JPH0619569Y2 - 分子線セルのｐｂｎるつぼ - Google Patents
分子線セルのｐｂｎるつぼInfo
- Publication number
- JPH0619569Y2 JPH0619569Y2 JP1989080502U JP8050289U JPH0619569Y2 JP H0619569 Y2 JPH0619569 Y2 JP H0619569Y2 JP 1989080502 U JP1989080502 U JP 1989080502U JP 8050289 U JP8050289 U JP 8050289U JP H0619569 Y2 JPH0619569 Y2 JP H0619569Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- pbn
- molecular beam
- heater
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 229910002804 graphite Inorganic materials 0.000 claims description 15
- 239000010439 graphite Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 11
- 239000002994 raw material Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 230000005855 radiation Effects 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000002109 crystal growth method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989080502U JPH0619569Y2 (ja) | 1989-07-07 | 1989-07-07 | 分子線セルのｐｂｎるつぼ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989080502U JPH0619569Y2 (ja) | 1989-07-07 | 1989-07-07 | 分子線セルのｐｂｎるつぼ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0322067U JPH0322067U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-03-06 |
| JPH0619569Y2 true JPH0619569Y2 (ja) | 1994-05-25 |
Family
ID=31625621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989080502U Expired - Lifetime JPH0619569Y2 (ja) | 1989-07-07 | 1989-07-07 | 分子線セルのｐｂｎるつぼ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619569Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111286785A (zh) * | 2018-12-07 | 2020-06-16 | 昭和电工株式会社 | 晶体生长装置以及坩埚 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60200895A (ja) * | 1984-03-23 | 1985-10-11 | Agency Of Ind Science & Technol | 分子線結晶成長装置の噴出セル構造 |
| JPH072617Y2 (ja) * | 1987-06-12 | 1995-01-25 | 日新電機株式会社 | Ｐｂｎルツボの均一加熱機構 |
| JP2771215B2 (ja) * | 1989-02-03 | 1998-07-02 | 株式会社日立製作所 | 分子線源用るつぼおよびそれを用いた分子線エピタキシャル成長膜の形成方法 |
-
1989
- 1989-07-07 JP JP1989080502U patent/JPH0619569Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0322067U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-03-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |