502299 A7 _B7_ 五、發明説明（） 【發明之背景】 (請先閲讀背面之注意事項再填寫本頁) 本發明係有關於一種用以對半導體晶圓等複數被處理 基板同時施行熱處理之縱型熱處理裝置及該裝置内用以固 定保持元件與保溫筒之固定構件· 用以對半導體晶圓（以下稱為「晶圓j )施行熱處理之 熱處理裝置之例子有一種可以批式處理多枚晶圓之縱型熱 處理裝置。第21圖即模式地顯示了以往之縱型熱處理裝置。 由縱型熱處理裝置400之外管401及内管402所構成之 反應管403内設置有作為保持有晶圓W之基板保持元件之 晶舟404及保溫筒405。藉以發熱體406將反應管403内加 熱，即可進行晶圓W之熱處理》在此，藉於熱處理中自氣 體導入管407將處理氣體適當導入反應管403内，即可於晶 圓W上形成薄膜。另，晶舟404與保溫筒405係保持於升降 機408上，並可藉升降機408之昇降而自反應管403内被取出 或朝内放入者（搭載、卸載）· 以往，載置於保溫筒405上之晶舟404容易因地震等振 動而自保溫筒405翻倒❼晶舟404—旦翻倒，保持於晶舟404 上之晶圓W亦將破損，而無法將晶圓W作產品之用•晶圓 W之破損亦將導致自晶圓W上所形成之薄膜產生粉塵而造 成縱型熱處理裝置400内部之汙染❼ 因此，為預防晶舟404之翻倒，日本公開公報特開平 4-120724號公報中揭示了一種以支持機構支持晶舟之技 術。然而*該支持機構僅可支持搭載前之待機中之晶舟。 又，縱型熱處理裝置亦有一種於加熱器與反應管間設 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐） 4- 502299 A7 _ B7_ 五、發明説明έ ) 有均熱管以包覆反應管者。舉例言之，當於較高溫領域進 行熱處理，諸如擴散處理時，即可使用均熱管以得到均熱 性，並防止加熱器對晶圓造成金屬汙染❶ 然而，即便均熱管之高度很高且重量很重，亦僅載置 於加熱器底部内周所設之具有彈性之底部絕熱體之上部❶ 因此，均熱管易因地·震等之搖晃而搖動，萬一因該搖動而 使均熱管與反應管強力接觸乃至相撞，則反應管可能破損。 【發明之概要】 本發明之目的在提供一種可於待機中及對反應管内進 行搭載•卸載時甚至反應管内之處理中防止晶舟（基板保持 元件）翻倒之縱型熱處理裝置及該裝置内所使用之固定構 件0 本發明之目的並在提供一種可以簡單之構造抑制均熱 管之搖晃之縱型熱處理裝置。 由本發明之第1觀點可提供一種縱型熱處理裝置，係用 以對複數被處理基板同時施行熱處理者，包含有：一反應 管，係用以收納該等被處理基板，並於下端部具有一通孔 者；一加熱機構，係配設於該反應管之周園者；一保持元 件，係用以使該等被處理基板於該反應管内彼此隔著間隔 而保持於已朝垂直方向堆疊之狀態者；一蓋體，可昇降自 如，係用以開閉該通孔，並經該通孔而自該反應管内取出 該保持元件或將之放入該反應管内者；一保溫筒，係用以 於該蓋體上支持該保持元件者；及，一固定構件，可對該 保持元件及該保溫筒裝卸，係用以固定該保持元件之底板 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閲讀背面之注意事項再填窝本頁) •訂· :線· -5- 502299 A7 —— —___B7____ 五、發明説明6 ) 與該保溫筒，並使其等呈可相互裝卸之狀態者❶ 根據第1觀點之縱型熱處理裝置，由於其具有用以固定 保持元件之底板與保溫筒且可裝卸自如之固定構件，故可 於待機中及對反應管内進行搭載•卸載時甚至反應管内之 處理中防止保持元件翻倒。 由本發明之第2觀點可提供一種縱型熱處理裝置，係用 以對複數被處理基板同時施行熱處理者，包含有：一反應 管，係用以收納該等被處理基板，並於下端部具有一通孔 者；一加熱機構，係配設於該反應管之周圍者；一保持元 件，係用以使該等被處理基板於該反應管内彼此隔著間隔 而保持於已朝垂直方向堆疊之狀態者；一蓋艚，可昇降自 如，係用以開閉該通孔，並經該通孔而自該反應管内取出 該保持元件或將之放入該反應管内者；一保溫筒，係用以 支持該保持元件者；一保溫筒承具，係用以載置該保溫筒 者；一載置台，配設於該蓋艘上，係用以載置該保溫筒承 具者；一第1固定構件，可對該保溫筒及該保溫筒承具裝 卸，係用以固定該保溢筒及該保溫筒承具，並使其等呈可 相互裝卸之狀態者；及，一第2固定構件，可對該保溫筒承 具與該載置台裝卸，係用以固定該保溫筒承具與該載置 台，並使其等呈可相互裝卸之狀態者。 由第2觀點之縱型熱處理裝置可知，藉第i及第2固定構 件，即可確實固定保溫筒、保溫筒承具及載置台，並防止 保持元件翻倒。 由本發明之第3觀點可提供一種固定構件，係可於用以 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公爱) ' 各 (請先閲讀背面之注意事項再填寫本頁) 訂丨 川2299 A7 _____ _ B7_ 五、發明説明4 ) 對複數被處理基板同時施行熱處理之縱型熱處理裝置中對 保持元件及保溫筒裝卸，並固定可於反應管内保持該等被 處理基板之該保持元件之底板與可於該反應管之蓋體上支 持該保持元件之該保溫筒*且使其等呈可裝卸之狀態者。 由第3觀點之固定構件可知，除了待機中及對反應管内 進行搭載•卸載時以外，亦可於反應管内之處理中防止保 持元件翻倒❶ 由本發明之第4觀點可提供一種縱型熱處理裝置，係用 以對複數被處理基板同時施行熱處理者，包含有：一反應 管，係用以收納該等被處理基板，並於下端部具有一通孔 者；一加熱機構，係配設於該反應管之周圍者；一保持元 件，係用以使該等被處理基板於該反應管内彼此隔著間隔 而保持於已朝垂直方向堆疊之狀態者；一蓋體，可昇降自 如，係用以開閉該通孔，並經該通孔而自該反應管内取出 該保持元件或將之放入該反應管内者；一包園艟，係具有 可包圍該反應管及該加熱機構之絕熱體構造者，藉該包圍 體並可於該反應管之周面形成加熱空間；及，一均熱管， 係配設於該反應管舆該包園醴間而包圍該反應管者；而， 該包圍體並具有可與該均熱管之頂部卡合而限制該均熱管 之搖晃之限制構件。 由第4觀點之縱型熱處理裝置可知，藉包圍髏内側之限 制構件即可簡單且確實地防止均熱管之搖晃。 本紙張尺度適用中國國家標準（CNS> A4規格（210X297公董） (請先閲讀背面之注意事項再填窝本頁) .訂· :線丨 -7- 502299 A7 _B7_ 五、發明説明) 【圖式之簡單說明】 第1圖係本發明第1實施例之縱型熱處理裝置之模式垂 .直截面圖 第2圖係模式地顯示第1圓之小圓A1所包圍部分之垂 直截面圖。 第3圓係已分解第1圖之小圓A1所包圍部分之各構件 之模式分解立體圖。 第4圓係模式地顯示第1圖之小圓B1所包圍部分之垂 直截面圖。 第5圖係已分解第1圖之小圓B1所包圍部分之各構件 之模式分解立體圖· 第6圖係模式地顯示第1圏之小圓C1所包圍部分之垂 直截面圖。 第7圖係已分解第1圖之小圓C1所包圍部分之各構件 之模式分解立艘圓· 第8圓係模式地顯示本發明第2實施例之裝置之晶舟與 保溫筒之正面圓❶ 第9圓係模式地顧不第8圖之小圓A2所包圍部分之垂 直截面囷。 第10圖係已分解第8圖之小圓A2所包圍部分之各構件 之模式分解立餿圖。 第11圖係模式地顯示第8圓之小圓B2所包圍部分之垂 直截面圓。 第12圖係已分解第8圓之小圓B2所包圍部分之各構件 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公愛） {請先閲讀背面之注意事項再填寫本頁)502299 A7 _B7_ 5. Description of the invention () [Background of the invention] (Please read the notes on the back before filling out this page) The present invention relates to a vertical type used to simultaneously heat treat multiple semiconductor substrates such as semiconductor wafers. Heat treatment device and fixing member in the device for fixing the holding element and the heat-retaining cylinder · An example of a heat treatment device for heat treatment of a semiconductor wafer (hereinafter referred to as "wafer j") is one that can process multiple wafers in a batch Vertical heat treatment device. Fig. 21 schematically shows a conventional vertical heat treatment device. A reaction tube 403 composed of an outer tube 401 and an inner tube 402 of the vertical heat treatment device 400 is provided as a holding wafer W. The wafer holder 404 and the thermal insulation tube 405 of the substrate holding element. The heating tube 403 can be heated by the heating element 406 to perform the heat treatment of the wafer W. Here, the processing gas is appropriately introduced from the gas introduction tube 407 during the heat treatment. In the reaction tube 403, a thin film can be formed on the wafer W. In addition, the wafer boat 404 and the heat insulation tube 405 are held on the lifter 408, and can be reflexed by the lift of the lifter 408 The inside of the tube 403 is taken out or placed inward (carrying, unloading) · In the past, the boat 404 placed on the thermal insulation tube 405 was prone to overturn from the thermal insulation tube 405 due to earthquakes and other vibrations. The wafer W held on the wafer boat 404 will also be damaged, and the wafer W cannot be used as a product. The damage of the wafer W will also cause dust from the thin film formed on the wafer W and cause vertical heat treatment. Pollution inside the device 400 Therefore, in order to prevent the overturn of the wafer boat 404, a technique of supporting a wafer boat by a support mechanism is disclosed in Japanese Laid-Open Patent Publication No. 4-120724. However, the support mechanism can only support The crystal boat in standby. In addition, there is also a vertical heat treatment device that is installed between the heater and the reaction tube. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 4- 502299 A7 _ B7_ V. Invention Explained) Those who have a soaking tube to cover the reaction tube. For example, when heat treatment is performed in a higher temperature area, such as diffusion treatment, the soaking tube can be used to obtain the soaking property and prevent the heater from causing metal pollution to the wafer. ❶ However, even if the height of the soaking tube is very high and heavy, it is placed only on the upper part of the bottom heat insulator with elasticity provided on the inner periphery of the bottom of the heater. Therefore, the soaking tube is liable to shake due to the shaking of the ground and the earthquake. In case the soaking tube strongly contacts or even collides with the reaction tube due to the shaking, the reaction tube may be damaged. [Summary of the Invention] The object of the present invention is to provide a method for loading and unloading the reaction tube during standby and in the reaction tube. The vertical heat treatment device for preventing the boat (substrate holding element) from falling over during the processing in the reaction tube and the fixing member used in the device. The object of the present invention is to provide a vertical structure that can suppress the shaking of the soaking tube with a simple structure. Type heat treatment device. According to the first aspect of the present invention, it is possible to provide a vertical heat treatment device for performing heat treatment on a plurality of substrates to be processed at the same time, including: a reaction tube for accommodating the substrates to be processed, and having a channel at the lower end. Holes; a heating mechanism, which is arranged in the reaction tube; a holding element, which is used to keep the substrates to be processed in a vertical stacked state in the reaction tube at a distance from each other A cover body, which can be lifted and lowered freely, is used to open and close the through hole, and to take out the holding element from the reaction tube or put it into the reaction tube through the through hole; a thermal insulation tube, which is used for The cover body supports the holding element; and, a fixing member can be attached to and detached from the holding element and the heat insulation tube, and is used to fix the bottom plate of the holding element. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297). (Mm) (Please read the precautions on the back before filling in this page) • Ordering:: Line -5- 502299 A7 —— —___ B7____ V. Description of the invention 6) and the heat insulation tube, and make them etc. mutually compatible Hold Those who are in the state❶ The vertical heat treatment device according to the first aspect has a bottom plate and a heat-retaining tube for fixing the holding element and a detachable fixing member. Therefore, it can be mounted or unloaded in the reaction tube during standby or even during unloading. Prevent the holding element from tipping during handling in the reaction tube. According to the second aspect of the present invention, a vertical heat treatment device can be provided, which is used to perform heat treatment on a plurality of substrates to be processed at the same time, and includes: a reaction tube for accommodating the substrates to be processed; Holes; a heating mechanism, which is arranged around the reaction tube; a holding element, which is used to keep the processed substrates in the reaction tube in a state of being stacked in a vertical direction at a distance from each other A cover, which can be lifted and lowered freely, is used to open and close the through hole, and to take out the holding element from the reaction tube or put it into the reaction tube through the through hole; a thermal insulation tube is used to support the Those who hold the components; a thermal insulation tube holder, which is used to place the thermal insulation tube; a mounting platform, which is arranged on the cover ship, is used to place the thermal insulation tube holder; a first fixing member, The heat insulation tube and the heat insulation tube holder can be attached and detached, which are used to fix the overflow tube and the heat insulation tube holder so that they can be detached from each other; and a second fixing member can The thermal insulation tube holder and the mounting platform Loading and unloading are used to fix the heat-retaining cylinder holder and the mounting platform and make them detachable from each other. According to the vertical heat treatment apparatus of the second aspect, it is known that the i and the second fixing members can securely fix the heat insulation tube, the heat insulation tube holder and the mounting table, and prevent the holding element from overturning. According to the third aspect of the present invention, a fixing member can be provided, which can be used in this paper size to apply Chinese National Standard (CNS) A4 specification (210X297). Each (please read the precautions on the back before filling this page) Order丨 Chuan 2299 A7 _____ _ B7_ V. Description of the invention 4) In a vertical heat treatment device that simultaneously heat-processes a plurality of processed substrates, the holding element and the heat insulation tube are detached, and the holding of the processed substrates in the reaction tube is fixed. The bottom plate of the element and the heat-retaining tube * that can support the holding element on the lid of the reaction tube and make them detachable. From the fixed member of the third aspect, it can be seen that the holding element can be prevented from overturning during the processing in the reaction tube in addition to standby and when loading / unloading the inside of the reaction tube. According to the fourth aspect of the present invention, a vertical heat treatment device can be provided. , Which is used to perform heat treatment on a plurality of substrates to be processed at the same time, including: a reaction tube, which is used to store the substrates to be processed, and has a through hole at the lower end; a heating mechanism, which is arranged in the reaction Around the tube; a holding element is used to keep the substrates to be processed in the reaction tube in a state stacked in a vertical direction at a distance from each other; a cover body can be raised and lowered freely, is used to open and close The through-hole, and the holding element is taken out of the reaction tube or put into the reaction tube through the through-hole; a packet of garden cricket is a person having a thermal insulator structure that can surround the reaction tube and the heating mechanism, By using the enclosure, a heating space can be formed on the peripheral surface of the reaction tube; and, a soaking tube is arranged between the reaction tube and the garden enclosure to surround the reaction tube; and, the The surrounding body also has a restricting member that can be engaged with the top of the soaking tube to restrict the shaking of the soaking tube. According to the longitudinal heat treatment apparatus of the fourth aspect, it is known that the restricting member surrounding the inside of the skull can prevent the soaking tube from shaking easily and reliably. This paper size applies to Chinese national standards (CNS > A4 size (210X297)) (Please read the precautions on the back before filling in this page). Order:: Line 丨 -7- 502299 A7 _B7_ V. Description of the invention) [Figure] Brief description of the formula] Fig. 1 is a vertical cross-sectional view of a vertical heat treatment device according to the first embodiment of the present invention. Fig. 2 is a vertical cross-sectional view schematically showing a portion surrounded by a small circle A1 of the first circle. The third circle is an exploded perspective view of each component of the portion enclosed by the small circle A1 in FIG. 1. The fourth circle system schematically shows a vertical cross-sectional view of a portion surrounded by a small circle B1 in FIG. 1. Fig. 5 is a schematic exploded perspective view of the components surrounded by the small circle B1 of Fig. 1 and Fig. 6 is a vertical sectional view schematically showing the portion surrounded by the small circle C1 of the first frame. Fig. 7 shows the exploded pattern of the components enclosed by the small circle C1 of Fig. 1 The erected circle · The 8th circle shows the front circle of the wafer boat and the insulation tube of the device according to the second embodiment of the present invention. ❶ The ninth circle system does not consider the vertical cross section 部分 of the portion surrounded by the small circle A2 in FIG. 8. Fig. 10 is a model exploded perspective view of the components of the portion enclosed by the small circle A2 of Fig. 8. Fig. 11 schematically shows a vertical cross-section circle of a portion surrounded by a small circle B2 of the eighth circle. Figure 12 is the components of the circle surrounded by the small circle B2 of the 8th circle. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 public love) {Please read the precautions on the back before filling this page)
