JPH0617281Y2 - 半導体物品の縦型熱処理装置におけるボ−ト支持装置 - Google Patents

半導体物品の縦型熱処理装置におけるボ−ト支持装置

Info

Publication number
JPH0617281Y2
JPH0617281Y2 JP19104084U JP19104084U JPH0617281Y2 JP H0617281 Y2 JPH0617281 Y2 JP H0617281Y2 JP 19104084 U JP19104084 U JP 19104084U JP 19104084 U JP19104084 U JP 19104084U JP H0617281 Y2 JPH0617281 Y2 JP H0617281Y2
Authority
JP
Japan
Prior art keywords
wafer boat
shaft
boat
connecting shaft
processing tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19104084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61106025U (nl
Inventor
泰二 三宅川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tecnisco Ltd
Original Assignee
Tecnisco Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tecnisco Ltd filed Critical Tecnisco Ltd
Priority to JP19104084U priority Critical patent/JPH0617281Y2/ja
Publication of JPS61106025U publication Critical patent/JPS61106025U/ja
Application granted granted Critical
Publication of JPH0617281Y2 publication Critical patent/JPH0617281Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP19104084U 1984-12-17 1984-12-17 半導体物品の縦型熱処理装置におけるボ−ト支持装置 Expired - Lifetime JPH0617281Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19104084U JPH0617281Y2 (ja) 1984-12-17 1984-12-17 半導体物品の縦型熱処理装置におけるボ−ト支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19104084U JPH0617281Y2 (ja) 1984-12-17 1984-12-17 半導体物品の縦型熱処理装置におけるボ−ト支持装置

Publications (2)

Publication Number Publication Date
JPS61106025U JPS61106025U (nl) 1986-07-05
JPH0617281Y2 true JPH0617281Y2 (ja) 1994-05-02

Family

ID=30748481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19104084U Expired - Lifetime JPH0617281Y2 (ja) 1984-12-17 1984-12-17 半導体物品の縦型熱処理装置におけるボ−ト支持装置

Country Status (1)

Country Link
JP (1) JPH0617281Y2 (nl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5162899B2 (ja) * 2006-12-28 2013-03-13 村田機械株式会社 被搬送物の保管装置

Also Published As

Publication number Publication date
JPS61106025U (nl) 1986-07-05

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