JPS6343424U - - Google Patents
Info
- Publication number
- JPS6343424U JPS6343424U JP13636186U JP13636186U JPS6343424U JP S6343424 U JPS6343424 U JP S6343424U JP 13636186 U JP13636186 U JP 13636186U JP 13636186 U JP13636186 U JP 13636186U JP S6343424 U JPS6343424 U JP S6343424U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- loader
- core tube
- wafer
- mounting portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13636186U JPS6343424U (nl) | 1986-09-04 | 1986-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13636186U JPS6343424U (nl) | 1986-09-04 | 1986-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343424U true JPS6343424U (nl) | 1988-03-23 |
Family
ID=31039398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13636186U Pending JPS6343424U (nl) | 1986-09-04 | 1986-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343424U (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01230243A (ja) * | 1988-03-10 | 1989-09-13 | Tel Sagami Ltd | 縦型熱処理装置用移送装置 |
| JPH0348438A (ja) * | 1989-07-17 | 1991-03-01 | Tokyo Electron Sagami Ltd | 熱処理装置 |
-
1986
- 1986-09-04 JP JP13636186U patent/JPS6343424U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01230243A (ja) * | 1988-03-10 | 1989-09-13 | Tel Sagami Ltd | 縦型熱処理装置用移送装置 |
| JPH0348438A (ja) * | 1989-07-17 | 1991-03-01 | Tokyo Electron Sagami Ltd | 熱処理装置 |
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