•8· 502299 A7 ___B7 五、發明説明会 ） 之模式分解立醴圓· 第13圖係模式地顯示本發明第3實施例之裝置之晶舟 與保溫筒之正面圓。 第14圖係模式地顯示第13圖之小圓A3所包圍部分之 垂直截面圓〇 第15圓係已分解第13圖之小圓A3所包圍部分之各構 件之模式分解立體圖。 第16圖係模式地顯示第13圓之小圓B3所包圍部分之 垂直截面圖。 第17圖係已分解第13圖之小圓B3所包圍部分之各構 件之模式分解立體圓❶ 第18圖係模式地顯示第1實施例之變形例之裝置之保 溫筒與保溫筒載置台之分解立體圓。 第19圓係模式地顯示本發明第4實施例之裝置之晶 舟、保溫筒、保溫筒承具、保溫筒載置台之局部截面圓❶ 第20(A)〜(B)國係顯示第19»之局部放大狀態之局部 截面圖。 第21圖係模式地顯示以往之縱型熱處理裝置内部之垂 直截面圖❶ 第22圖係顯示本發明第5實施例之縱型熱處理裝置之 縱截面圖。 第23圖係第22圖之裝置之頂部絕熱艘之截面圖 第24囷係第22圖之裝置之頂部絕熱體之底面圓。 第25圖係顯示本發明第6實施例之縱型熱處理裝置之 本紙張尺度適用中國國家標準（CNS) Α4規格(210X297公釐） (請先閲讀背面之注意事項再填寫本頁) -訂· :線· •9- 502299 A7 __B7_ 五、發明説明$ ) 要部縱截面圓。 (請先閲讀背面之注意事項再填寫本頁) 第26囷係顯示第25圖之實施例之變形例之要部概略截 面圖。 第27圓係顯示本發明第7實施例之縱型熱處理裝置之 要部縱截面圖。 【本發明之實施例】 (第1實施例） 以下，就本發明第1實施例之縱型熱處理裝置加以說 明。本實施例中，將使用可對作為基板之複數枚晶圓同時 進行熱處理之批式縱型熱處理裝置作為用以施行諸如氧化 處理、擴散處理及CVD處理等熱處理之縱型熱處理裝置以 進行說明。 .第1圖係本實施例之縱型熱處理裝置之模式垂直截面 圖。如第1圖所示，本實施例之縱型熱處理裝置1包含具有 頂板之略圓筒形之由金屬所形成之箱體2。箱體2内配設有 由石英或碳化矽（SiC)所形成之反應管3，而可於反應管3内 對晶圓W施行熱處理❶反’應管3則於下端部具有用以搭載/ 卸載晶圓之通孔· 於箱餿2與反應管3間自箱醴2至反應管3依次配設有具 有頂板之略圓筒狀之絕熱材4,以及形成諸如螺旋狀之作為 加熱機構之電阻發熱體5。該電阻發熱艘5連接有未予圖示 之導線，該導線則與配設於箱體2外部之未予圖示之外部電 源相連接。藉自外部電源經導捸對電阻發熱體5施加電壓， 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公漦） -10- 502299 A7 _____B7 _ 五、發明説明) 即可使電阻發熱餿5發熱，而使反應管3内之溫度昇高至諸 -如500〜1〇〇〇它❶又，絕熱材4之下端部固著有底板6,藉該 底板6則支持有絕熱材4及箱醴2。 反應管3係由具有頂板之略圓筒狀之外管7舆不具有配 設於外管7内側之頂板之略圓筒狀之内管8所構成者。外管7 之下端部與外管7—醴形成有環狀之凸緣部9,而可藉該凸 丨緣部9將外管7安定地載置於後述之歧管12上•又，内管8 之下端部與内管8—體形成有環狀之凸緣部10,而可藉對該 凸緣部10安裝後述之反應管固定構件20而將内管8固定於 後述之歧管12上。 内管8之下部與用以對内管8内導入處理氣馥之處理氣 艘導入系統相連接。該處理氣醴導入系統具體上係主要由 諸如未予圖示之氣艘#源與用以連接氣體源與外管7之下部 之4理氣體導入管11所構成者•且，處理氣艎導入管11中 插設有未予圖示之氣門及質量流量控制器（MFC)，而可調 > 節自氣體源流出之處理氣髏之流量。 又，外管7及内管8係為不锈鋼製之略圓筒狀之歧管12 所支持者。該歧管12之上‘部及下端部則朝外側分別形成 •有環狀之凸緣部13、14,上端部之凸緣部13係固定於底板6 上者’凸緣部13上則藉如Ο環般之環狀密封構件而載置有 外管7。而，下端部之凸緣部14則係構成可隔著如〇環般之 環狀密封構件而與後述之已藉升降機60上昇之蓋醴61接 觸，並可於熱處理時將内管8内保持密閉者•且，歧管12 之内壁上所設之溝槽15嵌合有反應管固定構件20,而固定 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公爱） (請先閲讀背面之注意事項再填窝本頁) •訂丨 :線* 41- 502299 A7 _B7_ 五、發明説明έ ) 了内管8與歧管12。 (請先閲讀背面之注意事項再填寫本頁) 另，於歧管12之預定處連接有用以將反應管3内真空排 氣之真空排氣系統。該真空排氣系統具體上係由諸如渦輪 分子泵或乾式真空泵等未予圖示之真空泵及用以連接真空 泵與内管8之下部之排氣管16所構成者。 熱處理時之内管8内搭載有可將多枚（諸如150枚）晶圓 W保持於略水平狀態之作為基板保持元件之晶舟30。該晶 舟30係為防止金屬等造成晶圓之汙染而由高純度之石英或 碳化矽所形成者。又，晶舟30並具有概略形狀為環狀之頂 板31及底板32 *頂板31之下面與底板32之上面上則大致垂 直固定有多根（諸如4根）支柱33，而可於頂板31與底板32間 保持晶圓W。另，各支柱33則於多處設有溝槽*而可以等 間隔保持晶圓W。 晶舟30之下方配設有具有可使後述之保溫筒載置台70 與熱隔絕之絕熱作用之保溫筒40。該保溫筒40則係由石英 或碳化矽所形成者。本實施例之保溫筒40具有概略形狀為 環狀之頂板41及底板42，頂板41之下面與底板42之上面上 則大致垂直固定有多根（鉍如4根）支柱43，而可於頂板41與 底板42間保持其次將說明之散熱片（fin)44。4根支柱43上則 以等間隔嵌合有多枚於諸如4處具有孔洞之略圓板狀之散 熱片44,而可藉改變該等散熱片44之枚數而得到最佳之絕 熱效果。 在此，晶舟30之底板32與保溫筒40之頂板41係為可裝 卸自如之作為基板保持元件固定構件之晶舟固定構件50所 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） -12- 刈2299 A7 _____ B7_ 五、發明説明如 ） (請先閲讀背面之注意事項再填窝本頁) 固定者。晶舟固定構件50具馥上則係由諸如公螺紋構件 51、用以與公螺纹構件51螺接之母螺故構件52及可插設於 公螺纹構件51與母螺紋構件52間之保溫筒插入構件53所構 成者· 又，保溫筒40之下方配設有升降機6〇，而可使保溫筒 40及固定於保溫筒4Q上之晶舟30昇降自如•該升降機60上 則固定有略圓板狀之蓋體61，而可藉蓋體61開閉反應管3 下端部之通孔。蓋體61上則固定有可載置保溫筒40之諸如 由英高鎳等金屬所形成之保溫筒載置台70並使其呈旋轉自 如之狀態。藉於熱處理中使該保溫筒載置台70旋轉，即可 使設置於保溫筒載置台70上之保溫筒40及晶舟30旋轉，以 對晶舟30内之晶圓W均一地施行熱處理。在此，本實施例 中.，保溫筒載置台70與保溫筒40之底板42係為保溫筒固定 構件80所固定者。但，上述之設置並無關於保溫筒載置台 70與保溫筒40之底板42是否已固定· :線丨 其次，就第1圖之小圓Al、B1及C1所包圍之部分加以 詳細說明〇 首先，就第1圖之小BA1所包園之部分加以說明•第2 囷係模式地顯示第1圓之小圓A1所包園部分之垂直截面 圓，第3圓係已分解第1圖之小圓A1所包園部分之各構件之 模式分解立禮圖* 如上所述，晶舟30之底板32之概略形狀係形成環狀， 若加以詳細說明，則如第2及3圖所示，晶舟30之底板32具 有形成環狀之環狀部34。該環狀部34之下面侧則突出設置 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 定 五、發明説明（1 有内徑大於環狀部34之内稷而外徑小於環狀部“之外摄之 環狀之凸部35。又’於凸部35之2處並朝半徑外側方向突出 設置有突起36。在此，以下將形成於環狀部之内周面之空 間稱為環狀孔部’形成於凸部之内周面之空間則稱為凸狀 孔部❶ 另如上所述，保溫筒4〇之頂板41之概略形狀雖形成 裒狀仁方加以詳細說明，則保溫筒之頂板…具有内獲 與阳舟30之凸部外握大致一致之環狀之環狀部45。該環狀 M5之上面側突出設置有内徑與環狀部45之内徑大致—致 而外徑小於環狀部45之外徑之環狀之凸部私。藉該凸部^ 而形成之凸狀孔部47則可嵌合晶舟3〇之凸部35。藉該嵌合 即可確實進行晶舟3G對保溫筒觀定位。又，凸部46並於2 處形成有溝槽48,而可對該溝槽48嵌合晶舟3〇之突起％。 藉該嵌合即可更確實地進行晶舟30對保温筒40之定位。 此外’作為底板32之第1開口部之環狀孔部37及凸狀孔 部38嵌合有於頭部側面形成有落差之公螺纹構件51。若詳 細說明該公螺紋構件51之形狀，則公螺紋構件51具有直徑 大於底板32之環狀部34之内徑之略圓板狀之大圓板部54。 該大圓板部54則係形成於使用公螺紋構件51而已固定晶舟 3〇之底板32與保溫筒40之頂板41時不致干擾保持於晶舟30 上之晶圓W之高度者。因此，即便使用公螵紋構件51固 晶舟30與保溫筒40，亦不致減少晶圓W之處理枚數❶ 又，該大圓板部54之下面側以同心突出設置有直徑龚 底板32之環狀部34之内徑大致一致之略圓板狀之小圓板苟 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公愛） (請先閲讀背面之注意事項再填窝本頁)• 8 · 502299 A7 ___B7 V. Inventive Mode Decomposition Ritual Circle · Figure 13 shows the front circle of the boat and the insulation tube of the device according to the third embodiment of the invention. FIG. 14 is a schematic exploded perspective view showing a vertical cross-section circle of a portion surrounded by a small circle A3 in FIG. 13. The 15th circle is a exploded perspective view of each component of the portion surrounded by a small circle A3 in FIG. 13. Fig. 16 is a vertical sectional view schematically showing a portion surrounded by a small circle B3 of the 13th circle. Fig. 17 is a three-dimensional circle in which the components surrounded by the small circle B3 in Fig. 13 have been exploded. Fig. 18 is a schematic view showing the heat preservation tube and the heat preservation tube mounting table of the device of the modification of the first embodiment. Decompose solid circles. The 19th round system is a partial display of the wafer boat, the heat preservation tube, the heat preservation tube holder, and the heat preservation tube mounting table of the device according to the fourth embodiment of the present invention. The 20th (A) to (B) national display shows the 19th »A partial cross-sectional view of a partially enlarged state. Fig. 21 is a vertical cross-sectional view schematically showing the interior of a conventional vertical heat treatment device. Fig. 22 is a vertical cross-sectional view showing a vertical heat treatment device according to a fifth embodiment of the present invention. Fig. 23 is a cross-sectional view of the top insulation ship of the device of Fig. 22 Fig. 24 is a bottom surface of the top insulation body of the device of Fig. 22 in a circle. Fig. 25 shows that the paper size of the vertical heat treatment device according to the sixth embodiment of the present invention applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page)-Order · : Line · • 9- 502299 A7 __B7_ V. Description of the invention $) The longitudinal section of the main part is round. (Please read the precautions on the back before filling out this page.) Figure 26 is a schematic cross-sectional view of the main part showing a modification of the embodiment shown in Figure 25. The 27th circle is a longitudinal sectional view of a main part of a longitudinal heat treatment apparatus according to a seventh embodiment of the present invention. [Embodiment of the present invention] (First embodiment) Hereinafter, a vertical heat treatment apparatus according to a first embodiment of the present invention will be described. In this embodiment, a batch-type vertical heat treatment device capable of simultaneously heat-treating a plurality of wafers as substrates will be described as a vertical heat treatment device for performing heat treatment such as oxidation treatment, diffusion treatment, and CVD treatment. Fig. 1 is a schematic vertical cross-sectional view of the vertical heat treatment apparatus of this embodiment. As shown in Fig. 1, the longitudinal heat treatment apparatus 1 of this embodiment includes a box 2 made of a metal having a substantially cylindrical shape having a top plate. A reaction tube 3 formed of quartz or silicon carbide (SiC) is arranged in the box 2, and the wafer W can be heat-treated in the reaction tube 3. The reaction tube 3 is provided at the lower end for mounting / Through-hole for unloading the waferSlightly cylindrical heat-insulating material 4 with a top plate is formed between the case 2 and the reaction tube 3 in order from the case 2 to the reaction tube 3, and a spiral-shaped heating mechanism is formed. Resistance heating body 5. The resistance heating vessel 5 is connected with a wire (not shown), and the wire is connected with an external power source (not shown) arranged outside the box 2. By applying a voltage to the resistance heating element 5 through an external power source, the paper size applies the Chinese National Standard (CNS) A4 specification (210X297) (-10-502299 A7 _____B7 _ V. Description of the invention) to heat the resistance. 5 generates heat, so that the temperature in the reaction tube 3 rises to various levels, such as 500 ~ 1000. It also has a bottom plate 6 fixed to the lower end of the heat insulation material 4, and the bottom plate 6 supports the heat insulation material 4 and Box 醴 2. The reaction tube 3 is constituted by a slightly cylindrical outer tube 7 having a top plate and a slightly cylindrical inner tube 8 without a top plate arranged inside the outer tube 7. The lower end portion of the outer tube 7 and the outer tube 7- 有 form a ring-shaped flange portion 9, and the outer tube 7 can be stably placed on the manifold 12 described later by the convex edge portion 9 The lower end of the tube 8 and the inner tube 8 are integrally formed with a ring-shaped flange portion 10, and the reaction tube fixing member 20 described later can be mounted on the flange portion 10 to fix the inner tube 8 to a manifold 12 described later. on. The lower part of the inner pipe 8 is connected to a process gas vessel introduction system for introducing process gas into the inner pipe 8. The processing gas radon introduction system is mainly composed of a gas vessel # source (not shown) and a gas management pipe 11 for connecting the gas source and the lower part of the outer pipe 7. An unillustrated valve and a mass flow controller (MFC) are inserted in the tube 11, and the flow rate of the processing gas cross flowing from the gas source can be adjusted. The outer tube 7 and the inner tube 8 are supported by a slightly cylindrical manifold 12 made of stainless steel. The upper part and the lower end of the manifold 12 are respectively formed outwardly. There are ring-shaped flange parts 13, 14; the flange part 13 of the upper end is fixed to the bottom plate 6, and the flange part 13 is borrowed. An outer tube 7 is placed on a ring-shaped sealing member such as an O-ring. On the other hand, the flange portion 14 at the lower end portion is configured to be in contact with a cover 醴 61 which has been raised by the elevator 60 described later through a ring-shaped sealing member such as a 0 ring, and can be held in the inner tube 8 during heat treatment. Sealer • And, the groove 15 provided on the inner wall of the manifold 12 is fitted with a reaction tube fixing member 20, and the paper size is fixed to the Chinese National Standard (CNS) A4 specification (210X297 public love) (please read the back first) Note for refilling this page) • Order 丨: Line * 41- 502299 A7 _B7_ V. Description of the invention) The inner tube 8 and the manifold 12 were introduced. (Please read the precautions on the back before filling out this page.) Also, connect a vacuum exhaust system to the vacuum pipe 12 to the predetermined position of the manifold 12 to evacuate the vacuum inside the reaction tube 3. The vacuum exhaust system is specifically composed of a vacuum pump (not shown) such as a turbo molecular pump or a dry vacuum pump, and an exhaust pipe 16 for connecting the vacuum pump to the lower portion of the inner pipe 8. A wafer boat 30 as a substrate holding element capable of holding a plurality of (such as 150) wafers W in a slightly horizontal state is mounted in the inner tube 8 during the heat treatment. This wafer boat 30 is formed of high-purity quartz or silicon carbide to prevent wafers from being contaminated by metals. In addition, the wafer boat 30 has a top plate 31 and a bottom plate 32 having a ring shape. A plurality of (such as four) pillars 33 are fixed to the lower surface of the top plate 31 and the upper surface of the bottom plate 32, and the top plate 31 and A wafer W is held between the bottom plates 32. Each pillar 33 is provided with grooves * at a plurality of positions so that the wafers W can be held at regular intervals. Below the wafer boat 30, a heat-retaining cylinder 40 having a heat-insulating effect that can isolate a heat-retaining-tube mounting platform 70 described later from heat is arranged. The thermal insulation tube 40 is formed of quartz or silicon carbide. The thermal insulation tube 40 of this embodiment has a ring-shaped top plate 41 and a bottom plate 42. A plurality of (bismuth, for example, four) pillars 43 are fixed to the lower surface of the top plate 41 and the upper surface of the bottom plate 42 approximately perpendicularly. A fin 44 which will be described next is maintained between the 41 and the bottom plate 42. A plurality of fins 44 having a slightly circular plate shape such as four holes are fitted on the four pillars 43 at regular intervals, and can be borrowed The number of these heat sinks 44 is changed to obtain the best thermal insulation effect. Here, the bottom plate 32 of the crystal boat 30 and the top plate 41 of the thermal insulation tube 40 are the crystal boat fixing members 50 which can be detachably used as the substrate holding member fixing members. The paper size applies to the Chinese National Standard (CNS) A4 specification (210X297). (Centi) -12- 刈 2299 A7 _____ B7_ V. Description of the invention (for example) (Please read the precautions on the back before filling in this page) Fixer. The wafer boat fixing member 50 is composed of a male screw member 51, a female screw member 52 for screwing with the male screw member 51, and a thermal insulation tube that can be inserted between the male screw member 51 and the female screw member 52. The insert member 53 is composed of a lifter 60 located below the heat insulation tube 40, so that the heat insulation tube 40 and the wafer boat 30 fixed on the heat insulation tube 4Q can be lifted and lowered freely. • The lifter 60 is slightly rounded. The plate-shaped cover 61 can be used to open and close the through hole at the lower end of the reaction tube 3 by the cover 61. The lid body 61 is fixed with a heat-insulating cylinder mounting table 70 made of a metal such as Inconel, etc., on which the heat-insulating cylinder 40 can be placed, so that it can rotate freely. By rotating the heat-retaining cylinder mounting table 70 during the heat treatment, the heat-retaining cylinder 40 and the wafer boat 30 provided on the heat-reserving cylinder mounting table 70 can be rotated to uniformly heat-treat the wafers W in the wafer boat 30. Here, in this embodiment, the heat-insulating tube mounting table 70 and the bottom plate 42 of the heat-insulating tube 40 are fixed by the heat-insulating tube fixing member 80. However, the above-mentioned setting does not concern whether the bottom plate 42 of the heat-insulating cylinder mounting table 70 and the heat-insulating cylinder 40 is fixed. Next, the details enclosed by the small circles Al, B1, and C1 in FIG. 1 will be explained in detail. Illustrate the part of the garden enclosed by BA1 in Figure 1. • The second unit displays the vertical cross-section circle of the circle included in the circle A1 of the first circle. The third circle has been decomposed in Figure 1. Pattern decomposition diagram of the components of the Baoyuan portion of circle A1 * As mentioned above, the rough shape of the bottom plate 32 of the crystal boat 30 is formed into a ring shape. If it is described in detail, as shown in Figures 2 and 3, The bottom plate 32 of the boat 30 has a ring-shaped portion 34 formed in a ring shape. The lower side of the ring-shaped portion 34 is set prominently. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). V. Description of the invention (1 The inner diameter is larger than the inner diameter of the ring-shaped portion 34 and the outer diameter is less than The ring-shaped part 35 is a ring-shaped convex part 35. The protrusion 36 is provided at two positions of the convex part 35 and protrudes outward in the radial direction. Here, the following will be formed on the inner peripheral surface of the ring-shaped part. The space is called a ring-shaped hole portion. The space formed on the inner peripheral surface of the convex portion is called a convex hole portion. In addition, as described above, although the rough shape of the top plate 41 of the thermal insulation tube 40 is formed into a rectangular shape, it will be described in detail. Then, the top plate of the heat-preserving cylinder ... has a ring-shaped ring portion 45 which is substantially consistent with the outer grip of the convex portion of the Yangzhou 30. The upper side of the ring-shaped M5 is provided with an inner diameter and an inner diameter of the ring portion 45. Roughly, the annular convex portion with an outer diameter smaller than the outer diameter of the annular portion 45. The convex hole portion 47 formed by the convex portion ^ can be fitted into the convex portion 35 of the wafer boat 30. By this The mating can surely perform the positioning of the crystal tube 3G on the heat preservation tube. In addition, the convex portion 46 is formed with grooves 48 at two places, and the groove 48 can be The protrusion% of the crystal boat 30. By this fitting, the positioning of the crystal boat 30 to the thermal insulation tube 40 can be performed more reliably. In addition, the annular hole portion 37 and the convex hole portion as the first opening portion of the bottom plate 32 38 is fitted with a male screw member 51 formed with a drop on the side of the head. If the shape of the male screw member 51 is described in detail, the male screw member 51 has a slightly circular plate having a diameter larger than the inner diameter of the ring portion 34 of the bottom plate 32. A large circular plate portion 54. The large circular plate portion 54 is formed on the bottom plate 32 of the wafer boat 30 and the top plate 41 of the thermal insulation tube 40 without disturbing the wafer W held on the wafer boat 30 when the male screw member 51 is fixed. Therefore, the number of wafers W is not reduced even when the male wafer structure 51 and the solid crystal boat 30 and the heat insulation tube 40 are used. Also, the diameter of the large circular plate portion 54 is concentrically provided on the lower side. Slightly circular plate-shaped small circular plate with the inner diameter of the annular portion 34 of the bottom plate 32 is approximately the same. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297). (Please read the precautions on the back before filling the nest. (This page)
