JPH0617282Y2 - リアクティブイオンエッチング装置 - Google Patents

リアクティブイオンエッチング装置

Info

Publication number
JPH0617282Y2
JPH0617282Y2 JP7163487U JP7163487U JPH0617282Y2 JP H0617282 Y2 JPH0617282 Y2 JP H0617282Y2 JP 7163487 U JP7163487 U JP 7163487U JP 7163487 U JP7163487 U JP 7163487U JP H0617282 Y2 JPH0617282 Y2 JP H0617282Y2
Authority
JP
Japan
Prior art keywords
etching
rod lens
chamber
reactive ion
ion etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7163487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63180924U (enExample
Inventor
正男 小林
正人 川原
昭大 的場
洋 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7163487U priority Critical patent/JPH0617282Y2/ja
Publication of JPS63180924U publication Critical patent/JPS63180924U/ja
Application granted granted Critical
Publication of JPH0617282Y2 publication Critical patent/JPH0617282Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP7163487U 1987-05-15 1987-05-15 リアクティブイオンエッチング装置 Expired - Lifetime JPH0617282Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7163487U JPH0617282Y2 (ja) 1987-05-15 1987-05-15 リアクティブイオンエッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7163487U JPH0617282Y2 (ja) 1987-05-15 1987-05-15 リアクティブイオンエッチング装置

Publications (2)

Publication Number Publication Date
JPS63180924U JPS63180924U (enExample) 1988-11-22
JPH0617282Y2 true JPH0617282Y2 (ja) 1994-05-02

Family

ID=30914364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7163487U Expired - Lifetime JPH0617282Y2 (ja) 1987-05-15 1987-05-15 リアクティブイオンエッチング装置

Country Status (1)

Country Link
JP (1) JPH0617282Y2 (enExample)

Also Published As

Publication number Publication date
JPS63180924U (enExample) 1988-11-22

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