JPH062263Y2 - 乾燥装置 - Google Patents

乾燥装置

Info

Publication number
JPH062263Y2
JPH062263Y2 JP1986198341U JP19834186U JPH062263Y2 JP H062263 Y2 JPH062263 Y2 JP H062263Y2 JP 1986198341 U JP1986198341 U JP 1986198341U JP 19834186 U JP19834186 U JP 19834186U JP H062263 Y2 JPH062263 Y2 JP H062263Y2
Authority
JP
Japan
Prior art keywords
dried
solvent
drying
heat source
drying device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986198341U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63105329U (enExample
Inventor
富春 安井
利行 田中
重男 小田
Original Assignee
徳山曹達株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 徳山曹達株式会社 filed Critical 徳山曹達株式会社
Priority to JP1986198341U priority Critical patent/JPH062263Y2/ja
Publication of JPS63105329U publication Critical patent/JPS63105329U/ja
Application granted granted Critical
Publication of JPH062263Y2 publication Critical patent/JPH062263Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1986198341U 1986-12-25 1986-12-25 乾燥装置 Expired - Lifetime JPH062263Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986198341U JPH062263Y2 (ja) 1986-12-25 1986-12-25 乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986198341U JPH062263Y2 (ja) 1986-12-25 1986-12-25 乾燥装置

Publications (2)

Publication Number Publication Date
JPS63105329U JPS63105329U (enExample) 1988-07-08
JPH062263Y2 true JPH062263Y2 (ja) 1994-01-19

Family

ID=31158938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986198341U Expired - Lifetime JPH062263Y2 (ja) 1986-12-25 1986-12-25 乾燥装置

Country Status (1)

Country Link
JP (1) JPH062263Y2 (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58222528A (ja) * 1982-06-21 1983-12-24 Hitachi Ltd ウエハ乾燥装置
JPS6166937U (enExample) * 1984-10-08 1986-05-08
JPH058676Y2 (enExample) * 1985-03-11 1993-03-04
JPS61237430A (ja) * 1985-04-15 1986-10-22 Wakomu:Kk 半導体蒸気乾燥洗浄用石英容器
JP2511873B2 (ja) * 1986-04-18 1996-07-03 株式会社日立製作所 ベ−パ乾燥装置

Also Published As

Publication number Publication date
JPS63105329U (enExample) 1988-07-08

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