44- 502299 A7 ________B7 五、發明説明ί2 ) 55❶在此，藉使大圓板部54之直徑大於底板32之環狀部34 之内徑，即可防止公螺紋構件51通過底板32之環狀孔部 37。而，藉使小圓板部55之直徑與底板32之環狀部34之内 徑大致一致’則可對底板32之環狀孔部37嵌合，藉該丧合 即可確實地進行公螺紋構件51對晶舟30之定位。另，小圓 板部55之下面側則突出設置有形成有公螺紋之轴部56。 又，保溫筒40内並配設有形成有可與軸部56之公螺紋 螺接之母螺紋57之母螺紋構件52,而可隔著保溫筒插入構 件53與公螺紋構件51螺接。在此，母螺紋構件52之外徑小 於保溫筒40之環狀部45之内徑。 保溫筒40之支柱43間則大致水平插入有保溫筒插入構 件53。該保溫筒插入構件53係具有可供軸部56插入之轴部 插入孔58者。在此，該保溫筒插入構件53之長向之長度則 大於作為保溫筒40之第2開口部之環狀孔部49之直徑。藉使 保溫筒插入構件53之長向之長度大於保溫筒40之環狀孔部 49之直徑，即可於已使自保溫筒插入構件53之轴部插入孔 58突出之軸部56之公螺纹與母螺紋構件52螺接後，使保溫 筒插入構件53之兩端卡止於保溫筒40之頂板41下面，而固 定晶舟30與保溫筒40。 在此，公螺紋構件51宜由與晶舟30之底板32及保溫筒 40之頂板41至少任一方相同之材質所形成。其原因在於假 如以熱膨脹係數比底板32及頂板41之材質小之材質形成公 螺紋構件51，則因底板32及頂板41朝轴部56之轴方向熱膨 脹，而可能對轴部56產生應力，以致引起轴部56之破損之 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閲讀背面之注意事項再填窝本頁) •訂丨 :線· -15- 502299 A7 _B7_ 五、發明説明（3 ) 故。 又，比較底板32之材質與頂板41之材質，則可知以與 熱膨脹係數較大之材質相同之材質形成公螺紋構件51較為 適宜。其原因則在於以熱膨脹係數較大之材質形成公螺紋 構件51比熱膨脹係數較小之材質更可減低轴部56之應力之 故。 另，由於若以同一材質形成晶舟30之底板32、保溫筒 40之頂板41及公螺纹構件51，即可更為減低轴部56之應 力，故如此將更為適宜❶進而，由於在底板32等之外，若 亦以同一材質形成母螺紋構件52及保溫筒插入構件53，即 可將轴部56之應力減至最低，故如此最為適宜❼ 此外，假如以熱膨脹係數比底板32及頂板41之材質大 之材質形成公螺紋構件51，則可能因轴部56之轴方向之膨 脹而使固定力降低。 其次，就固定晶舟30與保溫筒40之順序加以具體說 明。首先，對保溫筒40之頂板41之凸狀孔部47及溝槽48分 別嵌合晶舟30之環狀部34之凸部35及突起36。接著，自晶 舟30之環狀部34側將公螺紋構件51插入已大致水平插入保 溫筒40之支柱43間之保溫筒插入構件53上之公螺紋構件插 入孔58中。進而，使已插入公螺紋構件插入孔58中之公螺 紋構件51與母螺紋構件52螺接。藉該螺接即可固定晶舟30 與保溫筒40，並使其等呈裝卸自如之狀態。 如上所述，藉以晶舟30、保溫筒40及晶舟固定構件50 進行固定，即使於待機中及反應管内之搭載•卸載中甚至 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐) (請先閲讀背面之注意事項再填寫本頁) -訂丨 46- 502299 A7 ___ B7_ 五、發明説明（4 ) 反應管内之處理中，亦可防止晶舟30翻倒。 又’由於晶舟30及保溫筒40將朝内管8内搭載，故晶舟 30及保溫筒40亦將附著處理氣艘之構成物質。若於已附著 有該附著物之狀態下繼續進行熱處理，則將發生附著物自 晶舟30及保溫筒40剝離而汙染晶圓w之問題•因此，雖然 必須以諸如氩氟酸定期清洗晶舟30及保溫筒40，但因晶舟 30直接保持晶圓W故宜增加其清洗頻率，且宜與清洗頻率 較低之保溫筒分開進行。由於本實施例之固定有晶舟3〇與 保溫筒40之晶舟固定構件50可裝卸自如，故可卸下晶舟固 定構件50而分離成晶舟30與保溫筒40，並可僅清洗晶舟3〇。 另，熱處理裝置1内部為防止金屬等之汙染，宜不使用 特別之工具。在本實施例中，藉以手旋轉公螺紋構件5 j , 即可固定晶舟30與保溫筒40而無需特別之工具β 又’ 一般而s ’為使處理氣艘對晶圓W流動順揚，而 於既有之晶舟之底板及保溫筒之頂板上形成有環狀孔部。 藉配合環狀孔部之又寸而形成晶舟固定構件50，即可固定 既有之晶舟與保溫筒，而無須改變環狀孔部之尺寸。 其次，就第1圖之小1ΪΒ1所包圍之部分加以說明β第4 圖係模式地顯不第1圓之小圓Β1所包園部分之垂直截面 圖，第5圓係已分解第1圖之小圓Β1所包園部分之各構件之 模式分解立體圖· 如上所述，雖然保溫筒40之底板42之概略形狀係形成 環狀，但若加以詳細說明，則如第4及第5圖所示，保溫筒 40之底板42具有形成環狀之環狀部90。該環狀部90之下面 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公爱） (請先閲讀背面之注意事項再填窝本頁) .，^丨 举 •17· 502299 A7 _B7_ 五、發明説明¢5 ) 侧則突出設置有内徑大於環狀部90之内徑而外徑小於環狀 部90之外徑之環狀之凸部91· « 又，若詳細說明保溫筒載置台70之形狀，則保溫筒載 置台70具有在略圓板狀之構件上於3處設有孔洞之形狀之 載置部71。該載置部71之上面侧則突出設置有内徑與保溫 筒40之凸部91之外徑大致一致而外徑小於載置部71之直徑 之環狀之凸部72。 另，孔洞係設置成殘留圓板之中心部73者，藉將中心 部73與連結有未予圖示之馬達之旋轉轴連接，即可以中心 部73為轴而旋轉保溫筒載置台70。而，藉該凸部72而形成 之凸狀孔部74則可與保溫筒40之底板42之凸部91嵌合❶進 而，於該凸部72之6處以每2處為1組而形成有可與後述之公 螺紋構件81螺接之母螺紋75❶ 已嵌合之保溫筒40之底板42與保溫筒載置台70於3處 安裝有裝卸自如而可固定保溫筒40之底板42與保溫筒載置 台70之保溫筒固定構件80 ·保溫筒固定構件80具體上則係 由諸如公螺紋構件81、具有鈎形部82且於2處形成有與81 大致相同直徑之公螺纹構件插入孔83之鈎形構件84所構成 者。該鈎形構件84則係形成沿行保溫筒40之環狀部90外周 面及保溫筒載置台70之凸部72外周面之形狀者。 其次，就固定保溫筒40與保溫筒載置台70之順序加以 具體說明。首先，對保溫筒載置台70之凸狀孔部74嵌合保 溫筒40之底板42之凸部91，接著，於已嵌合之保溫筒40及 保溫筒載置台70之3處配設鈎形構件84,以使鈎形部82卡合 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) •訂丨 - 48- 502299 A7 B7 五、發明説明彳6 ) 請 ； 先 ： 閲 · 讀 ! 背 ： 面 · 之 ： 注 ·· 意 · 事： 項 ： 再 ： S袭 本 ： 頁 ： 於保溫筒40之底板42之上面。然後，在鈎形構件84之公螺 紋構件插入孔83與母螺紋75之對位作業完成後，自公螺紋 構件插入孔83朝母螺紋75插入公螺紋構件81，以使公螺紋 構件81對母螺紋75螵接•藉該螺接即可固定保溫筒40與保 溫筒載置台70,並使其等呈裝卸自如之狀態· 如上所述，藉以.保溫筒固定構件80固定保溫筒40之底 板42與保溫筒載置台70,即可避免因地震等振動而使保溫 筒40對保溫筒載置台70搖晃擺動。結果，可更有效地防止 晶舟30之翻倒。 訂 又，一般而言，為使處理氣體對晶圓W流動順暢，而 於既有之保溫筒之底板及保溫筒載置台上形成有環狀孔部 及孔洞。而，藉於保溫筒及保溫筒載置台之外周部安裝保 溫筒固定構件80，則可固定既有之保溫筒及保溫筒載置 台，而不致堵塞環狀孔部及孔洞。 進而，如上所述，由於保溫筒40將插入内管8内，故保 溫筒40上亦將附著薄膜形成物質。由於保溫筒40並未直接 保持晶圓W，故清洗頻率比晶舟30少，但亦須與晶舟30同 樣進行清洗。在此，宜將‘溫筒40與保溫筒載置台70分離 而加以清洗，以避免作業性之問題。由於本實施例之固定 有保溫筒40與保溫筒載置台70之保溫筒固定構件80可裝卸 自如，故可卸下保溫筒固定構件80而將保溫筒40與保溫筒 載置台70分離，並可僅清洗保溫筒40。 其次，就第1圖之小圓C1所包圍之部分加以說明•第6 圖係模式地顯示第1圏之小圓C1所包圍部分之垂直截面 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） -19- 502299 A7 _B7_ 五、發明説明扣 ） 圖，第7圖係已分解第1圖之小圓C1所包圍部分之各構件之 模式分解立體囷。 如上所述，内管8與歧管12係藉反應管固定構件20而固 定者，但若詳細加以說明，則如第6及7圖所示，反應管固 定構件20具體上係由諸如配設於内管8之凸緣部10之3處之 内管蓋21、用以支持内管8之内管承具22、用以固定内管蓋 21與内管承具22之公螺紋構件23所構成者。若詳細說明内 管蓋21之形狀，則内管蓋21係呈設有可供公螺紋構件23對 L字狀之構件插入之公螺紋構件插入孔24之形狀者。 若詳細說明内管承具22之形狀，則内管承具22具有内 徑與内管8之内徑大致一致而外徑與内管蓋21之外徑大致 一致之環狀之環狀部25。該環狀部25之側面則突出設置有 環狀之突起26。又，環狀部25之上面於3處形成有可與公螺 紋構件23螺接之母螺紋27 · 其次，就固定内管8與歧管12之順序加以具體說明。首 先，於内管8之凸緣部10之3處配設内管蓋21❶接著，對歧 管12之溝槽15嵌合内管承具22之突起26·然後，進行内管8 與内管承具22之中心、内管蓋21之公螺紋構件插入孔24與 内管承具22之母螺紋27之對位作業。其次，對内管蓋21之 公螺紋構件插入孔24插入公螺紋構件23以與内管承具22之 母螺紋27螺接。藉該螺接即可固定内管8與歧管12,並使其 等呈裝卸自如之狀態。 如上所述，藉以反應管固定構件20固定内管8與歧管 12,即可避免因地震等振動而使内管8對歧管12搖晃擺動， 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) 命 502299 A7 ____ B7_ 五、發明説明“） 並防止外管7、晶舟30及晶圓W等之碰撞，而防止其等之破 損。 (第2實施例） 以下，就本發明之第2實施例加以說明·另，以下並就 本實施例以後之實施例中與前述之實施例重複之内容說明 予以省略。本實施例之構造係構成於基板保持元件固定構 件之轴部形成有突起部，且形成有與保溫筒之基板保持元 件固定構件之突起部形狀相對應之開口部者。又，保溫筒 之下部並形成有突起部，且於保溫筒載置台上形成有與保 溫筒之突起部形狀相對應之孔部· 第8圓係模式地顯示本實施例之晶舟舆保溫筒之正面 圖。如第8圓所示，本實施例之晶舟1〇〇係構成具有三根支 柱101者。又，本實施例之保溫筒110則採用了以具有頂板 之略圓筒形之保溫筒罩111復蓋第1實施例之保溫筒40而成 之構造。 其次，就第8圖之小圓Α2及Β2所包面之部分加以詳細 說明。 首先，就第8圖之小圓Α2所包面之部分加以說明•第9 圓係模式地顯示第8圓之小圓Α2所包面部分之垂直截面 圓，第10圖係已分解第8圖之小圓Α2所包圍部分之各構件 之模式分解立醴圖· 如第9及10圖所示，晶舟100及保溫筒罩111上卡止有作 為基板保持元件固定構件之旋轉鎖固構件120。旋轉鎖固構 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) -訂丨 :線丨 •21- 502299 A7 ___B7_ 五、發明説明（9 ) 件120則係呈由可與晶舟100之底板102之環狀孔部103嵌合 之頭部121及由突起部122及支柱部123所構成之轴部一體 成形之形狀者 旋轉鎖固構件120之頭部121係於側面形成有落差者。 即，旋轉鎖固構件120之頭部121具有直徑大於底板102之環 狀部104之内徑之略圓板狀之大圓板部124,該大圓板部124 之下面側則以同心突出設置有直徑與底板102之環狀部104 之内徑大致一致之略圓板狀之小圓板部125。在此，藉使大 圓板部124之直徑大於底板102之環狀部104之内徑，即可防 止旋轉鎖固構件120通過底板102之環狀孔部103。 又，該大圓板部124係形成於使用旋轉鎖固構件120而 已固定晶舟100之底板102與保溫筒罩111時不致干擾保持 於晶舟100上之晶圓W之高度者。因此，即便使用旋轉鎖固 構件120，亦不致減少晶圓W之處理枚數。而，藉使該小圓 板部125之直徑與底板102之環狀部104之内徑大致一致，則 可對底板102之環狀孔部103嵌合，藉該嵌合即可確實地進 行旋轉鎖固構件120對晶舟100之定位❶ 轴部之突起部122具看略圓板狀之圓板部126，該圓板 部126之側面上則於3處突出設置有突起127。在此，當使用 該旋轉鎖固構件120固定晶舟100與保溫筒110時，雖有必要 使旋轉鎖固構件120朝一定方向旋轉，但為容易固定及安 裝，旋轉方向之突起127之前端部係形成厚度比中腹部及後 端部薄者。即，於突起127之上面自旋轉方向之前端部至中 腹部形成有傾斜面128。 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公爱） (請先閲讀背面之注意事項再填寫本頁) -訂丨 蛛 502299 A7 _B7_ 五、發明説明έ〇 ) (請先閲讀背面之注意事項再填寫本頁) 又，旋轉鎖固構件120自頭部121至突起部122形成有孔 洞129。藉形成該孔洞129，即可使處理氣體對晶圓W流動 順暢。 如第1實施例中所述，由減低轴部應力之觀點來看，旋 轉鎖固構件120宜由與晶舟100之底板102及保温筒罩111至 少任一方相同之材質所形成· 又，同樣地，以底板102與保溫筒罩111中熱膨脹係數 較大者之材質形成旋轉鎖固構件120較適宜，而，以同一材 質形成該等構件則更佳。 •線· 與第1實施例相同，晶舟100之底板102上突出設置有環 狀之凸部105，該凸部105則於2處突出設置有突起106。作 為保溫筒罩111之頂板之頂板部112上面則突出設置有内徑 與晶舟100之凸部105之外徑大致一致而外徑小於保溫筒 110之上底112之直徑之環狀之凸部113❶藉該凸部113而形 成之凸狀孔部114則可與晶舟100之凸部105嵌合。又，凸部 113則於2處形成有溝槽115,晶舟100之突起106則可與該溝 槽115嵌合。藉該嵌合即可更確實地進行晶舟100對保溫筒 110之定位❶ 進而，保溫筒110之頂板部112上設有與旋轉鎖固構件 120之突起部122形狀相對應之第2開口部之旋轉鎖固構件 插入孔部116。且，頂板部112係形成厚度於前端部插入附 近較薄，而可供旋轉鎖固構件120之突起127之前端部旋轉 者。具體而言，頂板部112之下面之前端部插入附近形成有 與自突起127之前端部朝中腹部形成之傾斜面128相對應之 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 502299 A7 _______— —__B7 五、發明説明έΐ ) 缺口 117 · 其次，就固定晶舟100舆保溫筒11〇之順序加以具體說 明。首先，對保溫筒110之凸狀孔部114及溝槽115嵌合晶舟 1〇〇之凸部1〇5友突起106。接著，以旋轉镇固構件12〇之頭 部121為上側並以突起部122為下㈣而將旋轉錢固構件 插入晶舟100之環狀孔部103及保温筒軍ηι之旋轉鎖固構 件插入孔部116。將旋轉領固構件⑶之突起部122插入保溫 筒罩Hi之旋轉鎮固構件插入孔部116後，則旋轉旋轉鎮固 構件120以使突起127之前端部鑽入保温筒軍1U之頂板部 ⑴之下面側。藉使突起127之前端部鑽人保溢筒⑴之頂板 部112之下面側，即可使旋轉錢固構件12〇卡止於保溫筒軍 111上，並固定晶舟100與保溫筒革111β因此可固定晶舟 100與保溫筒110並使其等呈裝卸自如之狀態。 明 如上所述，在本實施例中，藉於旋轉鎖固構 部形成突起127,並於保溢筒單lu形成舆突起127之形狀扭 對應之旋轉鎮固構件插入孔部116，即可固定晶舟⑽舆保 溫筒110並使其等呈裝卸自如之狀態。且，本實施例中，由 於僅以旋轉鎖固構件120固定晶舟100舆保溫筒110，故具有 可輕易裝卸旋轉鎖固構件120之特有效果。 ' 又，本實施例中，由於突起127形成有傾斜面128，且 頂板部112之下面形成有缺口 117,故旋轉鎖固構件12〇旋轉 時，突起127之邊緣不致舆構成旋轉鏑固構件插入孔部116 之内壁相撞而無法旋轉β且，可使旋轉鎖固構件12〇旋轉， 並固定晶舟100與保溫筒覃1U而使其等不致搖晃❼其原因 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) .訂· 4 •24· 502299 A7 ___ B7_ 五、發明説明fa ) 則在於隨著旋轉鎖固構件120之旋轉，與傾斜面128之缺口 117相接處亦可移動而更強力地固定保溫筒革π丨之故。 (請先閲讀背面之注意事項再填窝本頁) 其次，就第8圖之小圓B2所包圍之部分加以說明。第 11圖係模式地顯示第8圖之小圓32所包圍部分之垂直截面 圖，第12圓係已分解第8圏之小圓B2所包圍部分之各構件 之模式分解立體圖❼ 如第11及12圖所示，保溫筒110之下部與保溫筒載置台 140中插入有作為保溫筒固定構件之卡止銷150。首先，就 保溫筒罩111之下部形狀加以詳細說明。保溫筒革111之下 部於3處突出設置有突起部130。而，其中1處之突起部130 則形成有用以插入卡止銷150之略半圓柱狀之第1卡止銷插 入孔部131。 :線丨 其次，就保溫筒載置台140之形狀詳細加以說明。保溫 筒載置台140具有環狀之環狀部14P該環狀部141之上面側 則突出設置有卡止部144,係於略圓板狀之構件上設有與保 溫筒110之突起部130形狀相對應之保溫筒插入孔部142及 用以插入卡止銷150之第2卡止銷插入孔部143者。進而，卡 止部144之上面並突出設鲞有内徑大於自保溫筒11〇之中心 至突起部130外周之距離而外徑與卡止部144之外徑一致之 環狀之凸部145。卡止銷150則具有略圓板狀之圓板部151， 該圓板部151之下面側則突出設置有直徑小於圓板部151之 直徑之圓柱狀之轴部152。 接著，就固定保溫筒110與保溫筒載置台140之順序加 以具體說明。首先，對保溫筒載置台140之保溫筒插入孔部 本紙張尺度適用中國國家標準（CNS〉A4規格（210X297公爱） 502299 A7 _ B7_ 五、發明説明fo ) 142插入保溫筒110«其次’使已插入保溫筒插入孔部ία 之保溫筒110旋轉，以使保溫筒革111下部之突起部13〇錢入 保溫筒載置台140之下面側❷然後，在設於1處之突起部13〇 上之第1卡止銷插入孔部131與設於保溫筒載置台ι4〇上之 第2卡止銷插入孔部143—致之位置上使其停止旋轉β當第1 卡止銷插入孔部131與第2卡止銷插入孔部143之位置一致 而停止保溫筒罩111之旋轉後，則對第1卡止銷插入孔部131 與第2卡止銷插入孔部143插入卡止銷150。藉卡止銷150之 插入，即可固定保温筒110與保溫筒載置台140並使其等呈 裝卸自如之狀態。 如上所述，本實施例中，藉於保溫筒罩111之下部形成 突起部130,並於保溫筒載置台140形成與保溫筒罩in之突 起部130形狀相對應之保溫筒插入孔部142，即可固定保溫 筒110與保溫筒載置台140並使其等呈裝卸自如之狀態。 又，藉使保溫筒110下部之突起部130鑽入保溫筒載置 台140之下面，即可固定保溫筒110與保溫筒載置台14〇。 且，藉對第1卡止銷插入孔部131及第2卡止銷插入孔部143 插入卡止銷150，則可防止保溫筒110於熱處理中旋轉，而 可更確實地固定保溫筒110與保溫筒載置台140。 (第3實施例） 以下，就本發明之第3實施例加以說明。本實施例中， 於可相互嵌合之晶舟及保溫筒之側部形成有開口部，且基 板保持元件固定構件之轴部形成有突起部。又，保溫筒之 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公|) (請先閲讀背面之注意事項再填寫本頁) 紆丨 峰 -26· 502299 A7 __B7_ 五、發明説明) 底板上形成有溝槽，且不旋轉之保溫筒載置台形成有母螵 紋· (請先閲讀背面之注意事項再填窝本頁) 第13圖係模式地顯示本實施例之晶舟與保温筒之正面 圖。如第13圓所示，本實施例之晶舟160與保溫筒170之嵌 合部插入有形成有突起之作為基板保持元件固定構件之突 起形成銷180。又，本實施例之保溫筒載置台190並不具有 旋轉之機能。 其次，就第13圖之小圓A3及B3所包圍之部分加以詳細 說明。 首先，就第13圖之小圓A3所包圍之部分加以說明。 第14圖係模式地顯示第13圖之小圓A3所包圍部分之 垂直截面圖，第15圓係已分解第13圖之小圓A3所包圍部分 之各構件之模式分解立艘圖。 :線· 如第14及15圖所示，本實施例之晶舟160之底板161係 形成具有頂板部之呈略圓筒狀者。即，晶舟160之底板161 上形成有凹部162。又，晶舟160之底板161之侧部則形成有 與突起形成銷180形狀相對應之第1開口部之第1突起形成 銷插入孔部163〇 另，保溫筒170之頂板171具有環狀之環狀部172,該環 狀部172之上面側則突出設置有内徑與環狀部172之内徑大 致一致而外徑與晶舟160之底板161之外徑大致一致之環狀 之凸部173。該凸部173則可舆晶舟160之凹部162嵌合。進 而，凸部173之側部並形成有與突起形成銷180形狀相對應 之第2開口部之第2突起形成銷插入孔部174❼突起形成銷 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） -27- 502299 A7 ____B7___ 五、發明説明fc ) 180則呈一體形成有略圓板狀之圓板部181、於外周之局部 突出設置有板狀之突起部183之軸部182之形狀❶ 如第1實施例中所述，由減低轴部182應力之觀點來 看，突起形成銷180宜由與晶舟160之底板161及保溫筒170 之頂板171至少任一方相同之材質所形成· 又，同樣地，以.底板161與頂板171中熱膨脹係數較大 者之材質形成突起形成銷180較為適宜，而，以同一材質形 成該等構件則更佳。 其次，就固定晶舟160與保溫筒170之順序加以具體說 明。首先，對晶舟160之凹部162嵌合保溫筒170之凸部173。 接著，進行晶舟160上所形成之第1突起形成銷插入孔部163 與保溫筒170上所形成之凸部173之第2突起形成銷插入孔 部174之對位作業。將第1突起形成銷插入孔部163與第2突 起形成銷插入孔部174對位後，則對第1突起形成銷插入孔 部163與第2突起形成銷插入孔部174插入突起形成銷180， 並加以旋轉》藉加以旋轉，即可使突起部183之圓板部181 側之面與保溫筒170之凸部173内周面直接接觸而對晶舟 160及保溫筒170卡止突起形成銷180。藉該卡止即可固定晶 舟160與保溫筒170並使其等呈裝卸自如之狀態。 如上所述，本實施例中，藉將晶舟160舆保溫筒170嵌 合，並以形成有突起部183之突起形成銷180卡止晶舟160 與保溫筒170，即可確實地固定晶舟160與保溫筒170❼ 其次，就第13圖之小圓B3所包圍之部分加以說明。第 16圖係模式地顯示第13圖之小圓B3所包圍部分之垂直截 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公董） (請先閲讀背面之注意事項再填寫本頁) 命 4 -28- )U2299 A7 B7 五 、發明說明) 面圖，第17圖係已分解第13圏之小圆B3所包園部分之各構 件之模式分解立艘圖。 如第16及17圖所示，保溫筒170之底板175舆保溫筒載 置台190中播入有作為保溫筒固定構件之公螺紋構件200。 首先，就保溫筒170之底板175之形狀加以詳細說明。保溫 筒17〇之底板175係形成於環狀構件之4處設有用以插入公 塚紋構件200之略半圓柱狀之公螺纹構件插入溝176之形狀 者。 又，保溫筒載置台190則具有載置部192，係呈於略圓 板狀之構件之同心之4處設有用以與公媒紋構件2q〇螺接之 母螺紋191之形狀者。該載置部192之上面突出設置有内徑 大於保溫筒170之底板175之外徑、外徑大於栽置部192之直 徑之環狀之凸部193。 其次，就固定保溫筒17〇與保溫筒載置台之順年加 以具體說明。首先，將保溫筒170之底板175栽置於保溫筒 載置台190之載置部192上，以將公螺纹構件插入溝176與母 螺紋191對準❶然後，對公螺紋構件插入溝176及母螺紋191 插入公螺紋構件200,以使公螺紋構件2〇〇舆母端紋191螺 接。藉該螺接即可固定保溫筒170與保溫筒栽董台19〇，並 使其等呈裝卸自如之狀態❼ 如上所述，本實施例中，藉對保溫筒170與保溫筒载置 台190插入公螺紋構件2〇〇,即可輕易固定保溫筒17〇與保溫 筒載置台190 〇44- 502299 A7 ________B7 V. Description of the invention ί 2) 55❶ Here, if the diameter of the large circular plate portion 54 is larger than the inner diameter of the annular portion 34 of the base plate 32, the male screw member 51 can be prevented from passing through the annular hole portion of the base plate 32 37. On the other hand, if the diameter of the small circular plate portion 55 and the inner diameter of the annular portion 34 of the base plate 32 are substantially the same, the annular hole portion 37 of the base plate 32 can be fitted, and the male thread can be reliably performed by the coupling. The positioning of the member 51 to the wafer boat 30. A shaft portion 56 formed with a male screw is protruded from the lower surface of the small disc portion 55. Further, a female screw member 52 is formed in the thermal insulation tube 40, and a female screw 57 is formed so as to be screwable with the male screw of the shaft portion 56, and the male screw member 51 can be screwed through the thermal insulation tube insertion member 53. Here, the outer diameter of the female screw member 52 is smaller than the inner diameter of the annular portion 45 of the heat-retaining cylinder 40. A thermal insulation tube insertion member 53 is inserted between the pillars 43 of the thermal insulation tube 40 approximately horizontally. The heat-insulating barrel insertion member 53 is provided with a shaft portion insertion hole 58 into which the shaft portion 56 can be inserted. Here, the length of the heat-insulating tube insertion member 53 in the longitudinal direction is larger than the diameter of the annular hole portion 49 as the second opening portion of the heat-insulating tube 40. If the length of the heat-insulating tube insertion member 53 in the longitudinal direction is larger than the diameter of the annular hole portion 49 of the heat-insulating tube 40, the male thread of the shaft portion 56 that has protruded from the shaft-insertion insertion hole 58 of the heat-insulating tube insertion member 53 can be used. After screwing with the female threaded member 52, both ends of the heat-insulating cylinder inserting member 53 are locked under the top plate 41 of the heat-insulating cylinder 40, and the wafer boat 30 and the heat-insulating cylinder 40 are fixed. Here, the male screw member 51 is preferably formed of the same material as at least one of the bottom plate 32 of the wafer boat 30 and the top plate 41 of the thermal insulation tube 40. The reason is that if the male screw member 51 is formed of a material having a smaller thermal expansion coefficient than that of the bottom plate 32 and the top plate 41, the bottom plate 32 and the top plate 41 are thermally expanded in the axial direction of the shaft portion 56, which may cause stress on the shaft portion 56. The paper size that caused the damage of the shaft 56 is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling in this page) • Order 丨: Line · -15- 502299 A7 _B7_ V. Description of Invention (3) Further, comparing the material of the bottom plate 32 and the material of the top plate 41, it can be seen that it is more appropriate to form the male screw member 51 with the same material as the material having a larger thermal expansion coefficient. The reason is that forming the male screw member 51 with a material having a large thermal expansion coefficient can reduce the stress of the shaft portion 56 more than a material with a small thermal expansion coefficient. In addition, if the bottom plate 32 of the wafer boat 30, the top plate 41 of the thermal insulation tube 40, and the male screw member 51 can be formed of the same material, the stress of the shaft portion 56 can be further reduced, so it will be more suitable. In addition to 32, etc., if the female threaded member 52 and the insulation tube insertion member 53 are also formed of the same material, the stress of the shaft portion 56 can be minimized, so this is the most suitable. In addition, if the thermal expansion coefficient is higher than that of the bottom plate 32 and the top plate If the male screw member 51 is formed of a material with a large material of 41, the fixing force may decrease due to the expansion in the axial direction of the shaft portion 56. Next, the order of fixing the wafer boat 30 and the thermal insulation tube 40 will be specifically described. First, the convex holes 35 and the protrusions 36 of the ring-shaped portion 34 of the wafer boat 30 are fitted to the convex hole portions 47 and the grooves 48 of the top plate 41 of the thermal insulation tube 40, respectively. Next, the male threaded member 51 is inserted into the male threaded member insertion hole 58 on the thermal insulation tube insertion member 53 which has been inserted approximately horizontally between the pillars 43 of the thermal insulation tube 40 from the annular portion 34 side of the wafer boat 30. Furthermore, the male screw member 51 inserted into the male screw member insertion hole 58 and the female screw member 52 are screwed. By this screw connection, the crystal boat 30 and the heat insulation tube 40 can be fixed, and they can be placed in a freely detachable state. As mentioned above, the wafer boat 30, the heat preservation tube 40, and the wafer boat fixing member 50 are used for fixing, and even if it is mounted or unloaded in the standby tube and in the reaction tube, the Chinese paper standard (CNS) A4 (210X297 mm) is applicable for this paper size. ) (Please read the precautions on the back before filling this page) -Order 丨 46- 502299 A7 ___ B7_ V. Description of the invention (4) During the processing in the reaction tube, the wafer boat 30 can also be prevented from overturning. Also, since the crystal boat 30 and the thermal insulation tube 40 will be mounted inside the inner tube 8, the crystal boat 30 and the thermal insulation tube 40 will also adhere to the constituent materials of the processing vessel. If the heat treatment is continued in a state where the attached matter is attached, the problem that the attached matter