JPS61106025U - - Google Patents
Info
- Publication number
- JPS61106025U JPS61106025U JP19104084U JP19104084U JPS61106025U JP S61106025 U JPS61106025 U JP S61106025U JP 19104084 U JP19104084 U JP 19104084U JP 19104084 U JP19104084 U JP 19104084U JP S61106025 U JPS61106025 U JP S61106025U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- engaging part
- supported
- support shaft
- connecting means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19104084U JPH0617281Y2 (ja) | 1984-12-17 | 1984-12-17 | 半導体物品の縦型熱処理装置におけるボ−ト支持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19104084U JPH0617281Y2 (ja) | 1984-12-17 | 1984-12-17 | 半導体物品の縦型熱処理装置におけるボ−ト支持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61106025U true JPS61106025U (nl) | 1986-07-05 |
| JPH0617281Y2 JPH0617281Y2 (ja) | 1994-05-02 |
Family
ID=30748481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19104084U Expired - Lifetime JPH0617281Y2 (ja) | 1984-12-17 | 1984-12-17 | 半導体物品の縦型熱処理装置におけるボ−ト支持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617281Y2 (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008162778A (ja) * | 2006-12-28 | 2008-07-17 | Asyst Technologies Japan Inc | 被搬送物の保管装置 |
-
1984
- 1984-12-17 JP JP19104084U patent/JPH0617281Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008162778A (ja) * | 2006-12-28 | 2008-07-17 | Asyst Technologies Japan Inc | 被搬送物の保管装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617281Y2 (ja) | 1994-05-02 |