Radiation hardened semiconductor memory
EP0718881B1 (en) * 1994-12-20 2003-07-16 STMicroelectronics, Inc. Isolation by active transistors with grounded gates
US6418318B1 (en) * 1995-12-12 2002-07-09 At&T Wireless Services, Inc. Method for selecting a preferable wireless communications service provider in a multi-service provider environment
US5801411A (en) * 1996-01-11 1998-09-01 Dallas Semiconductor Corp. Integrated capacitor with reduced voltage/temperature drift
JP3606991B2 (ja) * 1996-02-20 2005-01-05 株式会社半導体エネルギー研究所 被膜作製方法
JPH09293793A (ja) * 1996-04-26 1997-11-11 Mitsubishi Electric Corp 薄膜トランジスタを有する半導体装置およびその製造方法
US8603870B2 (en) 1996-07-11 2013-12-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
TW556263B (en) * 1996-07-11 2003-10-01 Semiconductor Energy Lab Semiconductor device and method of manufacturing the same
US5953596A (en) * 1996-12-19 1999-09-14 Micron Technology, Inc. Methods of forming thin film transistors
US6060749A (en) * 1998-04-23 2000-05-09 Texas Instruments - Acer Incorporated Ultra-short channel elevated S/D MOSFETS formed on an ultra-thin SOI substrate
US6188897B1 (en) 1998-08-17 2001-02-13 At&T Wireless Svcs. Inc. Mobile station roaming in a multiple service provider area
US6204521B1 (en) * 1998-08-28 2001-03-20 Micron Technology, Inc. Thin film transistors
US6136656A (en) * 1998-10-22 2000-10-24 International Business Machines Corporation Method to create a depleted poly MOSFET
US6091630A (en) * 1999-09-10 2000-07-18 Stmicroelectronics, Inc. Radiation hardened semiconductor memory
KR100374551B1 (ko) * 2000-01-27 2003-03-04 주식회사 하이닉스반도체 반도체 소자 및 그 제조방법
US20040004251A1 (en) * 2002-07-08 2004-01-08 Madurawe Raminda U. Insulated-gate field-effect thin film transistors
KR101187084B1 (ko) * 2004-07-08 2012-09-28 미시시피 주립대학 탄화실리콘으로 제조된 모놀리식 수직 접합 전계 효과트랜지스터와 쇼트키 장벽 다이오드 및 그 제조 방법
FR2894386B1 (fr) * 2005-12-06 2008-02-29 Commissariat Energie Atomique Transistor de type i-mos comportant deux grilles independantes, et procede d'utilisation d'un tel transistor
EP2309544B1 (en) * 2009-10-06 2019-06-12 IMEC vzw Tunnel field effect transistor with improved subthreshold swing

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6148979A (ja) * 1984-08-17 1986-03-10 Seiko Epson Corp 多結晶シリコン薄膜トランジスタの製造方法
JPS63283068A (ja) * 1987-05-14 1988-11-18 Sharp Corp 薄膜トランジスタの製造方法
JPS6446980A (en) * 1982-10-06 1989-02-21 Philips Nv Semiconductor device
JPH0268965A (ja) * 1988-09-02 1990-03-08 Fuji Xerox Co Ltd ポリシリコン薄膜トランジスタ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145438B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-06-25 1976-12-03
US4862237A (en) * 1983-01-10 1989-08-29 Seiko Epson Corporation Solid state image sensor
JPS6038878A (ja) * 1983-08-12 1985-02-28 Hitachi Ltd Ｍｉｓ型半導体装置
JPH0227772A (ja) * 1988-07-15 1990-01-30 Sony Corp 電界効果型薄膜トランジスタ
EP0487022B1 (en) * 1990-11-23 1997-04-23 Texas Instruments Incorporated A method of simultaneously fabricating an insulated gate-field-effect transistor and a bipolar transistor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6446980A (en) * 1982-10-06 1989-02-21 Philips Nv Semiconductor device
JPS6148979A (ja) * 1984-08-17 1986-03-10 Seiko Epson Corp 多結晶シリコン薄膜トランジスタの製造方法
JPS63283068A (ja) * 1987-05-14 1988-11-18 Sharp Corp 薄膜トランジスタの製造方法
JPH0268965A (ja) * 1988-09-02 1990-03-08 Fuji Xerox Co Ltd ポリシリコン薄膜トランジスタ

Also Published As

Publication number Publication date
KR100305665B1 (ko) 2001-12-15
EP0612111A1 (en) 1994-08-24
US5550397A (en) 1996-08-27
KR940020576A (ko) 1994-09-16
TW273039B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1996-03-21

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