is peeled off from the wafer boat 30 and the thermal insulation tube 40 and contaminates the wafer w will occur. Therefore, although the wafer boat must be regularly cleaned with such as argon fluoride 30 and the thermal insulation tube 40, but since the wafer boat 30 directly holds the wafer W, its cleaning frequency should be increased, and it should be performed separately from the thermal insulation tube with a lower cleaning frequency. Since the boat fixing member 50 with the boat 30 and the holding tube 40 fixed in this embodiment is detachable, the boat fixing member 50 can be removed to separate the boat 30 and the holding tube 40, and only the crystal can be cleaned. Boat 30. In order to prevent contamination of metals and the like inside the heat treatment apparatus 1, it is preferable not to use a special tool. In this embodiment, by rotating the male threaded member 5 j by hand, the wafer boat 30 and the thermal insulation tube 40 can be fixed without special tools β and 'general and s' in order to make the processing gas vessel flow smoothly to the wafer W, An annular hole is formed on the bottom plate of the existing crystal boat and the top plate of the thermal insulation tube. By cooperating with the size of the annular hole portion to form the wafer boat fixing member 50, the existing wafer boat and the heat preservation tube can be fixed without changing the size of the annular hole portion. Next, the part enclosed by small 1ΪΒ1 in Figure 1 will be explained. Β Figure 4 is a vertical cross-sectional view schematically showing the portion of the circle enclosed by small circle B1 of the first circle. The fifth circle has been exploded in Figure 1 An exploded perspective view of the components of the packaged circle portion of the small circle B1. · As mentioned above, although the outline shape of the bottom plate 42 of the thermal insulation tube 40 is formed in a ring shape, if it is described in detail, it is shown in Figures 4 and 5. The bottom plate 42 of the thermal insulation tube 40 has a ring-shaped portion 90 formed in a ring shape. The paper size below the ring portion 90 applies the Chinese National Standard (CNS) A4 specification (210X297 public love) (please read the precautions on the back before filling in this page)., ^ 丨 • 17 · 502299 A7 _B7_ Five Description of the invention ¢ 5) On the side, a ring-shaped convex portion 91 having an inner diameter larger than the inner diameter of the ring-shaped portion 90 and an outer diameter smaller than the outer diameter of the ring-shaped portion 90 is protrudingly provided. In the shape of 70, the heat-insulating cylinder mounting table 70 has a mounting portion 71 having a shape in which holes are formed at three positions on a member having a substantially circular plate shape. On the upper side of the mounting portion 71, a ring-shaped convex portion 72 having an inner diameter substantially equal to the outer diameter of the convex portion 91 of the heat-retaining cylinder 40 and having an outer diameter smaller than the diameter of the mounting portion 71 is protruded. In addition, the hole is provided as a central portion 73 of the remaining circular plate, and by connecting the central portion 73 to a rotating shaft connected to a motor (not shown), the central portion 73 can be used as a shaft to rotate the heat-insulating tube mounting table 70. In addition, the convex hole portions 74 formed by the convex portions 72 can be fitted into the convex portions 91 of the bottom plate 42 of the thermal insulation tube 40, and further, six convex portions 72 are formed in groups of two. Female thread 75❶ which can be screwed with the male thread member 81 described later. The bottom plate 42 of the insulated heat insulation tube 40 and the heat insulation tube mounting platform 70 are installed at three places. The bottom plate 42 and the heat insulation tube can be fixed freely and can be fixed. The heat insulation tube fixing member 80 of the table 70. Specifically, the heat insulation tube fixing member 80 is a hook such as a male screw member 81, a hook portion 82, and a male screw member insertion hole 83 having the same diameter as 81 at two places. Formed by the shape member 84. The hook-shaped member 84 is formed in the shape of the outer peripheral surface of the annular portion 90 along the row of the thermal insulation tube 40 and the external peripheral surface of the convex portion 72 of the thermal insulation tube mounting table 70. Next, the procedure of fixing the heat insulation tube 40 and the heat insulation tube mounting table 70 will be described in detail. First, the convex hole portion 74 of the heat insulation tube mounting table 70 is fitted into the convex portion 91 of the bottom plate 42 of the heat insulation tube 40, and then, a hook shape is arranged at three positions of the fitted heat insulation tube 40 and the heat insulation tube mounting table 70. Component 84 so that the hook 82 engages with this paper. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page) • Order 丨-48- 502299 A7 B7 V. Description of the invention 彳 6) Please; First: Read · Read! Back: Face · Note: · Note · Matter: Item: Then: S text: Page: Above the bottom plate 42 of the insulation tube 40. Then, after the alignment operation of the male screw member insertion hole 83 and the female screw 75 of the hook member 84 is completed, the male screw member 81 is inserted from the male screw member insertion hole 83 toward the female screw 75 so that the male screw member 81 faces the female screw. 75 螵 Connection • The heat-insulating tube 40 and the heat-insulating tube mounting table 70 can be fixed by the screw connection, so that they can be easily detached. As described above, the heat-insulating tube fixing member 80 fixes the bottom plate 42 of the heat-insulating tube 40 and The thermal insulation tube mounting table 70 can prevent the thermal insulation tube 40 from shaking and oscillating to the thermal insulation tube mounting table 70 due to vibration such as earthquake. As a result, it is possible to more effectively prevent the wafer boat 30 from overturning. In general, in order to make the processing gas flow smoothly to the wafer W, a ring-shaped hole portion and a hole are formed on the bottom plate of the existing thermal insulation tube and the thermal insulation tube mounting table. In addition, by installing the thermal insulation tube fixing member 80 on the outer periphery of the thermal insulation tube and the thermal insulation tube mounting platform, the existing thermal insulation tube and thermal insulation tube mounting platform can be fixed without blocking the annular hole portion and the hole. Furthermore, as described above, since the heat-retaining tube 40 is inserted into the inner tube 8, a thin film-forming substance will also adhere to the heat-retaining tube 40. Since the holding cylinder 40 does not directly hold the wafer W, the cleaning frequency is less than that of the wafer boat 30, but it must be cleaned in the same manner as the wafer boat 30. Here, the 'thermotube 40' and the heat-insulating tube mounting table 70 should be separated and cleaned to avoid workability problems. Since the heat insulation tube fixing member 80 fixing the heat insulation tube 40 and the heat insulation tube mounting table 70 of this embodiment is detachable, the heat insulation tube fixing member 80 can be removed to separate the heat insulation tube 40 and the heat insulation tube mounting table 70, and Only the thermal insulation cylinder 40 is cleaned. Next, the part enclosed by small circle C1 in Figure 1 is explained. • Figure 6 shows the vertical cross-section of the part surrounded by small circle C1 in Figure 1. This paper is based on the Chinese National Standard (CNS) A4 specification ( 210X297 mm) -19- 502299 A7 _B7_ V. Description of the invention) Figure 7, Figure 7 is a three-dimensional model of the components of the part enclosed by the small circle C1 in Figure 1 that has been exploded. As described above, the inner tube 8 and the manifold 12 are fixed by the reaction tube fixing member 20, but if explained in detail, as shown in FIGS. 6 and 7, the reaction tube fixing member 20 is specifically provided by Inner tube cover 21 at three positions of flange portion 10 of inner tube 8, inner tube holder 22 for supporting inner tube 8, and male screw member 23 for fixing inner tube cover 21 and inner tube holder 22. Constructor. If the shape of the inner tube cover 21 is described in detail, the inner tube cover 21 has a shape provided with a male screw member insertion hole 24 into which a male screw member 23 can be inserted into an L-shaped member. If the shape of the inner tube holder 22 is described in detail, the inner tube holder 22 has a ring-shaped annular portion 25 whose inner diameter is substantially the same as the inner diameter of the inner tube 8 and whose outer diameter is substantially the same as the outer diameter of the inner tube cover 21. . A ring-shaped protrusion 26 is provided on a side surface of the ring-shaped portion 25. In addition, female threads 27 are formed on the upper surface of the annular portion 25 at three positions to be screwable with the male screw member 23. Next, the procedure for fixing the inner tube 8 and the manifold 12 will be described in detail. First, an inner tube cover 21 is provided at three positions of the flange portion 10 of the inner tube 8. Next, the grooves 15 of the manifold 12 are fitted into the protrusions 26 of the inner tube holder 22. Then, the inner tube 8 and the inner tube are carried out. The center of the holder 22, the male screw member insertion hole 24 of the inner tube cover 21 and the female screw 27 of the inner tube holder 22 are aligned. Next, the male screw member 23 is inserted into the male screw member insertion hole 24 of the inner tube cover 21 to be screwed with the female screw 27 of the inner tube holder 22. By this screw connection, the inner pipe 8 and the manifold 12 can be fixed, so that they can be detached freely. As described above, by fixing the inner tube 8 and the manifold 12 with the reaction tube fixing member 20, the inner tube 8 can be prevented from shaking to the manifold 12 due to vibrations such as earthquakes. This paper standard applies to China National Standard (CNS) A4 (210X297 mm) (Please read the precautions on the back before filling this page) Life 502299 A7 ____ B7_ V. Description of the invention ") And prevent the collision of the outer tube 7, wafer boat 30 and wafer W, etc. (Second embodiment) Hereinafter, the second embodiment of the present invention will be described. In addition, the following description of the content that overlaps with the previous embodiment in the following and subsequent embodiments will be omitted. This embodiment The structure is a structure in which a protruding portion is formed on a shaft portion of the substrate holding element fixing member, and an opening portion corresponding to the shape of the protruding portion of the substrate holding element fixing member of the thermal insulation tube is formed. In addition, a lower portion of the thermal insulation tube is formed A protruding portion, and a hole portion corresponding to the shape of the protruding portion of the thermal insulation tube is formed on the thermal insulation tube mounting table. The eighth circle system schematically shows a front view of the crystal boat thermal insulation tube of this embodiment. Show The crystal boat 100 of this embodiment is composed of three pillars 101. In addition, the heat insulation tube 110 of this embodiment uses a slightly cylindrical heat insulation tube cover 111 having a top plate to cover the heat insulation of the first embodiment. The structure formed by the cylinder 40. Next, the details of the surface covered by the small circles A2 and B2 in FIG. 8 will be described in detail. First, the portion of the surface covered by the small circles A2 in FIG. 8 will be described. The vertical cross-section circle of the part enclosed by the small circle A2 of the 8th circle is shown in a pattern, and the figure 10 is a exploded model diagram of each component of the part enclosed by the small circle A2 of FIG. 8 as shown in FIGS. 9 and 10. As shown in the figure, the wafer boat 100 and the heat preservation cylinder cover 111 are locked with a rotation locking member 120 as a fixing member of the substrate holding member. The rotation locking structure is adapted to the Chinese National Standard (CNS) A4 specification (210X297 mm). (Please read the precautions on the back before filling this page) -Order 丨: Line 丨 • 21- 502299 A7 ___B7_ V. Description of the invention (9) The 120 pieces are annular holes that can be connected to the bottom plate 102 of the crystal boat 100 The head portion 121 to which the portion 103 is fitted, and the shaft portion composed of the protruding portion 122 and the pillar portion 123 The shape 121 of the body shape is formed by a head 121 of the rotation locking member 120 formed on the side. That is, the head 121 of the rotation locking member 120 has a slightly circular plate having a diameter larger than the inner diameter of the annular portion 104 of the bottom plate 102. The large circular plate portion 124 is shaped like a circular plate, and a small circular plate portion 125 having a diameter substantially the same as the inner diameter of the annular portion 104 of the bottom plate 102 is protruded concentrically. Here, If the diameter of the large circular plate portion 124 is larger than the inner diameter of the annular portion 104 of the bottom plate 102, the rotation locking member 120 can be prevented from passing through the annular hole portion 103 of the bottom plate 102. The large circular plate portion 124 is formed at the height of the wafer W held on the wafer boat 100 without disturbing the bottom plate 102 of the wafer boat 100 and the heat preservation cylinder cover 111 using the rotation locking member 120. Therefore, even if the rotation lock member 120 is used, the number of processed wafers W is not reduced. In addition, if the diameter of the small circular plate portion 125 and the inner diameter of the annular portion 104 of the base plate 102 are substantially the same, the annular hole portion 103 of the base plate 102 can be fitted, and the fitting can be reliably rotated. The locking member 120 positions the wafer boat 100. The protruding portion 122 of the shaft portion includes a circular plate portion 126 having a circular plate shape. The side of the circular plate portion 126 is provided with protrusions 127 protruding at three places. Here, when using the rotary locking member 120 to fix the wafer boat 100 and the thermal insulation barrel 110, although it is necessary to rotate the rotary locking member 120 in a certain direction, for easy fixing and installation, the front end of the protrusion 127 in the rotation direction It is thinner than the mid-abdomen and the rear end. That is, an inclined surface 128 is formed on the upper surface of the protrusion 127 from the front end to the mid-abdomen in the rotation direction. This paper size applies to China National Standard (CNS) A4 specifications (210X297 public love) (Please read the precautions on the back before filling this page)-Order 丨 502502 A7 _B7_ V. Description of the invention (Please read the back Note that this page will be filled in again.) Furthermore, a hole 129 is formed in the rotation locking member 120 from the head 121 to the protrusion 122. By forming the hole 129, the processing gas can flow smoothly to the wafer W. As described in the first embodiment, from the viewpoint of reducing the stress of the shaft portion, the rotation locking member 120 should preferably be made of the same material as at least one of the bottom plate 102 and the heat preservation cylinder cover 111 of the wafer boat 100. Also, the same Ground, it is more suitable to form the rotation locking member 120 with the material with the larger thermal expansion coefficient in the bottom plate 102 and the thermal insulation cylinder cover 111, and it is better to form the members with the same material. • Line · Similar to the first embodiment, the bottom plate 102 of the wafer boat 100 is provided with a ring-shaped convex portion 105 protruding therefrom, and the convex portion 105 is provided with protrusions 106 protruding from two places. The top plate portion 112 serving as the top plate of the heat insulation barrel cover 111 is provided with a ring-shaped convex portion whose inner diameter is approximately the same as the outer diameter of the convex portion 105 of the crystal boat 100 and whose outer diameter is smaller than the diameter of the upper and lower portions 112 of the heat insulation barrel 110. 