JPH0222535B2 - - Google Patents
Info
- Publication number
- JPH0222535B2 JPH0222535B2 JP59133735A JP13373584A JPH0222535B2 JP H0222535 B2 JPH0222535 B2 JP H0222535B2 JP 59133735 A JP59133735 A JP 59133735A JP 13373584 A JP13373584 A JP 13373584A JP H0222535 B2 JPH0222535 B2 JP H0222535B2
- Authority
- JP
- Japan
- Prior art keywords
- basket
- wafer
- container
- holder
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 69
- 238000010438 heat treatment Methods 0.000 claims description 20
- 230000002265 prevention Effects 0.000 claims description 6
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13373584A JPS6112024A (ja) | 1984-06-27 | 1984-06-27 | 縦型加熱炉 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13373584A JPS6112024A (ja) | 1984-06-27 | 1984-06-27 | 縦型加熱炉 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6112024A JPS6112024A (ja) | 1986-01-20 |
JPH0222535B2 true JPH0222535B2 (nl) | 1990-05-18 |
Family
ID=15111687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13373584A Granted JPS6112024A (ja) | 1984-06-27 | 1984-06-27 | 縦型加熱炉 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6112024A (nl) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62281321A (ja) * | 1986-05-30 | 1987-12-07 | Fukui Shinetsu Sekiei:Kk | ウエハ処理装置 |
JP2620765B2 (ja) * | 1987-09-07 | 1997-06-18 | 東芝セラミックス株式会社 | 縦型拡散炉用ボート |
JP4543198B2 (ja) * | 2004-07-20 | 2010-09-15 | 株式会社昭和真空 | 蒸着材料の供給・回収手段及び真空装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56165317A (en) * | 1980-05-26 | 1981-12-18 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1984
- 1984-06-27 JP JP13373584A patent/JPS6112024A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56165317A (en) * | 1980-05-26 | 1981-12-18 | Fujitsu Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6112024A (ja) | 1986-01-20 |
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