113: The convex hole portion 114 formed by the convex portion 113 can be fitted into the convex portion 105 of the wafer boat 100. Further, grooves 115 are formed at the convex portions 113 at two places, and the protrusions 106 of the wafer boat 100 can be fitted into the grooves 115. By this fitting, the wafer boat 100 can be more accurately positioned to the heat insulation tube 110. Furthermore, the top plate portion 112 of the heat insulation tube 110 is provided with a second opening corresponding to the shape of the protruding portion 122 of the rotation locking member 120. The rotation locking member is inserted into the hole portion 116. In addition, the top plate portion 112 is formed so as to be thinner in the vicinity of the insertion portion of the front end portion, and can be rotated at the front end portion of the protrusion 127 of the rotation lock member 120. Specifically, the paper size corresponding to the inclined surface 128 formed from the front end of the protrusion 127 toward the mid-abdomen near the insertion of the lower front end of the top plate portion 112 is applicable to the Chinese National Standard (CNS) A4 (210X297 mm) ) 502299 A7 _______ — —__ B7 V. Description of the invention) Notch 117 · Secondly, the order of fixing the crystal boat 100 and the thermal insulation tube 11 will be described in detail. First, the convex portion 106 of the wafer boat 100 is fitted into the convex hole portion 114 and the groove 115 of the thermal insulation tube 110. Next, with the head 121 of the rotating stabilizing member 12 as the upper side and the protrusion 122 as the chin, the rotating money fixing member is inserted into the annular hole portion 103 of the crystal boat 100 and the rotation locking member of the thermal insulation tube army.孔 部 116。 The hole portion 116. After inserting the protruding portion 122 of the rotating collar fixing member ⑶ into the rotating stabilizing member insertion hole 116 of the heat insulation cylinder cover Hi, the rotation fixing member 120 is rotated so that the front end of the protrusion 127 is drilled into the top plate portion of the heat insulation tube army 1⑴ The lower side. If the front end of the protrusion 127 is drilled on the lower side of the top plate portion 112 of the overflow tube ，, the rotating money fixing member 120 can be locked on the heat insulation tube army 111, and the wafer boat 100 and the heat insulation tube leather 111β can be fixed. The wafer boat 100 and the heat-preserving cylinder 110 are fixed and placed in a detachable state. As described above, in this embodiment, the protrusions 127 are formed by the rotation locking structure portion, and the rotation-stabilizing member corresponding to the shape of the protrusion 127 is inserted into the hole portion 116 to form a protrusion 127 on the overflow tube unit 1o, and the crystal can be fixed. The Zhouyiyu thermal insulation tube 110 is in a state of being easily removable. Moreover, in this embodiment, since the wafer boat 100 and the heat insulation barrel 110 are fixed only by the rotation locking member 120, there is a special effect that the rotation locking member 120 can be easily attached and detached. In addition, in this embodiment, since the protrusion 127 is formed with an inclined surface 128 and a notch 117 is formed below the top plate portion 112, when the rotation locking member 12 is rotated, the edge of the protrusion 127 may not be inserted into a rotation fixing member. The inner wall of the hole 116 collides and cannot rotate β, and can rotate the rotation locking member 120, and fix the wafer boat 100 and the thermal insulation tube Qin 1U so as not to shake, etc. The reason for this paper is that the Chinese national standard ( CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling this page). Order · 4 • 24 · 502299 A7 ___ B7_ V. Description of the invention fa) It is with the rotation of the rotating locking member 120 The contact with the notch 117 of the inclined surface 128 can also be moved to fix the thermal insulation tube leather π 丨 more strongly. (Please read the notes on the back before filling in this page.) Next, the part enclosed by the small circle B2 in Figure 8 will be explained. Fig. 11 is a vertical sectional view schematically showing a portion surrounded by a small circle 32 in Fig. 8, and a 12th circle is a exploded perspective view of each component of the portion surrounded by a small circle B2 in Fig. 8; As shown in FIG. 12, a locking pin 150 as a fixing member of the heat insulation tube is inserted into the lower part of the heat insulation tube 110 and the heat insulation tube mounting table 140. First, the shape of the lower portion of the thermal insulation cover 111 will be described in detail. The lower part of the thermal insulation barrel leather 111 is provided with protrusions 130 at three places. In addition, one of the protruding portions 130 forms a first semi-cylindrical first locking pin insertion hole portion 131 for inserting the locking pin 150. : Line 丨 Next, the shape of the heat-insulating tube mounting table 140 will be described in detail. The heat-insulating tube mounting table 140 has a ring-shaped ring portion 14P, and the upper side of the ring-shaped portion 141 is provided with a locking portion 144 protrudingly. Corresponding heat-insulating cylinder insertion hole 142 and a second locking pin insertion hole 143 for inserting the locking pin 150. Further, a ring-shaped convex portion 145 having an inner diameter larger than the distance from the center of the heat-preserving cylinder 110 to the outer periphery of the protruding portion 130 and having an outer diameter consistent with the outer diameter of the locking portion 144 is protruded on the upper surface of the locking portion 144. The locking pin 150 has a circular plate portion 151 having a slightly circular plate shape. A cylindrical shaft portion 152 having a diameter smaller than the diameter of the circular plate portion 151 is protrudingly provided on the lower side of the circular plate portion 151. Next, the order of fixing the heat insulation tube 110 and the heat insulation tube mounting table 140 will be described in detail. First of all, the thermal insulation tube insertion hole of the thermal insulation tube mounting table 140 applies the Chinese national standard (CNS> A4 specification (210X297)) 502299 A7 _ B7_ V. Description of the invention 142 Insert the thermal insulation tube 110 «second ' The thermal insulation tube 110 inserted into the thermal insulation tube insertion hole portion α is rotated so that the protruding portion 130 in the lower portion of the thermal insulation barrel leather 111 enters the lower side of the thermal insulation tube mounting table 140, and then is placed on the protruding portion 13 located at one place. The first locking pin insertion hole portion 131 and the second locking pin insertion hole portion 143 provided on the heat-insulating cylinder mounting table 401 stop rotating at a position β when the first locking pin insertion hole portion 131 After stopping the rotation of the thermal insulation cover 111 in accordance with the position of the second locking pin insertion hole portion 143, the locking pin 150 is inserted into the first locking pin insertion hole portion 131 and the second locking pin insertion hole portion 143. By inserting the locking pin 150, the heat-retaining cylinder 110 and the heat-retaining-tube placing table 140 can be fixed and can be detached. As described above, in this embodiment, the protruding portion 130 is formed by the lower portion of the thermal insulation cover 111, and the thermal insulation tube insertion hole 142 corresponding to the shape of the protruding portion 130 of the thermal insulation cover is formed on the thermal insulation tube mounting table 140, That is, the heat insulation tube 110 and the heat insulation tube mounting platform 140 can be fixed and placed in a state where they can be detached easily. In addition, the heat-insulating tube 110 and the heat-insulating tube mounting table 14 can be fixed by drilling the protrusions 130 at the lower portion of the heat-insulating tube 110 under the heat-insulating tube mounting table 140. In addition, by inserting the locking pin 150 into the first locking pin insertion hole portion 131 and the second locking pin insertion hole portion 143, the heat insulation tube 110 can be prevented from rotating during heat treatment, and the heat insulation tube 110 and the heat insulation tube 110 can be more reliably fixed. Insulation tube mounting platform 140. (Third Embodiment) A third embodiment of the present invention will be described below. In this embodiment, an opening portion is formed in a side portion of the wafer boat and the heat-preserving cylinder that can be fitted to each other, and a protruding portion is formed in a shaft portion of the substrate holding member fixing member. In addition, the paper size of the insulation tube applies the Chinese National Standard (CNS) A4 specification (210X297 male |) (Please read the precautions on the back before filling this page) 纡 丨 Feng-26 · 502299 A7 __B7_ V. Description of the invention A groove is formed on the non-rotating insulation tube mounting table with a female pattern. (Please read the precautions on the back before filling this page.) Figure 13 schematically shows the wafer boat and insulation tube of this embodiment. The front view. As shown in the thirteenth circle, a projection forming pin 180 as a substrate holding member fixing member is formed in the engaging portion of the crystal boat 160 and the heat-retaining tube 170 of this embodiment. In addition, the heat-retaining-tube mounting table 190 of this embodiment does not have a rotating function. Next, the portions enclosed by small circles A3 and B3 in Fig. 13 will be described in detail. First, a portion surrounded by a small circle A3 in FIG. 13 will be described. FIG. 14 is a vertical sectional view schematically showing a portion surrounded by a small circle A3 in FIG. 13, and a 15th circle is a model exploded view of each component of the portion surrounded by a small circle A3 in FIG. 13. : Line · As shown in Figs. 14 and 15, the bottom plate 161 of the wafer boat 160 of this embodiment is formed into a substantially cylindrical shape having a top plate portion. That is, the bottom plate 161 of the wafer boat 160 is formed with a concave portion 162. In addition, a side of the bottom plate 161 of the wafer boat 160 is formed with a first protrusion forming pin insertion hole portion 163 corresponding to the shape of the protrusion forming pin 180. In addition, the top plate 171 of the heat insulation tube 170 has an annular shape. A ring-shaped portion 172 is provided on the upper side of the ring-shaped portion 172 with a convex portion having an inner diameter approximately the same as the inner diameter of the annular portion 172 and an outer diameter substantially the same as the outer diameter of the bottom plate 161 of the wafer boat 160. 173. The convex portion 173 can be fitted into the concave portion 162 of the crystal boat 160. Furthermore, the second protrusion forming pin insertion hole 174 of the second opening corresponding to the shape of the protrusion forming pin 180 is formed on the side of the convex portion 173, and the protrusion forming pin is compliant with the Chinese National Standard (CNS) A4 standard ( 210X297 mm) -27- 502299 A7 ____B7___ 5. Description of the invention fc) 180 is a shaft portion 182 which is formed integrally with a slightly circular plate-shaped circular plate portion 181, and a portion of the outer periphery is provided with a plate-shaped projection portion 183 Shape ❶ As described in the first embodiment, from the viewpoint of reducing the stress of the shaft portion 182, the protrusion forming pin 180 is preferably formed of the same material as at least one of the bottom plate 161 of the wafer boat 160 and the top plate 171 of the heat insulation tube 170. · Similarly, it is more appropriate to form the protrusion forming pins 180 with a material having a larger thermal expansion coefficient in the bottom plate 161 and the top plate 171, and it is more preferable to form the members with the same material. Next, the order of fixing the wafer boat 160 and the thermal insulation tube 170 will be specifically described. First, the concave portion 162 of the wafer boat 160 is fitted to the convex portion 173 of the thermal insulation tube 170. Next, the alignment operation of the first protrusion forming pin insertion hole portion 163 formed on the wafer boat 160 and the second protrusion forming pin insertion hole portion 174 formed on the convex portion 173 formed on the heat insulation tube 170 is performed. After aligning the first protrusion forming pin insertion hole portion 163 and the second protrusion forming pin insertion hole portion 174, the protrusion forming pin 180 is inserted into the first protrusion forming pin insertion hole portion 163 and the second protrusion forming pin insertion hole portion 174. By rotating it, the surface of the circular plate portion 181 side of the protruding portion 183 and the inner peripheral surface of the convex portion 173 of the heat insulation tube 170 can be directly contacted, and the protrusions can be locked on the wafer boat 160 and the heat insulation tube 170. 180. By this locking, the wafer boat 160 and the heat-retaining tube 170 can be fixed and placed in a freely detachable state. As described above, in this embodiment, the wafer boat 160 can be reliably fixed by fitting the wafer boat 160 and the heat insulation tube 170 and locking the wafer boat 160 and the heat insulation tube 170 with the protrusion forming pins 180 formed with the protrusions 183. 160 and thermal insulation tube 170❼ Next, the portion surrounded by the small circle B3 in FIG. 13 will be described. Figure 16 is a model showing the vertical section of the part enclosed by the small circle B3 in Figure 13. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297). (Please read the precautions on the back before filling this page) Life 4 -28-) U2299 A7 B7 V. Description of the invention) The surface drawing, Figure 17 is a exploded model drawing of the components of the Yuanyuan B3 packaged part of the 13th circle. As shown in Figs. 16 and 17, the bottom plate 175 of the thermal insulation tube 170 and the thermal insulation tube mounting table 190 broadcast a male threaded member 200 as a thermal insulation tube fixing member. First, the shape of the bottom plate 175 of the thermal insulation tube 170 will be described in detail. The bottom plate 175 of the thermal insulation tube 17 is formed in the shape of a ring-shaped member with a slightly semi-cylindrical male screw member insertion groove 176 provided at four positions for inserting the male gravel pattern member 200. In addition, the heat-retaining cylinder mounting base 190 has a mounting portion 192, which is formed in a shape of a female screw 191 for screw connection with a male pattern member 2q0 at four concentric positions of a slightly circular plate-shaped member. An annular convex portion 193 having an inner diameter larger than the outer diameter of the bottom plate 175 of the thermal insulation tube 170 and an outer diameter larger than the diameter of the mounting portion 192 is protrudingly provided on the upper portion of the mounting portion 192. Next, the specific year of fixing the heat-retaining tube 17 and the heat-retaining tube mounting table will be specifically described. First, the bottom plate 175 of the thermal insulation tube 170 is placed on the mounting portion 192 of the thermal insulation tube mounting table 190 to align the male screw member insertion groove 176 with the female screw 191. Then, insert the male screw member into the groove 176 and the female screw. The screw thread 191 is inserted into the male screw member 200 so that the male screw member 200 and the female end ridge 191 are screwed together. By this screw connection, the heat insulation tube 170 and the heat insulation tube planting platform 19 can be fixed and can be detached. As described above, in this embodiment, the heat insulation tube 170 and the heat insulation tube mounting table 190 are inserted. The male screw member 200 can easily fix the heat preservation tube 17 and the heat preservation tube mounting table 190.
本紙張尺度適用中國國家標準（CNS) A4規格（210X297公D (請先閲讀背面之注意事項再填窝本頁) •裝· -29· 502299This paper size applies to China National Standard (CNS) A4 specifications (210X297 male D (please read the precautions on the back before filling in this page) • Packing · -29 · 502299
(第1實施例之變形例） 第18囷係模式地顯示第1實施例之變形例之保溫筒與 保溫筒載置台之分解立體圓〇 第1實施例中，具有略環狀之底板42之保溫筒4〇與保溫 筒載置台70雖係藉公螺紋構件81而固定者，但如第18圓所 示，即便是具有保溫筒罩211之保溫筒21〇亦可藉公螺紋構 件220而固定於保溫筒載置台230上❼ 保溫筒革211之概略形狀具有略圓筒狀之保溫筒軍本 體部212,該保溫筒罩本體部212之外周面則於3處突出設置 有突起部213 β其次，就該保溫筒罩本體部212之形狀加以 詳細說明。保溫筒革本髖部212上朝半徑方向貫通突起部 213而設有孔洞214。而，保溫筒載置台230之形狀與保溫筒 載置台70大致相同，凸部231之外徑則與保溫筒革211之内 徑大致一致，而可對形成於保溫筒罩211之内周面上之凹部 215後合凸部231。 又，當固定保溫筒210舆保溫筒載置台230時，則使用 於2處形成有可插入公螺紋構件22〇之公螺纹構件插入孔部 221之塊狀構件222 β 定 (請先閲讀背面之注意事項再填窝本頁) 其次，就固定保溫筒210與保溫筒載置台230之順序加 以具艘說明•首先，對保溫筒210之凹部215嵌合保溫筒載 置台230之凸部231，並對保溫筒罩之孔洞214插入塊狀構件 222。然後，在公螺紋構件插入孔部221與母螺紋232之對位 作業後，對公螺紋構件插入孔部221插入公螺紋構件220， 以使公螺紋構件220與母螺纹232螵接❶藉該螺接即可固 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐） 502299 --------- —_B7 ___ 五、發明説明fa ) 保溫筒210與保溫筒栽置台23〇，並使其等呈裝卸自如之狀 - 態。 (第4實施例） 以下’就本發明之第4實施例加以說明。本實施例中， 可固定無頂板之保溫筒與晶舟，且可使用保溫筒承具固定 •保溫筒與保溫筒載置台。 第19囷係模式地顯示本實施例之晶舟310、保溫筒 320、保溫筒承具330、保溫筒載置台34〇之局部截面圖。又， 第20(A)〜(B)圓分別係第19圓之小圓A4、B4内之放大圖。 另’為便於觀察了解，在後述之公螺紋構件37〇對螵紋穴333 插入時之狀態方面，第2〇(B)圓與第19圖不同。 如第19圖所示，蓋髅350上、保溫筒載置台340上、保 溫筒承具330上、保温筒320上分別載置有保溫筒載置台 I 340、保溫筒承具330、保溫筒32〇、晶舟31〇。晶舟31〇則具 有支柱311及底板312。另，圖示中已省略頂板。保溫筒32〇 則係由支柱321、重疊多片雨固定於支柱321上之散熱片322 及與支柱321—馥形成之‘板323所構成者，並不具有頂板。 _ 晶舟310之底板312上及支柱321之上端分別對應形成 有貫通孔313及凹部314、碟纹穴324及突起部325。底板312 與支柱321係經貫通孔川及琢故穴似而為作為基板保持 元件固定構件之公燦故構件360所固定者。公媒纹構件36〇 係由略圓板狀之頭部361及輛部362所構成者，轴部362則係 由略圓柱狀之連結部363及比連結部363小徑之螵紋部364 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐〉 (請先閲资背面之注意事項再填寫本頁) •、^1丨 :線· •31- 502299 A7 _B7_ 五、發明説明fe ) 所構成者。連結部363可貫插貫通孔313，其下端並與支柱 321之上端直接接觸。連結部363之長度dl則比底板312之板 .厚d2大。因此，頭部361與底板312之上面形成有厚度A d(=dl - d2)之間隙❶厚度△ d則為諸如1mm以下❼ 該間陈係為防止各構件之熱膨脹所引起之應力導致破 損而設者。該熱膨脹所引起之應力在各構件之材料不同時 更成問題。舉例言之，底板312係以碳化矽（SiC)形成者， 而支柱321與公螺紋構件360係以石英形成者》由於碳化矽 之熱膨脹率比石英大，故一旦形成高溫，底板312之板厚d2 將以比連結部363之長度dl大之比率膨脹。因此，若底板312 與頭部361間於常溫下無間陈，則加熱時底板312與頭部361 間將受到很大之熱應力作用，而可能破壞底板312與公螺紋 構件360其中任一者。間隙之厚度△(!則係考量該熱膨脹而 決定者。 另，亦可僅將複數支柱321之一部分與底板312固定。 舉例言之，當支柱321為4根時，即便藉公螺紋構件360將其 中3根與底板312固定而不對公螺紋構件360固定殘餘之1根 支柱321亦無妨〇 保溫筒320與保溫筒載置台340係藉保溫筒承具330、作 為保溫筒固定構件之公螺纹構件370、作為保溫筒載置台固 定構件之卡止銷380而相互固定者❶保溫筒承具330係由略 圓板狀之基體331、與基體331—體之略平板環狀之外周部 332所構成者。該外周部332則形成有於上下具有開口部之 螺紋穴333及可貫通外周與内周之貫通孔334。該螺紋穴333 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) •打· 4 -32· 502299 A7 _B7_ 五、發明説明fc ) 與貫通孔334係彼此大致直交而連通者· 公螺紋構件370係由略圓板狀之頭部371及轴部372所 構成者，轴部372則係由螺紋部373及形成於螺紋部373之前 端之卡止部374所構成者。卡止銷380係由略圓柱狀之本體 381與形成於本體中央附近之底面為略圓柱狀之凹部 382(落差部）所構成者。保溫筒載置台340上則形成有於其 側面具有開口部之凹部341。 保溫筒載置台340、保溫筒承具330、保溫筒320之裝配 方法則於以下之（1)、（2)中加以說明❶ (1) 在保溫筒載置台340上載置有保溫筒承具330之狀 態下，使卡止銷380貫插貫通孔334而將之插入凹部341内。 結果，即可固定保溫筒載置台340與保溫筒承具330。此時， 並將卡止銷380之凹部382配設於與螺紋穴333之開口部相 對應之位置。 (2) 接著，在保溫筒承具330上載置有保溫筒320之底板 323之狀態下，藉將公螺紋構件370旋入保溫筒承具330之螺 紋穴333,而使其頭部371之底面舆底板323上面之周緣近旁 直接接觸。結果，即可固定保溫筒320之底板323與保溫筒 承具330。此時，並將公螺紋構件370之卡止部374插入卡止 銷380之凹部382内。結果，卡止銷380即不致自貫通孔334 鬆脫。即，公螺紋構件370在保溫筒320與保溫筒承具330 之固定以外，亦具有防止卡止銷380鬆脫之機能❶ 藉進行以上之程序，即可使保溫筒320、保溫筒承具330 及保溫筒載置台340堅固地相互固定，並使其等呈裝卸自如 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) •ή. :線丨 -33· 502299 A7 _B7_ 五、發明説明έι ) 之狀態。 (請先閲讀背面之注意事項再填寫本頁) 另，第1乃至第4實施例所代表之思想並不限於附圖所 示之内容*構造、各構件之形狀、尺寸及進行固定之順序 等皆可於本發明之要旨所涵括之範圍内適當加以變更。 舉例言之，上述第1實施例中，雖然設有保溫筒插入構 件53，但亦可不設置保溫筒插入構件53。然而，此時，母 螺紋構件52則為比保溫筒40之頂板41之環狀孔部49大者。 又，上述之第1實施例中，雖使公螺紋構件51與母螺紋 構件52螺接而固定晶舟30與保溫筒40，但亦可以插銷等插 入構件加以固定。具體而言，可使用具有未形成有與公螺 紋構件51大致相同形狀之螵紋部之軸部之凸構件、可插入 凸構件之轴部之圓筒構件、可插入後述之第1貫通孔部及第 2貫通孔部之形成錐狀之推拔銷而加以固定。在此，凸部材 設有可自公螺紋構件之大圓板部貫通至轴部之貫通孔部。 又，轴部之側面部則設有已貫通之第1侧面孔部。進而，圓 筒構件之側面部亦設有已貫通之第2侧面孔部。將凸構件與 公螺紋構件51同樣地插入晶舟30及保溫筒40後，再藉保溫 筒插入構件53將凸構件插入圓筒構件。然後，將第1貫通孔 部與第2貫通孔部對位，以對第1貫通孔部與第2貫通孔部插 入推拔銷。藉該推拔銷之插入，即可固定晶舟30與保溫筒 40。又，藉使插銷之形狀為錐形，即可緊固凸構件與圓筒 構件而不致鬆脫。 另，上述之第1實施例中，雖已說明不對公螺纹構件51 設置自大圓板部54貫通至轴部56之貫通孔，但亦可對公螺 本紙張尺度適用申國國家標準（CNS) A4規格（210X297公釐） 观299 A7 —---- --B7_ 五、發明説明fc ) 紋構件設置貫通孔❶藉對公螺纹構件設置貫通孔，即可使 處理氣體對晶圓诹流動順暢❼ (請先閲讀背面之注意事項再填寫本頁) 此外，上述之第4實施例中，保溫筒承具33〇雖係與保 溫筒320、保溫筒載置台340之任一分別獨立之構件，但與 保溫筒320、保溫筒載置台34〇之任一方一艘形成保溫筒承 具330亦無妨〇 m 舉例言之，若使保溫筒承具330與保溫筒320之底板323 一艘形成，則可藉卡止銷380進行保溫筒32〇與保溫筒載置 台340之固定，並將公螺紋構件37〇專用於防止卡止銷“ο 之鬆脫。 又，上述之第1〜第4實施例中所記載之晶舟30、100、 160、31〇與保溫筒4〇、11〇、17〇、32〇之固定方法、保溫筒 40、11〇、170 ' 320與保溫筒載置台 70、140、230、340之 :線· 固定.方法亦可加以適當組合而應用之。具體而言，舉例言 丨 之’在第1實施例_，雖然藉保溫筒插入構件53使公螺纹構 件51與母螺紋構件52螺接而固定晶舟30與保溫筒40，並藉 鈞形構件84使公螺紋構件81舆母螺纹75螺接雨固定保溫筒 40與保溫筒載置台7〇，但亦可同樣使用晶舟3〇與保溫筒4〇 之固定方法，而採用第2實施例中所記载之固定方法作為保 溫筒40與保溫筒載置台7〇之固定方法❶ (第5實施例） 以下，就本發明之第5實施例加以說明。本實施例係有 關於一種具有均熱管型式之縱型熱處理裝置。 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公愛） -35- 502299 A7 _B7_ 五、發明説明fo ) (請先閲讀背面之注意事項再填寫本頁) 第22圖係顯示本發明第5實施例之縱型熱處理裝置之 縱截面圖，第23圖係第22圖中頂部絕熱體之截面圖，第24 圖係該頂部絕熱體之底面圓•該縱型熱處理裝置具有用以 構成諸如高溫爐或擴散爐之縱型熱處理爐501。該熱處理爐 501則包含反應管（process tube)503，係可在朝高度方向以 預定間隔排列多枚（諸如150枚左右）被處理基板（諸如半導 體晶圓W)而予以支持於作為保持元件之諸如石英製之晶 舟502上之狀態下加以收容者•加熱機構504則係包覆反應 管503之周圍而設置，以將反應管503内加熱至所欲之溫 度，諸如600〜1200°C左右者。加熱機構504與反應管503間 (環狀空間）並包覆反應管503而配設有均熱管505 « 反應管503係由具有耐熱性及耐蝕性之材料（諸如石英） 所構成，並形成上端封閉而下端開口之縱長圓筒形者。反 應管503之下側部則設有用以導入處理氣體或惰性氣體之 氣體導入口 506及用以將反應管503内排氣之排氣口 507 等。氣體導入口 506並與處理氣艎等之氣艘供給源（未予圖 示）相連接❼ 自氣體導入口 506導入之處理氣艚將經沿行反應管503 之側壁而設之氣醴導入管508而導入反應管503内之頂部， 再藉多孔分散板部509而朝下方分散供給。排氣口 507則與 排氣系統相連接。反應管503亦可為内管與外管之二重管構 造。 反應管503之下端部係藉未予圖示之安裝構件而安裝 於底板510之下側者•底板510係諸如不锈鋼製，並水平設 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公愛） -36- 502299 A7 _B7_ 五、發明説明¢4 ) 置於縱型熱處理裝置之箧醴内者·該底板510並形成有可朝 上下方向插通均熱管505及反應管503之開口部511 〇 反應管503之下方設有用以開閉其下端開口部之蓋體 512,其則可藉未予圖示之昇降機構而自由昇降。該蓋體512 上則藉保溫筒513而載置有晶舟502❶藉昇降機構，即可對 反應管503内搬入或自其中搬出晶舟502，並進行蓋禮512 之開閉。另，亦可於蓋體512設置可使晶舟502與保溫筒513 一同旋轉之旋轉機構，以對半導«晶圓W進行面内均一之 處理。 加熱機構504係設置於底板510上者。該加熱機構504 具有可包圍反應管503之絕熱«構造之包園醴504A，藉該 包圍體504A即可於反應管503之周圍形成加熱空間。包圍 體504A則包含可包圍反應管503周圍之筒狀（以圓筒狀為 佳）之絕熱體（筒狀絕熱醴）514及設於該筒狀絕熱體514之 頂部（上端部）之板狀之頂部絕熱艟515。該頂部絕熱體515 因於下部具有可與絕熱髏514之上端開口部嵌合之嵌合部 516，而不致朝左右移動。絕熱體514之内周則係構成於圓 周方向上以蛇行狀或於長向上以螺旋狀配設有線狀之電阻 發熱體517者•加熱機構504亦可構成朝高度方向將電阻發 熱體517分割成多區，並可對各區獨立進行溫度控制者❶ 絕熱體514、頂部絕熱體515及後述之底部絕熱體518 係由預定之絕熱材料所形成者，諸如二氧化矽（Si02)及氧 化鋁（Al2〇3)之混合材料。該等絕熱體514、515、518之製 造方法則包含有··一堆積程序，係將用以形成絕熱體之成 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公爱) .......................裝..................訂..................線· (請先閲讀背面之注意事項再填寫本頁) -37- 502299 A7 _B7_ 五、發明説明) (請先閲讀背面之注意事項再填寫本頁) 形模浸溃於包含可形成絕熱材料之無機物纖維之懸浮液 中，再藉吸引而於成形模内堆積絕熱材料者；一乾燥程序， 係用以自成形模將由該已堆積之絕熱材料所構成之成形體 卸下而加以乾燥者；及，一焙燒程序，係用以焙燒該業經 乾燥之成形體者。筒狀絕熱體514及頂部絕熱體515之外側 則為由金屬板所構成之外罩519所包覆，該外罩519之外周 則設有水冷夾套520。 均熱管505可使對反應管503内之晶圓W之加熱溫度均 一，並防止自加熱機構504之電阻發熱體517等放出之金屬 導致晶圓W之汙染，且其係由諸如碳化矽（SiC)所形成者。 該均熱管505並如包圍反應管503内之周圍般，形成上端封 閉而下端開放之縱長圓筒狀。 加熱機構504底部之内側設有可包覆絕熱體514與反應 管503間之環狀開口（爐口、開口部511)之底部絕熱體（亦稱 為爐口絕熱體）518,該底部絕熱體518之上部則設有均熱管 505。具體而言，底板510之開口部周緣自下方藉螺栓固定 而安裝有環狀之支持板521，並使其呈裝卸自如之狀態，該 支持板521上則設有底部絕熱體518。為抑制均熱管505之搖 晃，底部絕熱體518之上部形成有用以嵌合均熱管505之下 端部之嵌合穴522，均熱管505之下端部則宜插入而嵌合於 該嵌合穴522以設置均熱管505 · 頂部絕熱體515設有包圍均熱管505之頂部外周而可限 制均熱管505之搖晃之限制構件523。如第23圖乃至第24圖 所示，限制構件523係如包圍均熱管505之頂部外周般於圓 本紙張尺度適用t國國家標準（CNS) A4規格（210X297公愛） -38- 502299 A7 _B7_ 五、發明説明) 周方向上以適當間隔安裝多個（諸如3個）於頂部絕熱體515 上者。此時，限制構件523係藉諸如與頂部絕熱體515相同 之絕熱材料而形成平面圓弧狀且截面為逆L字狀者，頂部 絕熱體515之對應處則形成有用以自上方插入限制構件523 而加以安裝之截面呈逆L字狀之安裝孔524。 限制構件523係安裝成下側自頂部絕熱體515之下部朝 下方突出之狀態者。限制構件523並宜以黏著劑與安裝孔 524黏著固定。又，限制構件523之均熱管對向面則宜與均 熱管505之頂部外周形狀對應而形成錐狀乃至階梯部525。 其次，就具以上構造之縱型熱處理裝置之作用加以敍 述。首先，於加熱機構504下方之搭載領域中，對蓋體512 上之保溫筒513上載置晶舟502，再將晶圓W移載至晶舟502 内。接著，藉昇降機構使蓋體512上昇，以自其下端開口朝 反應管503内搬入晶舟502，並以蓋體512將該開口密閉。 然後*將反應管503内排氣，一面藉加熱機構504使晶 舟502上之晶圓W昇溫至所欲之處理溫度，並對反應管503 内導入預定之處理氣體，以對晶圓W進行預定之熱處理， 諸如擴散處理。若已完成預定之熱處理，則可首先以惰性 氣體（諸如氮氣）將反應管503内置換，然後自下方開啟蓋體 512以自反應管503内將晶舟502朝下方之搭載領域搬出。 反應管503與加熱機構504間所設之均熱管505係設於 具有彈性之底部絕熱體518上者，且，由於其高度很高而重 量亦很重，故易因地震等搖晃而左右晃動。然而，根據本 縱型熱處理裝置，由於加熱機構504之絕熱體514之頂部所 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) -*^丨 :線丨 -39- 502299 A7 _B7_ 五、發明説明$7 ) (請先閲讀背面之注意事項再填窝本頁) 設之頂部絕熱體515設有包圍均熱管505之頂部外周而可限 制均熱管505之搖晃之限制構件523，故可以簡單之構造抑 制均熱管505之搖晃，而無須具有其他複雜之固定構件。 因此，可防止均熱管505搖晃而與反應管503強力接觸 乃至相撞而可能發生之反應管503之破損，並更為提昇耐久 性、安全性及強固性•又，本發明由於構造簡單且無須大 幅之設計變更，故亦可對既有之縱型熱處理裝置輕易實 施。且，由於加熱機構504之底部絕熱醴518之均熱管505 之設置部分形成有用以嵌合均熱管505之下端部之嵌合穴 522，故可對該嵌合穴522嵌合均熱管505之下端部而加以保 持。藉此，即可與頂部之限制構件523相輔相成而更充分地 抑制均熱管505之搖晃》 (第6實施例） 4 以下，就本發明之第6實施例加以說明•第25圖係顯示 本發明第6實施例之縱型熱處理裝置之要部縱截面圖。在第 25圓之實施例中，舆第22圖之實施例相同之部分附上相同 之參照符號而省略其說明，僅就不同之部分加以說明β 在第25圖之實施例中，為限制均熱管505之搖動而於頂 部絕熱體515與均熱管505之對向部之一方（圖示之例中為 均熱管505之頂部）設有突部526,於另一方（圈示之例中為 頂部絕熱體515之下面部）則設有可供該突部526卡合之凹 部527。該等突部526與凹部527則宜考董熱處理爐501之設 計誤差、裝配誤差及熱膨脹等而形成寬鬆卡合狀態。 本紙張尺度適用申國國家標準（CNS) Α4規格（210X297公爱） 40- 502299 A7 _B7_ 五、發明説明fc ) 根據第25圖之實施例之縱型熱處理裝置，由於在均熱 管505之頂部設有突部526,並於頂部絕熱體515之下面部設 有可供該突部526卡合之凹部527,故可以簡單之構造抑制 均熱管505之搖晃，而無須具有其他複雜之固定構件β本實 施例亦與第22圓之實施例相同，宜於加熱器之底部絕熱體 設有用以嵌合均熱管之下端部之嵌合穴（未予圖示）。另， 在第25圖中，528係可於絕熱體514之内周保持電阻發熱體 之具有絕緣性之櫛狀保持體，529則係保持於均熱管505内 側之溫度檢出器· 第26圖係顯示第25圖之實施例之變形例之要部概略截 面圖。即，頂部絕熱馥515之下面部略中央部設有朝下方突 出之突部526，均熱管505之頂部則設有可供該突部526卡合 之凹部527。此時，為防止折斷或彎曲，突部526宜由比頂 部絕熱體515之絕熱材料更具剛性之材料所形成，諸如陶 瓷。凹部527則可藉熔接與均熱管505相同材質之圏環530 而形成於諸如均熱管505之頂部*第26圖之變形例亦可得到 與第25圖之實施例相同之效果· (第7實施例） 以下，就本發明之第7實施例加以說明β第27圖係顯示 本發明第7實施例之縱型熱處理裝置之要部縱裁面圖•在第 27圖之實施例中，與第22乃至25圈之實施例相同之部分附 上相同之參照符號而省略其說明，僅就不同之部分加以說 明。 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公董） (請先閲讀背面之注意事項再填窝本頁) 奉 命 :線丨 41- 502299 A7 _B7_ 五、發明説明fo ) (請先閲讀背面之注意事項再填寫本頁) 在第24圖之實施例之縱型熱處理裝置中，於加熱機構 504之筒狀絕熱體514之内側設有包圍均熱管505之頂部外 周而可限制均熱管505之搖晃之限制構件523。圖示例之限 制構件523雖係如包圍均熱管505般於圓周方向上形成連續 之環狀者，但亦可於圓周方向上以適當間隔加以設置多個。 根據第27圖之實.施例之縱型熱處理裝置，由於加熱機 構504之筒狀絕熱體514之内側設有包圍均熱管505之頂部 外周而可限制均熱管505之搖晃之限制構件531，故可以簡 單之構造抑制均熱管之搖晃，而無須具有其他複雜之固定· 裝置。本實施例亦與第22圖之實施例相同，宜於加熱器之 底部絕熱體設有用以嵌合均熱管之下端部之嵌合穴（未予 圖示）。 •舞 .另，第5乃至第7實施例之特徵之可防止均熱管搖晃之 構造可與第1乃至第4實施例之特徵之可固定晶舟及保溫筒 之構造適當組合而實施。又，第1乃至第7實施例中，雖使 用晶圓W作為被處理基板而加以說明，但亦可使用液晶用 之LCD玻璃基板· 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） •42- 502299 A7 B7 五、發明説明ί〇 ) 【主要元件符號之說明】 1···縱型熱處理裝置 30- 晶舟 2…箱體 31- 頂板 3…反應管 32— 底板 4…絕熱材 33- 支柱 5···電阻發熱體 34… 環狀部 6…底板 35… 凸部 7…外管 36- 突起 8…内管 37… 環狀孔部 9…凸緣部 38- 凸狀孔部 10…凸緣部 40… 保溫筒 11…處理氣禮導入管 41… 頂板 12 ···歧管 42… 底板 13、14···凸緣部 43- 支柱 15…溝槽 44- 散熱片 16…排氣管 45··· 環狀部 20…反應管固定構件 46… 凸部 21…内管蓋 47… 凸狀孔部 22…内管承具 48- 溝槽 23…公螺紋構件 49… 環狀孔部 24…公螺紋構件插入孔 5(l··· 晶舟固定構件 25…環狀部 51- 公螺紋構件 26…突起 52… 母螺紋構件 27…母螺紋 53… 保溫筒插入構件 (請先閲請背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐） •43- 502299 A7 B7 五、發明説明) 54 大圓板部 104··· 環狀部 55 小圓板部 105- 凸部 56 軸部 106- 突起 57 母螺紋 110… 保溫筒 58 軸部插入孔 11卜· 保溫筒罩 60 升降機 112〜 頂板部 61 蓋體 113 — 凸部 70 保溫筒載置台 114··· 凸狀孔部 71 載查部 115··· 溝槽 72 凸部 116- 旋轉鎖固構件插入孔 73 中心部 部 74 凸狀孔部 117… 缺口 75 母螺紋 120… 旋轉鎖固構件 80 保溫筒固定構件 m… 頭部 81 公螺紋構件 122- 突起部 82 鈎形部 123··· 支柱部 83 公螺紋構件插入孔 124··· 大圓板部 84 鈎形構件 125- 小圓板部 90 環狀部 126- 圓板部 91 凸部 127… 突起 10 ••晶舟 128… 傾斜面 10 ••支柱 129- 孔洞 10 ••底板 130… 突起部 10 ••環狀孔部 131… 第1卡止銷插入孔部 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐) (請先閲讀背面之注意事項再填寫本頁) ·,ρ丨 4 -44- 502299 A7 B7 五、發明説明) 140···保溫筒載置台 182… 轴部 141···環狀部 183- 突起部 142···保溫筒插入孔部 190- 保溫筒載置台 143···第2卡止銷插入孔部 19卜· 母螺紋 144···卡止部 192- 載置部 145…凸部 193- 凸部 150···卡止銷 200- 公螺紋構件 151…圓板部 210- 保溫筒 152…轴部 211"· 保溫筒罩 160…晶舟 212- 保溫筒罩本體部 16卜··底板 213… 突起部 162…凹部 214- 孔洞 163···第1突起形成銷插入 215- 凹部 孔部 220- 公螺紋構件 170···保溫筒 221··· 公螺紋構件插入孔部 171…頂板 222… 塊狀構件 172···環狀部 230··· 保溫筒載置台 173…凸部 231··· 凸部 174···第2突起形成銷插入 232··· 母螺紋 孔部 310… 晶舟 175…底板 311- 支柱 176···公螺紋構件插入溝 312… 底板 180···突起形成銷 313〜 貫通孔 181…圓板部 314… 凹部 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 45- 502299 A7 B7 五、發明説明ί3 ) 320…保溫筒 321…支柱 322…散熱片 323…底板 324…螺紋穴 325…突起部 330…保溫筒承具 331…基體 332…外周部 333…螺紋穴 334…貫通孔 340…保溫筒載置台 341…凹部 350…蓋體 360…公螺紋構件 361…頭部 362…轴部 363…連結部 364…螺紋部 370…公螺紋構件 371…頭部 372…轴部 373…螺紋部 374…卡止部 (請先閲讀背面之注意事項再填寫本頁) 380… 卡止銷 381- 本體 382- 凹部 400- 縱型熱處理裝置 401- 外管 402- 内管 403··· 反應管 404- 晶舟 405- 保溫筒 406… 發熱體 407- 氣體導入管 408… 升降機 501… 熱處理爐 502… 晶舟 503- 反應管 504··· 加熱機構 504Α- •••包困艘 505… 均熱管 506··· 氣醴導入口 507··· 排氣口 508… 氣體導入管 509- 多孔分散板部 510- 底板 511… 開口部 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公董） 46- 502299 A7 ___B7 五、發明説明“) (請先閲讀背面之注意事項再填寫本頁) 512…蓋體 513…保溫筒 514…筒狀絕熱體 515…頂部絕熱體 516…嵌合部 517…電阻發熱體 518…底部絕熱體 519…外罩 520…水冷夾套 521…支持板 522…嵌合穴 523…限制構件 524…安裝孔 525…階梯部 526···突部 527···凹部 528…保持體 529…溫度檢出器 530…圈環 W…晶圓 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） -47-(Modified example of the first embodiment) The eighteenth series shows the exploded three-dimensional circle of the heat preservation tube and the heat preservation tube mounting table of the modification example of the first embodiment. In the first embodiment, the base plate 42 having a slightly ring shape Although the heat insulation tube 40 and the heat insulation tube mounting table 70 are fixed by the male screw member 81, as shown in the eighteenth circle, even the heat insulation tube 21 with the heat insulation tube cover 211 can be fixed by the male screw member 220. On the heat-insulating cylinder mounting table 230, the rough shape of the heat-insulating cylinder leather 211 has a slightly cylindrical heat-insulating cylinder main body portion 212, and the outer peripheral surface of the heat-insulating cylinder cover main body portion 212 is provided with protrusions 213 β at three places. The shape of the heat-insulating cylinder cover main body portion 212 will be described in detail. The heat insulation tube leather hip portion 212 is provided with a hole 214 through the protruding portion 213 in a radial direction. Moreover, the shape of the heat-retaining cylinder mounting table 230 is substantially the same as the heat-reserving cylinder mounting table 70, and the outer diameter of the convex portion 231 is substantially the same as the inner diameter of the heat-retaining cylinder leather 211, and can be formed on the inner peripheral surface of the heat-retaining cylinder cover 211. The concave portion 215 is combined with the convex portion 231. In addition, when the heat insulation tube 210 and the heat insulation tube mounting table 230 are fixed, a block member 222 β having a male screw member insertion hole 221 that can be inserted into the male screw member 22 is formed at two places (please read the first (Notes will be refilled on this page) Secondly, the order of fixing the heat insulation tube 210 and the heat insulation tube mounting table 230 will be explained. • First, the concave portion 215 of the heat insulation tube 210 is fitted into the convex portion 231 of the heat insulation tube mounting table 230, and The block-shaped member 222 is inserted into the hole 214 of the thermal insulation cylinder cover. Then, after the alignment operation of the male screw member insertion hole 221 and the female screw 232 is performed, the male screw member 220 is inserted into the male screw member insertion hole 221 so that the male screw member 220 and the female screw 232 are connected to each other by the screw. The size of the paper can be used to fix the Chinese national standard (CNS) A4 specification (210X297 mm) 502299 --------- —_B7 ___ V. Description of the invention fa) Heat preservation tube 210 and heat preservation tube mounting table 23〇 , And make it easy to load and unload-state. (Fourth embodiment) Hereinafter, a fourth embodiment of the present invention will be described. In this embodiment, the thermal insulation tube and the crystal boat without the top plate can be fixed, and the thermal insulation tube holder can be used for fixing. The 19th model shows a partial cross-sectional view of the crystal boat 310, the thermal insulation tube 320, the thermal insulation tube holder 330, and the thermal insulation tube mounting table 34 in this embodiment. The 20th (A) to (B) circles are enlarged views of the small circles A4 and B4 of the 19th circle, respectively. In addition, in order to facilitate observation and understanding, the 20th (B) circle differs from FIG. 19 in the state when the male screw member 37, which will be described later, is inserted into the ridge 333. As shown in FIG. 19, the thermal insulation tube mounting table I 340, the thermal insulation tube holder 330, and the thermal insulation tube 32 are mounted on the skull 350, the thermal insulation tube mounting table 340, the thermal insulation tube holder 330, and the thermal insulation tube 320, respectively. 〇, Crystal boat 31. The wafer boat 31 has a pillar 311 and a bottom plate 312. The top plate has been omitted from the illustration. The thermal insulation tube 32 is composed of a pillar 321, a plurality of rain fins 322 fixed on the pillar 321, and a 'plate 323' formed with the pillar 321- 馥, and does not have a top plate. _ On the bottom plate 312 and the upper end of the pillar 321 of the wafer boat 310, there are correspondingly formed through holes 313 and recessed portions 314, dished cavities 324 and protruding portions 325, respectively. The bottom plate 312 and the pillar 321 are fixed by a male member 360 serving as a substrate holding element fixing member through a through hole and a cut hole. The male media pattern member 36 is composed of a slightly circular plate-shaped head 361 and a car part 362, and the shaft part 362 is composed of a cylindrical connection part 363 and a corrugated part 364 with a smaller diameter than the connection part 363. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the notes on the back of the information before filling out this page) •, ^ 1 丨: Line · • 31- 502299 A7 _B7_ V. Description of the invention fe) Constituted by. The connecting portion 363 can be inserted through the through hole 313, and the lower end thereof is in direct contact with the upper end of the pillar 321. The length dl of the connecting portion 363 is larger than the thickness d2 of the plate 312. Therefore, a gap of thickness A d (= dl-d2) is formed between the head 361 and the bottom plate 312. The thickness Δd is, for example, 1 mm or less. This is to prevent damage caused by the thermal expansion of each component. Set by. The stress caused by this thermal expansion becomes more problematic when the material of each member is different. For example, the bottom plate 312 is formed of silicon carbide (SiC), and the pillars 321 and male screw members 360 are formed of quartz. "Since the thermal expansion rate of silicon carbide is greater than that of quartz, the thickness of the bottom plate 312 is high once it is formed at a high temperature. d2 will expand at a ratio larger than the length dl of the connecting portion 363. Therefore, if the bottom plate 312 and the head portion 361 are not aged at normal temperature, a large thermal stress will be applied between the bottom plate 312 and the head portion 361 during heating, and any one of the bottom plate 312 and the male screw member 360 may be damaged. The thickness of the gap Δ (! Is determined by considering the thermal expansion. In addition, only a part of the plurality of pillars 321 may be fixed to the base plate 312. For example, when the number of pillars 321 is four, even if the male screw member 360 is used, Three of them are fixed to the bottom plate 312 without fixing the remaining one pillar 321 to the male screw member 360. The thermal insulation tube 320 and the thermal tube mounting base 340 are the male screw member 370 as the thermal tube fixing member through the thermal tube holder 330. ❶ As the fixing pin 380 of the fixing member of the heat-insulating tube mounting platform, the heat-insulating tube holder 330 is composed of a substantially circular plate-shaped base body 331 and a substantially flat plate-shaped outer peripheral portion 332 of the base body 331-body. The outer peripheral portion 332 is formed with a threaded hole 333 having openings on the upper and lower sides and a through hole 334 that can penetrate the outer and inner circumferences. The threaded hole 333 applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling in this page) • Hit · 4 -32 · 502299 A7 _B7_ V. Description of the Invention fc) and the through-hole 334 are approximately perpendicular to each other and communicate with each other · The male screw member 370 is made of a slightly circular plate shape The head portion 371 and the shaft portion 372 are constituted by the head portion 371 and the shaft portion 372 are constituted by the threaded portion 373 and the locking portion 374 formed at the front end of the threaded portion 373. The locking pin 380 is composed of a substantially cylindrical body 381 and a substantially cylindrical concave portion 382 (dropped portion) formed on the bottom surface near the center of the body. The heat-retaining-tube mounting table 340 is formed with a recessed portion 341 having an opening on a side surface thereof. The assembling method of the insulation tube mounting platform 340, the insulation tube holder 330, and the insulation tube 320 will be explained in (1) and (2) below. (1) The insulation tube mounting platform 340 is placed on the insulation tube mounting platform 340. In this state, the locking pin 380 is inserted into the through hole 334 and inserted into the recess 341. As a result, the heat-insulating tube mounting table 340 and the heat-insulating tube holder 330 can be fixed. At this time, the concave portion 382 of the locking pin 380 is arranged at a position corresponding to the opening portion of the screw hole 333. (2) Next, in the state where the bottom plate 323 of the heat insulation tube 320 is placed on the heat insulation tube holder 330, the male thread member 370 is screwed into the thread hole 333 of the heat insulation tube holder 330 to make the bottom surface of the head 371 The upper edge of the bottom plate 323 is directly in contact with the periphery. As a result, the bottom plate 323 of the thermal insulation tube 320 and the thermal insulation tube holder 330 can be fixed. At this time, the locking portion 374 of the male screw member 370 is inserted into the concave portion 382 of the locking pin 380. As a result, the locking pin 380 cannot be released from the through hole 334. That is, the male screw member 370 has the function of preventing the locking pin 380 from being loosened in addition to the fixing of the heat insulation tube 320 and the heat insulation tube holder 330. By performing the above procedures, the heat insulation tube 320 and the heat insulation tube holder 330 can be made. And the heat preservation tube mounting table 340 is firmly fixed to each other, so that they can be loaded and unloaded freely. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling this page). .: Line 丨 -33 · 502299 A7 _B7_ V. State of the invention. (Please read the precautions on the back before filling out this page) In addition, the ideas represented by the first to fourth embodiments are not limited to those shown in the drawings * Structure, shape, size, and order of fixing of each component, etc. All can be appropriately changed within the scope covered by the gist of the present invention. For example, in the first embodiment described above, although the heat-insulating tube inserting member 53 is provided, the heat-insulating tube inserting member 53 may not be provided. However, at this time, the female screw member 52 is larger than the annular hole portion 49 of the top plate 41 of the thermal insulation tube 40. Furthermore, in the first embodiment described above, although the male screw member 51 and the female screw member 52 are screwed to fix the wafer boat 30 and the heat-retaining cylinder 40, they may be fixed by inserting members such as pins. Specifically, a convex member having a shaft portion without a ridge portion having substantially the same shape as the male screw member 51, a cylindrical member into which a shaft portion of the convex member can be inserted, and a first through-hole portion described later can be used. And the second through-hole portion is fixed by forming a tapered push pin. Here, the convex member is provided with a through hole portion that can penetrate from the large circular plate portion of the male screw member to the shaft portion. In addition, the side surface portion of the shaft portion is provided with a first side hole portion that has penetrated. Furthermore, the side surface portion of the cylindrical member is also provided with a second side hole portion which has penetrated. After inserting the convex member into the wafer boat 30 and the heat insulation tube 40 in the same manner as the male screw member 51, the heat insulation tube insertion member 53 is used to insert the convex member into the cylindrical member. Then, the first through-hole portion is aligned with the second through-hole portion, and a push pin is inserted into the first through-hole portion and the second through-hole portion. By the insertion of the push pin, the wafer boat 30 and the heat preservation cylinder 40 can be fixed. Moreover, if the shape of the latch is tapered, the convex member and the cylindrical member can be fastened without loosening. In addition, in the first embodiment described above, although it has been explained that the male screw member 51 is not provided with a through hole penetrating from the large circular plate portion 54 to the shaft portion 56, the national paper standard (CNS) of the male screw can also be applied to the paper size of the male screw. A4 specification (210X297 mm) View 299 A7 —---- --B7_ V. Description of the invention fc) Through holes are provided for the pattern member. By setting through holes for the male screw member, the processing gas can flow smoothly to the wafer. ❼ (Please read the precautions on the back before filling this page) In addition, in the fourth embodiment described above, although the heat-retaining cylinder holder 33 is a separate component from the heat-retaining cylinder 320 and the heat-retaining cylinder mounting table 340, However, it is possible to form the heat insulation tube holder 330 with one of the heat insulation tube 320 and the heat insulation tube mounting platform 34. For example, if the heat insulation tube holder 330 and the bottom plate 323 of the heat insulation tube 320 are formed, The retaining pin 380 can be used to fix the heat preservation tube 32o and the heat preservation tube mounting table 340, and the male screw member 37o can be used exclusively to prevent the lock pin "ο from coming loose. In addition, the first to fourth embodiments described above Crystal Boats 30, 100, 160, 31 ° and Insulation Tubes 40, 1 described in The method of fixing 10, 17 and 32, the insulation tube 40, 110, 170 '320 and the insulation tube mounting table 70, 140, 230, and 340: line · fixing. The method can also be appropriately combined and applied. Specifically, for example, in the first embodiment, although the male threaded member 51 and the female threaded member 52 are screwed by the heat insulation tube insertion member 53 to fix the wafer boat 30 and the heat insulation tube 40, and the shape member is borrowed 84. The male screw member 81 and the female screw 75 are screwed to the rain to fix the heat insulation tube 40 and the heat insulation tube mounting table 70. However, the fixing method of the crystal boat 30 and the heat insulation tube 40 may be used in the same manner, and the second embodiment is adopted The described fixing method is a fixing method of the heat insulation tube 40 and the heat insulation tube mounting table 70 (Fifth Embodiment) Hereinafter, a fifth embodiment of the present invention will be described. This embodiment relates to a method having a soaking tube. Type of vertical type heat treatment device. This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 public love) -35- 502299 A7 _B7_ V. Description of the invention fo) (Please read the precautions on the back before filling this page) FIG. 22 is a longitudinal view showing a fifth embodiment of the present invention A longitudinal sectional view of the treatment device, FIG. 23 is a sectional view of the top insulator in FIG. 22, and FIG. 24 is a bottom surface of the top insulator. The vertical heat treatment device has a structure such as a high-temperature furnace or a diffusion furnace. Vertical heat treatment furnace 501. The heat treatment furnace 501 includes a reaction tube 503, which can be arranged at a predetermined interval in the height direction (such as about 150) of substrates (such as semiconductor wafers W) to be processed. Supported in a state such as quartz crystal boat 502 as a holding element. The heating mechanism 504 is provided around the reaction tube 503 to heat the inside of the reaction tube 503 to a desired temperature, such as About 600 ~ 1200 ° C. A soaking tube 505 is arranged between the heating mechanism 504 and the reaction tube 503 (annular space) and covers the reaction tube 503 «The reaction tube 503 is made of a material having heat resistance and corrosion resistance (such as quartz) and forms an upper end A long, closed cylinder with a closed lower end. The lower side of the reaction tube 503 is provided with a gas introduction port 506 for introducing a processing gas or an inert gas, and an exhaust port 507 for exhausting the inside of the reaction tube 503. The gas introduction port 506 is connected to a gas vessel supply source (not shown) for processing gas radon, etc. The processing gas introduced from the gas introduction port 506 will pass through the gas radon introduction pipe provided along the side wall of the reaction tube 503. 508 is introduced into the top portion of the reaction tube 503, and is further distributed downward by the porous dispersion plate portion 509. The exhaust port 507 is connected to the exhaust system. The reaction tube 503 can also be a double tube structure of an inner tube and an outer tube. The lower end of the reaction tube 503 is installed below the bottom plate 510 by a mounting member (not shown). The bottom plate 510 is made of stainless steel, for example, and is set horizontally. This paper applies the Chinese National Standard (CNS) A4 specification (210X297). Love) -36- 502299 A7 _B7_ V. Description of the invention ¢ 4) Those placed inside the vertical heat treatment device · The bottom plate 510 is formed with an opening 511 through which the soaking tube 505 and the reaction tube 503 can be inserted upward and downward. 〇 Below the reaction tube 503 is provided a cover 512 for opening and closing the opening at the lower end, which can be lifted and lowered freely by a lifting mechanism (not shown). The lid 512 is provided with a crystal boat 502 by a heat-preserving cylinder 513, and the crystal boat 502 can be moved into or out of the reaction tube 503 by the lifting mechanism, and the lid 512 can be opened and closed. In addition, a rotating mechanism that can rotate the wafer boat 502 and the heat insulation tube 513 together can be provided on the cover 512 to perform uniform in-plane processing on the semiconductor «wafer W». The heating mechanism 504 is provided on the bottom plate 510. The heating mechanism 504 has a thermal insulation structure 504A which can surround the reaction tube 503, and a heating space can be formed around the reaction tube 503 by the surrounding body 504A. The enclosure 504A includes a cylindrical (preferably cylindrical) thermal insulator (tubular insulator) 514 that surrounds the periphery of the reaction tube 503, and a plate shape provided on the top (upper end) of the cylindrical insulator 514. The top of the heat insulation 515. The top heat insulator 515 does not move to the left or right because it has a fitting portion 516 that can be fitted into the opening at the upper end of the heat insulator 514. The inner periphery of the heat insulator 514 is composed of a wire-shaped resistance heating element 517 in a meandering shape in a circumferential direction or in a spiral shape in a long direction. The heating mechanism 504 may also be configured to divide the resistance heating element 517 into a height direction. Multi-zones and independent temperature control for each zone ❶ The heat insulator 514, the top insulator 515, and the bottom insulator 518 described below are formed of predetermined heat insulation materials, such as silicon dioxide (Si02) and alumina ( Al203). The manufacturing methods of these thermal insulators 514, 515, and 518 include a stacking procedure. The cost paper size used to form the thermal insulator applies the Chinese National Standard (CNS) A4 specification (210X297 public love) ... ............................... Order ... ....... Line · (Please read the precautions on the back before filling this page) -37- 502299 A7 _B7_ V. Description of the invention) (Please read the precautions on the back before filling this page) In a suspension containing inorganic fibers that can form a heat-insulating material, the heat-insulating material is accumulated in the forming mold by suction; a drying process is used to unload the formed body composed of the accumulated heat-insulating material from the forming mold. Those which are dried next; and, a roasting process, which is used to roast the dried shaped bodies in the industry. The outer sides of the cylindrical heat insulator 514 and the top heat insulator 515 are covered with a cover 519 made of a metal plate, and a water-cooled jacket 520 is provided on the outer periphery of the cover 519. The soaking tube 505 can make the heating temperature of the wafer W in the reaction tube 503 uniform, and prevent the wafer W from being contaminated by the metal emitted from the heating element 517 such as the resistance heating element 504, and it is made of silicon carbide (SiC ) Formed by. The soaking tube 505 is formed in a vertically long cylindrical shape with the upper end closed and the lower end opened, as if surrounding the inside of the reaction tube 503. The bottom of the heating mechanism 504 is provided with a bottom insulator (also referred to as a furnace mouth insulator) 518 that can cover a ring-shaped opening (furnace mouth, opening 511) between the heat insulator 514 and the reaction tube 503. The bottom insulator The upper part of 518 is provided with a soaking tube 505. Specifically, the peripheral edge of the opening portion of the bottom plate 510 is fixed by bolts from below, and a ring-shaped support plate 521 is installed in a detachable state. The support plate 521 is provided with a bottom heat insulator 518. In order to suppress the shaking of the soaking tube 505, a fitting hole 522 for fitting the lower end of the soaking tube 505 is formed in the upper part of the bottom heat insulator 518, and the lower end of the soaking tube 505 should be inserted and fitted in the fitting hole 522. Installation of the heat equalizing tube 505 · The top heat insulator 515 is provided with a restriction member 523 that surrounds the top periphery of the heat equalizing tube 505 and can limit the shaking of the heat equalizing tube 505. As shown in FIG. 23 to FIG. 24, the restricting member 523 is as round the top periphery of the soaking tube 505 as the round paper size. The national standard (CNS) A4 specification (210X297 public love) -38- 502299 A7 _B7_ 5. Description of the invention) A plurality of (such as three) are mounted on the top heat insulator 515 at appropriate intervals in the circumferential direction. At this time, the restricting member 523 is formed by using the same heat insulating material as the top heat insulator 515 to form a flat circular arc shape and a cross-section of an inverse L shape. The corresponding portion of the top heat insulator 515 is formed to insert the restricting member 523 from above. The mounting hole 524 is a reverse L-shaped mounting hole. The restriction member 523 is installed in a state where the lower side protrudes downward from the lower portion of the top heat insulator 515. The limiting member 523 is preferably fixed to the mounting hole 524 with an adhesive. In addition, the facing surface of the soaking tube of the restricting member 523 is preferably formed in a tapered shape or even a stepped portion 525 corresponding to the outer peripheral shape of the top of the soaking tube 505. Next, the function of the vertical heat treatment apparatus having the above structure will be described. First, in the mounting area under the heating mechanism 504, the wafer boat 502 is placed on the heat preservation tube 513 on the cover 512, and then the wafer W is transferred into the wafer boat 502. Next, the lid 512 is raised by the lifting mechanism to carry the wafer boat 502 into the reaction tube 503 from the opening at the lower end, and the opening is closed by the lid 512. Then * exhaust the inside of the reaction tube 503, while heating the wafer W on the wafer boat 502 to a desired processing temperature by the heating mechanism 504, and introduce a predetermined processing gas into the reaction tube 503 to carry out the wafer W A predetermined heat treatment, such as a diffusion treatment. If the predetermined heat treatment has been completed, the inside of the reaction tube 503 may be first replaced with an inert gas (such as nitrogen), and then the lid 512 is opened from below to carry the wafer boat 502 from the inside of the reaction tube 503 out of the loading area. The soaking tube 505 provided between the reaction tube 503 and the heating mechanism 504 is provided on the bottom heat insulator 518 having elasticity, and because of its high height and heavy weight, it is prone to shake left and right due to shaking such as earthquakes. However, according to this vertical heat treatment device, as the paper size of the top of the heat insulator 514 of the heating mechanism 504 applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page) -* ^ 丨: Line 丨 -39- 502299 A7 _B7_ V. Description of the invention $ 7) (Please read the precautions on the back before filling this page) The top heat insulator 515 is provided with an outer periphery surrounding the top of the soaking tube 505. The restricting member 523 for restricting the shaking of the soaking tube 505 can suppress the shaking of the soaking tube 505 with a simple structure without having to have other complicated fixing members. Therefore, it is possible to prevent damage of the reaction tube 503 which may occur due to shaking of the soaking tube 505 and strong contact with the reaction tube 503 or even collision, and further improve durability, safety and robustness. Furthermore, the invention has a simple structure and does not require Large design changes, so it can be easily implemented for existing vertical heat treatment equipment. Moreover, since the installation part of the heat insulation tube 505 of the heat insulation tube 518 at the bottom of the heating mechanism 504 forms a fitting cavity 522 for fitting the lower end of the heat distribution tube 505, the lower end of the heat distribution tube 505 can be fitted to the fitting cavity 522. Keep it. In this way, it can complement the restriction member 523 on the top and more fully suppress the shaking of the soaking tube 505. (Sixth embodiment) 4 Hereinafter, the sixth embodiment of the present invention will be described. FIG. 25 shows the present invention A longitudinal sectional view of a main part of the vertical heat treatment apparatus of the sixth embodiment. In the embodiment of the 25th circle, the same parts of the embodiment of FIG. 22 are given the same reference numerals and descriptions are omitted, and only the different parts will be described. In the embodiment of FIG. The shaking of the heat pipe 505 is provided with a protrusion 526 on one of the opposing portions of the top heat insulator 515 and the soaking pipe 505 (the top of the soaking pipe 505 in the example shown), and the other side (the top of the circled example) A lower part of the heat insulator 515 is provided with a recess 527 for engaging the protrusion 526. The protrusions 526 and the recesses 527 are suitable for considering the design error, assembly error, and thermal expansion of the heat treatment furnace 501 to form a loosely engaged state. This paper size applies to China National Standard (CNS) A4 specification (210X297 public love) 40- 502299 A7 _B7_ V. Description of the invention fc) The vertical heat treatment device according to the embodiment of Figure 25, because There is a protrusion 526, and a recess 527 for engaging the protrusion 526 is provided on the lower surface of the top heat insulator 515. Therefore, the shaking of the soaking tube 505 can be suppressed with a simple structure without the need for other complicated fixing members. The embodiment is also the same as the embodiment of the 22nd circle. It is suitable that the bottom heat insulator of the heater is provided with a fitting hole (not shown) for fitting the lower end of the soaking tube. In addition, in Fig. 25, 528 is an insulation-shaped cymbal holder that can hold the resistance heating element on the inner periphery of the heat insulator 514, and 529 is a temperature detector held inside the heat equalizing tube 505. Fig. 26 This is a schematic cross-sectional view of a main part showing a modification of the embodiment shown in FIG. 25. In other words, a protrusion 526 protruding downward is provided at a slightly central portion of the lower surface of the top thermal insulation 馥 515, and a recess 527 is provided on the top of the heat pipe 505 so that the protrusion 526 can be engaged. At this time, in order to prevent breaking or bending, the protrusion 526 is preferably formed of a material more rigid than the heat insulating material of the top insulator 515, such as ceramics. The recessed part 527 can be formed on the top of the soaking tube 505 by welding the ring 530 of the same material as the soaking tube 505. The modification of Fig. 26 can also obtain the same effect as the embodiment of Fig. 25. (Seventh implementation Example) Hereinafter, the seventh embodiment of the present invention will be described. [Beta] Figure 27 is a longitudinal sectional view showing the essential parts of the vertical heat treatment apparatus according to the seventh embodiment of the present invention. The same reference numerals are attached to the same parts in the embodiments of 22 to 25 laps, and the description is omitted, and only the different parts will be described. This paper size applies to China National Standard (CNS) A4 specification (210X297 public director) (please read the precautions on the back before filling this page) Order: line 丨 41- 502299 A7 _B7_ V. Description of invention fo) (Please read first (Notes on the back side, please fill in this page again.) In the vertical heat treatment device of the embodiment shown in FIG. The shaking of the restricting member 523. Although the restriction members 523 in the example shown in the figure are continuous loops in the circumferential direction like the soaking tube 505, a plurality of restriction members 523 may be provided at appropriate intervals in the circumferential direction. According to the actual heat treatment device of the embodiment shown in FIG. 27, since the inside of the cylindrical heat insulator 514 of the heating mechanism 504 is provided with a limiting member 531 surrounding the top periphery of the heat equalizing tube 505, the shaking of the heat equalizing tube 505 can be restricted. A simple structure can be used to suppress the shaking of the soaking tube without the need for other complicated fixtures and devices. This embodiment is also the same as the embodiment in FIG. 22, and it is suitable that the bottom heat insulator of the heater is provided with a fitting hole (not shown) for fitting the lower end of the soaking tube. • Dance. In addition, the features of the features of the fifth to seventh embodiments that prevent the soaking tube from shaking can be combined with the features of the features of the first to fourth embodiments of the structure that can fix the wafer boat and the insulation tube as appropriate. In the first to seventh embodiments, although the wafer W is used as a substrate to be processed, an LCD glass substrate for liquid crystal can also be used. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm). %) • 42- 502299 A7 B7 V. Description of the invention ί〇) [Description of the main component symbols] 1 ··· Longitudinal heat treatment device 30- Crystal boat 2… Box 31- Top plate 3… Reaction tube 32— Bottom plate 4… Insulation material 33- Pillar 5 ·· Resistance heating element 34… Ring portion 6… Bottom plate 35… Convex portion 7 ... Outer tube 36-Protrusion 8 ... Inner tube 37 ... Annular hole portion 9 ... Flange portion 38-Convex Hole section 10 ... Flange section 40 ... Insulation tube 11 ... Processing air inlet pipe 41 ... Top plate 12 ... Manifold 42 ... Bottom plate 13, 14 ... Flange section 43-Pillar 15 ... Groove 44-Heat sink 16 ... exhaust pipe 45 ... annular portion 20 ... reaction tube fixing member 46 ... convex portion 21 ... inner tube cover 47 ... convex hole portion 22 ... inner tube holder 48-groove 23 ... male threaded member 49 ... Annular hole portion 24 ... Male threaded member insertion hole 5 (l · ·· Crystal boat fixing member 25 ... Ringed portion 51- Male threaded structure 26 ... protrusion 52 ... female thread member 27 ... female thread 53 ... insulation tube insert member (please read the precautions on the back before filling out this page) This paper size applies to China National Standard (CNS) Α4 size (210X297 mm) • 43- 502299 A7 B7 V. Description of the invention) 54 Large circular plate part 104 ... Annular part 55 Small circular plate part 105- convex part 56 Shaft part 106- Protrusion 57 Female thread 110 ... Insulation tube 58 Shaft part insertion hole 11 · Insulation tube cover 60 Elevator 112 ~ Top plate portion 61 Cover body 113 — Convex portion 70 Insulation tube placing table 114 ··· Convex hole portion 71 Loading portion 115 ··· Groove 72 Convex portion 116- Rotary locking member inserted Hole 73 Center portion 74 Convex hole portion 117 ... Notch 75 Female thread 120 ... Rotary locking member 80 Insulation tube fixing member m ... Head 81 Male thread member 122- Protruding portion 82 Hook portion 123 ... Pillar portion 83 Male threaded member insertion hole 124 ··· Large circular plate portion 84 Hook-shaped member 125- Small circular plate portion 90 Annular portion 126- Circular plate portion 91 Convex portion 127… Protrusion 10 •• Boat 128… Inclined surface 10 •• Post 129- Hole 10 •• Plate 130… Protruding part 10 •• Annular hole part 131… The first locking pin is inserted into the hole part This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling in this (Page) ·, ρ 丨 4 -44- 502299 A7 B7 V. Description of the invention 140 · · · Insulation tube mounting base 182 ... Shaft 141 · · Ring section 183 · Protrusion 142 · · · Insulation tube insertion hole 190- Insulation tube mounting table 143 ... 2nd locking pin insertion hole 19b Female thread 144 ... locking portion 192-mounting portion 145 ... projecting portion 193-projecting portion 150 ... locking pin 200- Male threaded member 151 ... Circular plate 210-Insulation tube 152 ... Shaft portion 211 " Insulation tube cover 160 ... Jingzhou 212-Insulation tube cover body portion 16B ... Bottom plate 213 ... Protrusion 162 ... Recess 214-Hole 163 ... The first protrusion forming pin is inserted 215- the recessed hole 220- the male thread member 170 ... the heat preservation tube 221 ... the male thread member is inserted into the hole 171 ... the top plate 222 ... the block member 172 ... the ring shape Section 230 ... The heat-retaining tube mounting table 173 ... Projection 231 ... Projection 174 ... Second projection forming pin insertion 23 2 ··· Female threaded hole portion 310 ... Boat 175 ... Base plate 311- Post 176 ·· Male threaded member insertion groove 312 ... Base plate 180 ·· Protrusion forming pin 313 ~ Through hole 181 ... Circular plate portion 314 ... Recessed portion ( Please read the precautions on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (210X297 mm) 45- 502299 A7 B7 V. Description of the invention ί 3) 320 ... insulation tube 321 ... pillar 322 ... heat dissipation Sheet 323 ... bottom plate 324 ... thread hole 325 ... protrusion 330 ... insulation tube holder 331 ... base body 332 ... peripheral portion 333 ... thread cavity 334 ... through hole 340 ... insulation tube mounting table 341 ... recession 350 ... cover 360 ... male thread Member 361 ... head 362 ... shaft 363 ... connection 364 ... threaded portion 370 ... male threaded member 371 ... head 372 ... shaft portion 373 ... threaded portion 374 ... locking portion (please read the precautions on the back before filling in this Page) 380 ... Locking pin 381- Body 382- Recess 400- Longitudinal heat treatment device 401- Outer tube 402- Inner tube 403 ··· Reaction tube 404- Crystal boat 405- Insulation tube 406… Heating element 407- Gas introduction tube 408… lift 501 … Heat treatment furnace 502… Wafer 503- Reaction tube 504 ·· Heating mechanism 504A- ••• Ship 505… Soaking tube 506 ·· Gas inlet port 507 ·· Exhaust port 508 ... Gas inlet tube 509 -Perforated dispersion plate 510- Bottom plate 511 ... The paper size of the opening is applicable to Chinese National Standard (CNS) A4 specification (210X297). 46-502299 A7 ___B7 V. Description of the invention ") (Please read the notes on the back before filling (This page) 512 ... cover 513 ... insulation tube 514 ... tubular insulator 515 ... top insulator 516 ... fitting portion 517 ... resistance heating element 518 ... bottom insulator 519 ... cover 520 ... water cooling jacket 521 ... support plate 522 ... fitting hole 523 ... restriction member 524 ... mounting hole 525 ... stepped portion 526 ... protrusion 527 ... recessed portion 528 ... retaining body 529 ... temperature detector 530 ... circle W ... wafer size of paper suitable for China National Standard (CNS) A4 Specification (210X297 mm) -47-